Lanthanum chromite (LaCrO
3) has excellent chemical stability at high temperature. LaCrO
3 doped with alkaline earth metals has high electric conductivity as a heater material having operating temperatures starting from room temperature. The purpose of this study is to fabricate heaters using thin films of LaCrO
3 doped with dopant Ca which is deposited on alumina substrates with different purities by RF magnetron sputtering and evaluate their characteristics under any conditions. Thin films of Ca doped LaCrO
3 shows different heating characteristics with dc current drive for the different purity of alumina substrate. In case of lower purity (95.3%), long term stabilities of LaCrO
3 thin film heaters showed the increase of the residence with increasing time. On the other hands, in case of high purity (approximately 99.5%), the resistance was almost constant. It is speculated that impurities, such as SiO
2, contained in a alumina substrate enhance the migration of La, Cr, or Ca atoms through the Pt electrode and increase the resistance of a heater. It is considered the increase of resistance is caused by such reaction.
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