[in Japanese]

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We propose a method for managing data access in a distributed system such as production management system. The basic idea of this method is to manage data access by transferring components, which include both data and the access methods, to the users. The method consists of two steps; namely, defining the operation of data by components' network, and offering the operation to the users by transferring the components according to the access privileges of data.

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[in Japanese]

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[in Japanese]

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[in Japanese]

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A tool path generated by current CAM system which is generated by calculating only a geometric between a tool and an objective shape is not considered tool deflection, tool vibration and tool breakage in machining process due to a radical fluctuation of cutting load. The purpose of this research is to generate the tool path that is able to control the cutting load constantly by executing with NC geometric cutting simulation. This report refers to the proposed algorithm to generate the tool path based on integration of feed control and position control.

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The purpose of this research is to develop hi-speed and hi-accuracy machining system. The servo data is the set of position command at every servo cycle time, which is minimum unit of position command in NC machining processes. The servo data is directly generated by geometric model interpolation without NC program. In this research the tool path generation system that is able to predict and compensate the tool deflection and fluctuation of cutting load is proposed. This report refers to the basic concept of proposed system.

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Micro machining requires precise positioning between tool and workpiece. But now the accuracy is restricted to 1/1000 mm or 1/10000 mm. In this report, a traditional method, supplying low voltage between tool and workpiece to find the contact position from the current, is used. Accurate positioning of 20nm or less was obtained by the restriction of the current to STM level.

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[in Japanese]

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Recently, Micro lens arrays (MLAs) are used in flat panel displays (FPDs) for improvement of brightness distribution and expansion of view angle. For the fabrication of micro lens arrays, a single point diamond micro cutting tool which has a nose radius of a few μm, is employed. For protecting a single point diamond micro cutting tool from damage, it is necessary to detection of contact between the micro cutting tool and the workpiece automatically. This paper describes the development of a FTS combined a force sensor which can detect contact with a resolution of less than a few nm and experiment for contact detection.

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The glass can facilitate ductile-mode cutting by applying the fly cutting rather than the turning; ductile-mode allows the glass to be cut 10 times more in depth. An ultra-precision lathe enabled with a cutting force sensor, carbide tools (K10), and soda lime glass work pieces were used during the fly cutting experiments. As a result, a difference in crack ratio was observed. The cutting force's shape between Up-cutting and Down-cutting was observed as well.

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This study aims to realize damage free machining of hard brittle material by the ductile mode machining under high hydrostatic pressure. This paper reports a newly developed machining device that works under 200 MPa, and machining property under high hydrostatic pressure.

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[in Japanese]

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To improve characteristics of optical parts such as liquid crystal displays, patterning vast numbers of micro lenses on a surface is increasing technical importance. A cutting method using a diamond tool is examined to machine a molding die of micro lenses. Realizing the cutting procedure, the developed machining system adopts a cutting unit actuated by PZT and a synchronous control system between the cutting unit and a NC controller. And we developed the cutting machine for a roll die. Through experiments using this developed system, it is confirmed that machining a lot of micro lenses on a die with high precision is possible. And we also confirmed that machining vast numbers of micro lenses on a roll die is possible.

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[in Japanese]

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[in Japanese]

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A novel cutting tool which has micro/nanometer-scale texture on the surface is proposed in this study. By texturing micro/nanometer-scale structure on a solid surface, frictional characteristics can be controlled. To fabricate the textures on a tool surface, femtosecond laser was employed, and the effect of the shape of texture on the machinability of aluminum alloy was investigated by turning experiment applying MQL method. As a result, it was found that the cutting forces decrease by the texture due to the decrease in friction on the rake face. This effect changed with the shape and direction of the texture. These results indicate that this method is effective for the improvement of machinability in MQL method.

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[in Japanese]

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In this research, it is tried to measure the local birefringence of the sample quantitatively. In this paper, the scanning near-field ellipsometer system with an apertureless probe has been created. Moreover, the method of observing birefringence has been described.

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[in Japanese]

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Measurements of the surface shape and optical thickness of a semiconductor mask glass by Fizeau interferometer suffer from an overlapping of several interference fringes, which makes the phase measurement difficult. Wavelength scanning interferometry can separate these fringes in the frequency space. The absolute optical thickness of a 7-inch square mask glass was measured by a phase-shift Fizeau interferometer in a 633 nm wavelength region.

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We propose a new method for simultaneous measurement of refractive index and physical thickness of transparent films by use of an interferometric surface profiler. It is based on a combination of two techniques which we have proposed recently. Firstly the target film is inserted into the measuring optical path, and the surface height change of a back-mirror surface is measured. Then the optical thickness is measured from the two peak positions in the interferogram. From these two measurements, we can obtain the refractive index and thickness of the film separately. The experimental results verify the feasibility of this method.

