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A recycling system for water-soluble coolants has been developing to reduce the environmental load in machining process. The recycling of conventional water-soluble coolant is required high cost and high materials and energy consumption. Because some amines derivatives don′t respond well to either physical or chemical treatment. The amine-free coolant showed an excellent performance in processing of coolant. The materials consumption and processing cost became about one fifth as those of conventional coolant. In addition, the amines-free coolant has been displaying the similar fluid abilities as those of conventional coolant during a long-term aged deterioration test. These facts indicate that a smart using of amines-free coolant can reduce the environmental load dramatically in the machining process.

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High-throughput is one of the critical issues in the commercialization of imprint lithography, and it can be mainly accomplished by increasing mold size and reducing the cavity filling time. Up to date, AIST has performed research that aimed at quick cavity filling within 0.1 s in the UV imprint lithography. In the previous study, the authors found that the bubble-free filling of mold cavities during UV-nanoimprint can be completed within 0.6 s by using pentauoropropane as ambience gas. However, to further enhance filling rate and wide usability, a cavity filling analysis model based on Stefan's equation should be established by investigating the relation between process factors (e.g., the initial thickness and viscosity of resist, cavity size, imprinting time, and imprinting pressure) and sinking depth. In this study, the cavity size dependence of cavity filling behavior was investigated.

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Ni-P plated on a Si substrate was not able to be used for a thermal nanoimprint at the high temperature of 630 ºC or more because an adhesion force was weak. We thought that the cause was in the difference of a coefficient of thermal expansion between the Si substrate and Ni-P, and changed the substrate material to Inconel 600. The pattern of microlenses and the AIST logo was processed on the Ni-P electroless-plated Inconel alloy substrate by a focused-ion-beam lithography, and a mold was completed to imprint a Pyrex glass.

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It is very useful to measure hemorheology to keep tabs on health. However, both place and time are limited for hemorheology measurement, since it needs a blood sample. It also can′t measure noninvasively. So we try a new viscometry of static particulate solution by detecting particulate behavior due to the Brownian motion with MEMS blood flowmeter which is wearable sensor for monitoring blood flow noninvasively at all time as a previous work of noninvasive hemorheology measurement with MEMS blood flowmeter.

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It is anticipated to measure blood flow noninvasively with MEMS blood flowmeter as new method of health checkup. However, it is required to measure blood flow with optimal pressure at all time, since the signal and the figure of blood flow change, the pressure of measurement site changing. When we measure the blood flow with optimal pressure, it seems that S/N ratio improves so that the figure of blood flow may appear remarkably. Then this study shows the pressure sensor that was able to be built into the blood flowmeter was developed, and the correlation of the load pressure and the blood flow was examined.

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The chickens infected by bird flu have swelling and hyperemia. it is considered that they have cardiovascular trouble. Therefore, measuring blood flow is important for preventing bird flu pandemic. Then, we developed new laser Doppler blood flow sensor fabricated by MEMS technology to attach to chickens. The new MEMS laser Doppler sensor is four hundredth part of power consumption for conventional laser Doppler blood flow sensor. In the preliminary experiment, the chickens′ blood flow change is successfully observed by attachment of the new MEMS blood flow sensor. The paper reports about the successful result of measuring blood flow for several days.

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We developed a prototype wearable wireless node with a thermister and an accelerometer for a chicken, and evaluated the availability of a method for detecting chickens infected with the highly pathogenic avian influenza (HPAI) viruses using intermittent data at the early stage. Chicken infection experiments by using the wireless node showed that weakness and fever of the infected chickens were detectable before chickens showed clinical signs and gross lesions, and death of infected chickens was noticed by the sudden decrease in body temperature. This study indicates a possibility that the wearable wireless node would be a useful tool for detecting the HPAI outbreaks at the farms. The feasibility of developing a low power wireless sensor node is also shown because the influenza can be detected using intermittent data.

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Recently, the influenza infection measures against the bird that threatens the safety of food become big problems. The development of treatment and preventive method with high effect is need for the damage reduction by pandemic virus, and it is indispensable to measure, accumulate various vital sign changes with infection chicken more in detail and analyze data. This research newly paid attention to the autonomic nerve system(ANS), examined the evaluation method and the technology of making to visible for continuous measure with amall electrocardiograph sensor(ECG). In this result of experiment with bird, the autonomic nervous activity evaluation by a long-term, continuous measurement and the heart rate variability analysis was possible.

