We have fabricated an optical polymer waveguide using plasma-enhanced polymerization. C
6H
6 and C
6H
10 are used as monomer materials for depositing core and cladding layer, respectively, because the refractive index of polymerized layers dominantly depend on the ratio of sp
2 and sp
3 bond in those. By decreasing rf power less than 0.04 W/cm
2 dangling-bonds formed in a polymer film will be suppressed, so that a relative low loss waveguide has been fabricated. We have measured propagation loss of those waveguides in end-fire method by using laser light at 787 nm wavelength. The losses are 3.2 cm
-1 for the samples plasma-polymerized in Ar.
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