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A projection type moiré topography using two LC grating devices is proposed. We study the principle for obtaining the moiré contour by changing the LC grating device pitch, and an effect of averaging the grating period with moving the LC grating pattern by electrical control. Moreover, a phase sift technique is also applicable the LC grating device.

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[in Japanese]

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An optical scale for range finding was developed using the computer generated Fresnel hologram technique. The distance between the scale and object is obtained by projecting the Fresnel diffraction pattern on the object surface. A binary phase contrast Fresnel hologram with a 4x4 mm2 square aperture was designed and fabricated with the direct writing electron-beam lithography. The fabricated hologram acts as the range-finding optical scale with a resolution of 20mm.

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[in Japanese]

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A phase-shifting point diffraction interferometer (PS/PDI) with point sources of two single mode optical fibers have been developed, which will be appropriate for the surface figure measurement of large aperture aspheric optics at sub-nanometer scale. Wavefront reflected on an aspheric mirror propagates and changes itself gradually. Therefore measured wavefornt is different from the surface figure. To measure the absolute surface figure from datum obtained in PS/PDI, we have developed the numerical reconstruct method with Helmholtz-Kirchhoff integral.

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[in Japanese]

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The optical filtering system has been developed to measure the position of a micro-ball-end mill. The filtering system consists of a fourier transfer lens and an anti-pinhole. By using the filtering system, clear edge images are observed. However, proper sizes of the anti-pinhole and the lens are not revealed. In this paper, these proper seizes in the optical filtering system are described.

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A novel SNOM probe has been designed and developed for high sensitibity and high spatial resolution. The probe consists of several sub-micrometer scale holes on a metal thin film. The holes are etched by focused ion beam on the thin film at the apex of steepled optical fiber. A generation of optical near-field around the holes has been studied by several experiments and nimerical simulations based on three-dimensional boundary element method for electromagnetic waves. We are trying to detect a prospective generation of optical near-field around the holes by approximating the fiber apex to glass plate. The optical near-field might be converted to far-field light when the distance between fiber apex and glass plate becomes smaller than the thickness of near-field. Therefore the optical near-field will be detected by photo detector indirectly.

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[in Japanese]

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[in Japanese]

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The purpose of this study is to fabricate micro pipe of boron carbide. The mixture of carbon powder and boron powder is irradiated by a laser beam. A hole is formed at the center portion of the laser beam. Boron carbide is producted around the center portion. The effect of irradiation time and laser power on the shape of the micro pipe is examined. Moreover, branched pipes and parallel pipes are fabricated by applying this method.

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It is very difficult to machine sapphire, because of their hardness. By the way it is known that the sapphire can react with silica at high temperature and under high pressure. The purpose of this research work is to machine sapphire by silica during cutting process. Soda glass is selected as silica because the material is containing silica by 70%. The apparatus for machining sapphire is developed and machining experiment is performed.

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In order to manufacture the part of a small lot at lower cost and shorter lead-time, various techniques, such as a rapid tooling, reverse engineering and high speed milling, are proposed. Recently, milling-combined laser metal sintering system (MLMS), which is the devise of sintering the metal powder and milling the sintered metal with end mill at the one process, has been developed to produce the injection molding dies. In this report, the sintering characteristics of the metal powder used for rapid tooling with Yb:fiber laser are described. Relationship between the surface roughness of the plate and sintering conditions, such as a scanning speed and laser power, are investigated. Moreover, the adhesion force between the each plate and the sintered line are measured with dynamometer.

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In the Milling Combined Laser Metal Sintering Process, the overhang shape is formed in the side of the work piece when the following layer is sintered after completing the side of the work piece by milling process. The processing time is long, because the overlapped area to have contained the overhang shape has to be milled. Therefore, making the overhang shape small is required. This paper proposes the laser sintering pattern to reduce the overhang shape, evaluating of how it is formed in the sintering process after the milling process.

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The purpose of this research work is to produce micro part reinforced by unidirectional short fibers by laser photolithography. For alignment of the short fibers, the magnetic field adds to the short fibers. Ferromagnetic short fiber is used and the length is 0.32 micrometer. Therefore, the fiber is suitable for reinforcement for micro parts. The short fibers are added to liquid photopolymer. By applying magnetic field to this mixture, the axes of the short fibers are aligned along the direction of the magnetic field. Then, the photopolymer is solidified by the irradiation of UV laser beam in the desired shape. By layering solidification photopolymer, the micro structure reinforced by short fibers is fabricated. In this research, the orientation of short fibers in vertical plane is varied by the direction and magnitude of magnetic field.

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