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In this report, a trial of the evaluation of micro lens using phase shift shearing interferometer with plane parallel plate are discussed. Shearing interferometry is a measuring method by interference between a wave front under test and itself but sheared slightly. The method is robust to disturbances because it is a common path interferometry. Moreover it is not necessary to prepare reference surface. Therefore it can be said that it is a practical measuring method. By using this interferometer, measurment of surface shape, aberration and decentering of micro lenses are demonstrated.

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This paper aims to report potential applications to precision position control of Selective Compliance Assembly Robot (SCARA) applying analysis of non-linear vibration. Position accuracy of horizontal articulated robot is investigated by servo mechanism, control compensator and task-coordinate servoing method. SCARA is known for its smooth acceleration and deceleration with servo control. On the assuming that non-linear vibration is one of the important factor for position accuracy, the analyses against mechanical system of horizontal articulated robot were adapted. The procedure is as follows. 1. Dividing the vibration phenomena to each level of oscillation amplitudes 2. Analytically modeling the system and calculating with accurate analytical procedures: numerical solutions, analytical solutions and identifying the function or natural frequency by the step response of an equivalence circuit. 3. Measures are undertaken at each phase. Against the problem on errors of detection equipments for future industrial robot, which was working together between humans, auxiliary sensing system was described as remaining problems.

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Manipulating small optics less than 1 mm under a microscopic view is increasingly required due to the increase of assembling 3 dimensional bulk type of optics. Handling such small optics has a particular difficulty both in avoiding electrostatic force, viscous force, and surface tension in handling and in making a design of ridged structure in limited workspace. For an assembling process of micro lens array (MLA) to a ferule with multi optical fibers, we use the manipulation mechanism driven by wires and the picture processing. First, the master patterns are created for pattern matching and driving functions are derived from the position of MLA and the ferrule. Second, alignment motions are carried out by driving the manipulator with 5-DOF according to the function. This paper describes the driving strategy and the function for positioning the MLA and the ferrule by the manipulator, and shows the result of operation actually.

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Recently multi legged walking robots are widely developed. For these robots to walk safely, a sole sensor with high performance is desired. In the present paper, an arrayed type tactile sensor made of flexible silicone rubber such as PDMS (poly-dimethyl-siloxane) is practically developed based on micro-electro-mechanical-systems (MEMS) technology. By processing the force data from many sensing elements using neural networks, information of contact force, i.e., three dimensional x, y, and z components of force vector, can be detected, which is confirmed by both simulation and experiment.

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At present state, almost the robot tasks are performed by the teaching playback method, in which the robot repeats the motion taught in advance using a teaching pendant, etc. This method is based on the comparatively high repeatability of the robot arm, thus the environment is required to be strictly constant for all the trials. On the other hand, a human can skillfully achieve the task such as assembly with adapting to the environmental change. In this process, he uses the sensor feedback, i.e., he adjusts the motion based on the sensor information. In this research, the pin insertion task to a hole without chamfering and with small clearance is focused on. This task is difficult for a robot by only applying the teaching playback method, so the force sensor feedback is required. The problem here is that this task is difficult even by employing a force sensor, since the way of insertion based on the force information is not established. In this research, the pin insertion task is aimed to be achieved by imitating a human motion, extracting and defining the rule using membership functions, and executing the task based on fuzzy control.

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For the purpose of simultaneous localization and mapping (SLAM) of an indoor mobile robot, a method to process only one monocular image (640x480) of the whole view of environment is proposed. This method imitates that a human can grasp momentarily the situation of a room, i.e., the layout of objects/obstacles. It is not required for a robot to move around the room while probing the objects/obstacles by some sensors, which is usually done in SLAM research. Object recognition is done by using scale invariant feature transform (SIFT), partial template matching, and object relative restriction. Additionally, verification of object category by AdaBoost classifier using Haar-like features based on information on the object shape.

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Whole-space tabulation method is a technique of producing phase-coordinate tables pixel-by-pixel which relates phases of the projectedgrating to the spatial coordinates. In this paper, it is confirmed that accurate shape measurement can be performed using phase reliability evaluation value with synthesis measurements data.

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Optical measurement methods such as the moire topography or the light-section method need the equipments of projection and receiving of the light. Scanner or copier which spread widely as the information appliance has the same components too. The moire topography using an image scanner on the market is examined in this study. The fringe analysis is attempted applying the specificity of the scanner. There are many advantages to the scanner, the image data is saved in the computer directly and useful software is available.

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