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Bending mode is BM(Buckling Mechanism) with the thin sheet, so that the control of the direction of bending is difficult. The curvature of the length and breadth of the initial shape of the sheet is decided the direction. And the scanning speed of TGM (Temperature Gradient Mechanism) or BM is found by. The sheet can be bent in both a concave and a convex by two kinds of scanning speed.

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The processing mechanism of laser bending was examined.

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In the previous studies, the welding model was assumed as a bead-on-plate, and calculated it in an ideal state of butt welding without gap. However, there is a gap in the actual welding by all means. Therefore, it is necessary to consider this for a calculation. The correct numeration way is not yet established now.For this matter, influence of the gap in case of butt welding taken by real welding was examined.In the butt welding with a gap, the focal positions of lens and energy distributions to the materials are important. The deformation by the butt welding included thermal expansion of the melting zone became clear.

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[in Japanese]

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[in Japanese]

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[in Japanese]

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To create a future system of extreme-ultraviolet (EUV) lithography, an innovative light source with 13.5nm wavelength is demanded very high power and long operation life at high repetition rate. Tin target has significant potential for high conversion efficiency (CE). We have proposed a new method to develop high performance EUV light source by using the tin target with a through hole. We evaluate the EUV emission property and perform absolute measurement of EUV in-band radiation from tin laser-produced plasma by using cylindrical through-hole target.

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[in Japanese]

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When heat occurred in the inside of the glass, the crack occurs in a random course, and a phenomenon is complicated. In addition, in the case of inside processing with the laser, the mechanism is very peculiar or unique. A purpose of this study is to investigate the mechanism of the inside processing of the glass. By nanosecond pulsed THG-YVO4 laser, laser processing of inside-glass was performed. The phenomenon that processing went in the glass inside was observed by a high speed video camera, and it was analyzed in detail.As a result, the processing of the glass is just occurring in the direction of laser beam path. The phenomenon of the processing are related to an outbreak of the plasma and the change of the internal refractive index. When an internal small cavity (void) led to surface of glass, a gaseous thing gushed out outside. From this, it was recognized that the inside of void was filled with evaporation gas of glass materials.

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[in Japanese]

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[in Japanese]

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[in Japanese]

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Due to the high functionality of polymeric materials, they are widely used in various applications. In this research, first the ablation of PMMA (Polymethylmethacrylate) using Excimer laser is studied. In order to fabricate less thermally-affected surface, the processing characteristics of PMMA laser ablation were investigated. Through simulation and actual experimentation, it is found that the cutting depth was proportional to irradiation pulse number. Therefore, when the laser frequency is fixed, by changing the feed rate of the work piece, the irradiation pulse number and the cutting depth can be controlled. Based on the control of work piece feed rate, the free-form surface machining method of PMMA using Excimer laser is proposed.

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[in Japanese]

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The IC decapsulation is generally processed by chemical technique. Such a chemical process cases bad influences to the global environment and worker′s health. And the removal efficiency is not so sufficient for industrial process. In this paper, the laser processing technology is applied for a technological improvement of IC decapsulation, and the relationship between processing condition and processed surface quality is reported.

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This research work is concerned with synthesis of titanium boride film and the application for grinding wheel. At first, boron powder is spread on a titanium substrate. Next, the surface of substrate is scanned by a YAG laser beam and then titanium diboride film is produced on the substrate by the chemical reaction between boron and titanium. These films are examined as the surface of grinding wheel. This paper deals with the conditions of film synthesis such as laser scanning distance, degree of defocus, and examinations of surface shapes and properties to grinding process.

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[in Japanese]

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This report summarizes the trend of piezoelectric actuators and their applications. Because the piezoelectric actuators have a potential of nanometer-order positioning accuracy, they have been used in precision positioning machines. The applications are classified by the driving principles. In these years, the piezoelectric actuators are used for miniaturized devices such as a positioning device of lens or anti-shake device in digital still cameras and cellar phones. Lead-free piezoelectric ceramics are demanded of the treatment of RoHS directive. Some literatures about the precision positioning and actuators are introduced.

