This paper describes the removal of surface oxidation layer of oxygen free copper using Na
2SO
4 electrolyzed oxidizing water (It abbreviates as EO water). First, the etching characteristics of Na
2SO
4 EO water against the test pieces surface was clarified using H
2SO
4 solution and NaCl EO water for comparative immersion experiments. The results showed that as for etching efficiency on the surface of heating processing, Na
2SO
4 EO water is same as H
2SO
4 solution and NaCl EO water, and on the surface of non-heating, Na
2SO
4 EO water was superior compared with H
2SO
4 solution. Next, by the observation using SEM image, the influence of Na
2SO
4 EO water on the surface shape was clarified. The results indicated that when using Na
2SO
4 EO water and H
2SO
4 solution compared with NaCl EO water, the alien substances occurs in the surface of heating processing. Lastly, as for the test pieces after heating processing, it did the surface oxidation layer removal experiment by the immersion. The results showed that Na
2SO
4 EO water can remove the surface oxidation layer like the H
2SO
4 solution and NaCl EO water, and if using Na
2SO
4 EO water compared with NaCl EO water, there are few levels of contamination by chlorine.
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