We have composed amorphous fluorocarbon (a-C:F) polymer films, which are low-
k insulators, by plasma-enhanced chemical vapor deposition using C
8F
18 as the feedstock. In our previous attempts to form multi-layered a-C:F films under various combinations of plasma power density
P and deposition time
T, it was found that a-C:F films deposited at a high
P (typically 2.0 W/cm
3) in a short
T (∼1 min) became wavy when they are deposited on other a-C:F films deposited at a low
P (0.2 W/cm
3). A heating experiment for the films showed that their thermal tolerance was dependent on
P; films deposited at 0.2 W/cm
3 started to melt at 250-270°C, while those deposited at 2.0 W/cm
3 did at 350-370°C. It is considered that species of the precursors for the a-C:F film deposition are determined by
P through the degree of C
8F
18 decomposition. The waving is induced by heating the lower layer during the deposition of the upper layer. The following conditions are necessary for the waving; the lower layer is deposited at a low
P, the upper layer is deposited at a temperature at which the lower layer expands but does not melt, and the upper layer is not thickened excessively to keep its flexibility.
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