Proceedings of JSPE Semestrial Meeting

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An electrostatic chuck comprising of micropillar arrays is developed through etching process. Such structure exhibits mechanical compliance by which this device is able to handle objects with rough surfaces. Though the use of electrostatic force for chucking/clamping applications has wide implementation areas, it has been limited to flat surfaces only. This is resulted by significant reduction of the electrostatic force when handling surfaces with asperity. In past researches, a structure with micropillars is proposed and tried, but scalability toward a working prototype with larger number of pillars introduces reliability issues in fabrication and operation. In this study, a proof of concept of an electrostatic chuck with 500 micropillars is presented. A stainless steel layer consisting of an array of 50 micropillars with 40um x50um rectangular cross section for each pillar is fabricated. Ten layers are assembled to compose a working electrostatic chuck prototype. A single voltage polarity is applied to the micropillars acting as electrodes. The maximum attractive force and the factors contributing to the force drop are analyzed. Subsequently, experiments for picking up objects with various surface profiles are conducted to show the capacity of the developed prototype.

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Fabrication method of an inverse opal structure based on simultaneous self-assembly of the different materials and particle sizes is reasonable in terms of simple and high speed process. In this study, we prepared binary suspensions containing larger polystyrene particles and smaller silica particles, and attempted to make the inverse opal structure by removing polystyrene particles from the complex assembly. Firstly, the process requirements and limitation were made clear. Then, the effect of the structural characteristics such as pore size on the optical properties were made clear because regularly-spaced inverse opal structure can change the reflectivity.

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A new fabrication process of double layer rod resonators on a quartz glass substrate is developed to produce optical metamaterial. This process consists of two phases. The first phase is fabrication of a first layer nano rod array on a quartz glass substrate by means of nano plastic forming and annealing. The second phase is fabrication of a double layer nano rod array by means of sputter coating of SiO2 layer and Au layer, and thermal dewetting.

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Fabrication of micro structures using Electron beam Nano Fusion system (ENF-3500) was carried out for Si(100) surface. By spot electron beam irradiation, Silicon cone was formed. The shape of the cone depends on the irradiation conditions. When electron beam was irradiated on a square of Si(100) surface, Silicon was melted and flowed. Then, Si(111) surface was appeared, and V-groove and protuberance was formed.

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