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Whole-space tabulation method is a technique of producing phase-coordinate tables pixel-by-pixel which relates phases of the projected grating to the spatial coordinates. In this paper, it is confirmed that accurate real-time shape measurement can be performed using FPGA memory board.

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The three-dimensional measurement method by SEM has already been proposed by using the principle of shadow moiré. In this method, there are some troubles in order to perform a high-resolution analysis. A new method based on the principle of projection moiré is discussed to solve the troubles. In this paper, the mechanism of producing some shadows of the grid on the surface of the object by back scattering electron beam is discussed. Fringe image as the shadow of grating is analyzed by the Wavelet transform. 3-D precise measurement can be realized by using the phenomenon of shadows of grid by electron. The error analysis of the proposed method is also performed. Furthermore, a three dimensional structure of the head of a hard disk is measured by the system using the grating of which pitch is 4 m. From comparison with AFM, it is confirmed that the proposed method has high-resolution power.

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The process of decomposing complex product into various levels of subassemblies is time-consuming and mistakable at assembly planning stage. Reorganizing directly structure tree in digital system is an efficient method for repartitioning rapidly subassemblies that satisfy various requirements of assembly manufacturing. In this paper, a new assembly model based Assembly Relationship Element (ARE) was firstly proposed, which could support reorganizing structure tree. Some methods of verifying reorganization process and evaluating reorganized result were presented to help user planning subassembly correctly and optimally.

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In this study, to fully utilize the merits of natural language, we aim to propose a methodology for supporting conceptual design using a structured dictionary composed of hierarchal structure of verb/noun. In this report, we construct a conceptual design-specific thesaurus. In particular, we semi-automatically extract the hierarchical structure of verb/noun from an accumulated document related to design. Finally, we show the constructed thesaurus's usability.

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In this study, to fully utilize the merits of natural language, we aim to propose a methodology for supporting conceptual design using a structured dictionary composed of hierarchal structures for verb/noun. In this report, we propose the composition-based function dividing process -the process of combining two different functions and dividing it. We introduce the procedure for creative engineering design into function dividing process and expand the method of conceptual design. Then, we investigate hierarchal structures for verb/noun in supporting the composition-based function dividing process.

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Recently, the fabrication of functional aspherical optical glass lenses with diffraction gratings has been expected. Until now, we searched for Pt-based amorphous alloys as novel glass lens molding die materials using combinatorial method. Although Pt-based amorphous alloys showed good properties for glass lens molding die materials, they are very expensive. In this study, we report the properties of Ni-Nb-Zr thin film amorphous alloys for functional glass lens molding die materials.

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In this paper, it is described that it makes the basic characteristics of electrolytically oxidized water of dilute NaCl clear. First, the structure and the characteristic of the equipment which makes electrolyzed water were described. Next, as for the relation between the electrolytic-current and the characteristic of electrolytically oxidized water, it made clear experimentally. In the same way, it made the change of the characteristics of electrolyzed water by the elapse in the time clear. Also, it measured about the dissolution oxygen concentration in electrolytically oxidized water, too. Lastly, using the etching experimental results to the oxygen-free copper material, it proved the characteristics of electrolytically oxidized water.

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This paper describes the influence of electrolytically oxidized water dilute NaCl on the surface of pure nickel. First, we clarified the etching characteristic of electrolytically-oxidized water of dilute NaCl against the surface of pure nickel using HCl solution for comparative immersion experiments. The results show electrolytically-oxidized water works well for the etching operation, and if the ORP/pH value of the electrolytically-oxidized water is high, the etching speed becomes correspondingly fast. The etching rate of electrolytically-oxidized water is big (about 3 times) compared with the HCl solution of the same pH value. Next, by the observation of the SEM image and surface roughness, the influence of electrolytically oxidized water on the shape of the pure nickel surface became clear. The results indicated that like HCl solution, electrolytically oxidized water has the performance to rough a pure nickel material surface. The study indicates that electrolytically oxidized water can be applied to the surface treatment and washing of pure nickel.

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We have tried to deposit PTFE thin films onto (001) Si substrate by means of rf magnetron sputtering. PTFE disk (75mm in diameter) was used as a target material. Pure Ar (purity: 99.999%) was used as working gas, whose pressure was varied between 0.2 and 1.0 Pa. XPS and FT-IR measurements of as-deposited films showed that the films contain C-F bonds. The film composition was analyzed to be about C:F = 2:3 regardless of deposition conditions. We have also confirmed that our PTFE thin films show water repellency as well as bulk material.

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We have developed a low-temperature and high-rate film growth technology using 150-MHz very high-frequency plasma. By utilizing a cylindrical rotary electrode, silicon nitride (SiN_x) films were prepared from He/H₂/NH₃/SiH₄ mixtures on Si(001) wafers with very high rates (>100 nm/min) at substrate temperatures lower than 300°C. Optical emission spectroscopy was used to discuss the film-forming reactions both in the gas phase and on the growing film surface. As a result, by optimizing the NH₃/SiH₄ ratio and H₂ concentration, a good-quality SiN_x film showing a BHF (buffered hydrofluoric acid) etching rate as low as 12 nm/min was obtained.

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We are developing a low-temperature and high-rate film formation technology using atmospheric-pressure very high-frequency (VHF) plasma. In our previous studies, we have investigated the relationship between the structural and electrical properties of microcrystalline Si (mc-Si) films and the deposition parameters, such as HH₂ and SiHH₄ flow rates, and VHF power densities. In this report, we discuss the growth process of mc-Si films in the atmospheric-pressure VHF plasma by using the PHOENICS software, which is a general-purpose three dimensional numerical simulator for flow and heat transfer.

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This paper proposes the dry etching method for Si-related materials without both PFC gases and unstable and toxic gases. In the experiment, the etchant gases were generated locally by utilizing the chemical reaction between stable fluorocarbon resin and plasma. Then the Si dry etching was achieved at etching rate more than a few μm/min. This result suggests that the proposed dry etching method is useful technology from the viewpoint of eco-friendly manufacturing.

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When thin two plates join it, the gap and surface condition do important role by the decision of the welding performance. However, there are few papers which deal with thermal deformation quantitatively, up to now, by laser lap welding. In the present study, the influence that the gap in lap welding exerted on the welding performance and the influence of thin sheet metal on thermal deformation were clarified. Moreover, the comparisons test of the thin metal thickness of 2mm that assumed the state of the ideal with no gap between two metals was tried.

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