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[in Japanese]

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In this study,a resonance type ultrasonic motor that consists of two piezoelectric elements(PZT) and a metal elastic body was developed. The ultrasonic motor can be driven by one of the PZT. When PZT vibrates at reonance frequency of elastic body, the contact point of between motor and carriage moves elliptically and the driving force is generated. The Drive direction can be easily changed by switching PZT. In this article, a design of the ultrasonic motor, the principal, and driving results of the positioning device are presented.

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[in Japanese]

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We developed a horizontal ultraprecision device (200mm stage stroke) using the combination of a new type of liner motor developed by Hitachi Ltd. and linear ball guide way, and obtained sub-nanometer positioning resolution and positioning error (deviation and dispersion).The purpose of this study is to construct the vertical ultra precision positioning device driven by this new type of linear motor. The device is subject to Abbe's principle and Bryan alighment principle. Practically, we obtained 1nm positioning resolution.

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[in Japanese]

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[in Japanese]

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The error of the rotary encoder is influenced from the error of the disk,the sensor head, and the assembling.And some dynamic errors occur, which are caused by the change of relative position and attitude of the disc and the sensor head made the various disturbances.The purpose of the research is to develop sensor which correct the error caused by influence of disturbances is added the rotary encoder.In this report,the following are reported.1)About the experimental apparatus2)Relation between given disturbance and measurement data and between given turbulence and error.

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[in Japanese]

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ELID-grinding is expected to be applied to most grinding operations in productions. Especially, the combination of ELID and an ultra precision grinding machine has been proved to be effective for obtaining higher shape accuracy, and lower subsurface damage, together with improved surface roughness. Recently, a surface quality control machining method has successfully been applied to mass production on iron works. In this paper, new challenges on ELID grinding for diversified manufacturing needs are discussed.

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We investigate the relation between dressing condition at ELID-grinding and tribological properties of wheel and the grinding properties from the view point of the tribo-fabrication. Under the low electrolysis condition, tribological properties change by electrolysis condition and relation between manufacturing condition of tool and grinding properties becomes clear. Under the high electrolysis condition, specific wear rate of wheel sample before and after electrolysis corresponds to the wheel wear.

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[in Japanese]

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Several metal cutting methods involving the assistance of ultrasonic vibration, including turning, grinding, drilling and milling, have been studied. Following benefits are obtained by the ultrasonic-vibration metal cutting. The accuracy of micro or super precision cutting is improved, because the deflection of a micro-cutting tool is prevented by the dynamic characteristic of the ultrasonic vibration generated during ultrasonic-vibration cutting. The grinding efficiency and accuracy of brittle materials, such as glass, ceramics and sintered tungsten carbide, are improved by the pulsation-grinding force due to the ultrasonic vibration generated during ultrasonic-vibration grinding. I would like to introduce several recent studies and the practical development of ultrasonic-vibration-assisted machining technology.

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This report discusses the correlation among of Cutting conditions, Output power of the ultrasonic(amplitude) and the characteristic of materials byanalysing the experiments data of various sheet materials cutting with the ultrasonic cutter.

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This paper deals with the fabrication of micro PCD drills with a nominal diameter of 300 μm and their application. The fabricated drills were used in the drilling into quartz glass. In the drilling test, characteristics of the drilling and effects of ultrasonic vibration were investigated.

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Responding to the requirements to handle difficult to dice materials such as glass,ceramics, metal and composite, the ultrasonic wave assisted dicing process has been developed. In this paper, the DISCO dicing saw with the ultrasonic wave air spindle was introduced. Based on the results of testing, spindle current can be significantly reduced, process efficiency increased and blade wear reduced when ultrasonic oscillation is used.

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[in Japanese]

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