We develop an alignment monitor, which detects 10-micro radian of alignment changes between 40 pieces of platy parts called a vane, which configures a cylindrical detector with a height of approximately 750 mm and a diameter of approximately 600 mm, highly stably in a severe environment of 3T of high magnetic field and vacuum for a term longer than several months. Here, we consider for evaluating and stabilizing a free spectral range of an etalon, which is a length reference for the alignment monitor, with an uncertainty smaller than ppm.

The direct measurement of interaction force between two solid surfaces is capable by using atomic force microscopy (AFM). The adhesion force and adsorption force between both surfaces of a silicon tip and a smooth silicon flat are measured, using the atomic force microscope. The result showed that it is found by measuring the force curve that the adhesion force changes depending on the size of the tip radius of curvature. And influence of relative humidity on micro tip adsorption is investigated.

In recent years, nano metal structures have been in the center of considerable attention due to their unique optical phenomenon and potential applications in the field of medical and optics. However, some disadvantages, including low efficiency, high cost and inconvenience, are still existing in present fabrication methods. To solve these problems, a method which utilizes evanescent wave to trap the nanoparticles on the grating surface simultaneously with vibration of grating to fabricate nano structures was proposed. By changing the parameters which depend on evanescent wave and vibration of grating in experiments, the nano metal particles will form into different structures. The fabricated processes reported in this method are less than the other present methods. With these characteristics, the method processed in this research largely simplifies the fabricating process of nano metal structures and improve the processing efficiency.

We have proposed an imaging camera for full Stokes parameters. It can be measured for change polarizance of scattered light, and birefringence. Bio-polarization imaging using snapshot full Stokes camera is demonstrated.

In 3-axis machining, research is underway to perform high-speed and high-precision machining by generating CNC programs with the optimal cord error (tolerance) or the optimal block length, based on the CNC block processing time. In this study, this method is applied to 5-axis machining. CNC programs were generated for high-speed and high-precision 5-axis machining with the optimal block length for the linear axes and the rotary axes in 5-axis machining. Planes were machined by the generated programs, the velocity waveforms and the accuracy were measured, and it was confirmed that high-speed and high-precision 5-axis machining was achieved.