To improve on superconducting characteristics of oxide superconducting thick films, multilayer deposition process in KrF excimer laser ablation method is used to prepare YBCO thick films on MgO and LaAlO3 substrates. Laser fluence, laser repetition rate and substrate temperature were changed at substrate interface deposition (thickness: few run), intermediate layer deposition (thickness: about 300nm) and surface layer deposition (thickness: about 600nm) for both substrates and were optimized in each deposition periods.
In case of using the MgO substrate, strict deposition conditions for each deposition layers were required, particularly related to substrate surface deposition conditions. YBCO (1μm)/MgO thick film prepared under the optimized growth conditions showed a smooth surface and c-axis textured growth. The superconducting propperties of Tc=89.2K and Jc=1.2×106A/cm2 (5K) were obtained.
On the other hand, the broad optimum conditions for YBCO (1μm)/LaAlO3 is easily to produce same quality YBCO films. However, superconducting properties were degraded with increase of thickness in spite of use of multilayer deposition process.
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