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Ryohei Hanayama, Katsuhiro Ishii, Akira Ishida, Toshiyuki Fukushima, S ...
Session ID: K33
Published: 2009
Released on J-STAGE: August 25, 2009
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In this report, a trial of the evaluation of aspherical lens using phase shift shearing interferometer with plane parallel plate are discussed. Shearing interferometry is a measuring method by interference between a wave front under test and itself but sheared slightly. The method is robust to disturbances because it is a common path interferometry. Moreover it is not necessary to prepare reference surface. Therefore it can be said that it is a practical measuring method.
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Surface figure measurement of parabolic mirror
Toshiaki Matsuura, Kazuaki Udaka, Yasushi Oshikane, Haruyuki Inoue, Mo ...
Session ID: K34
Published: 2009
Released on J-STAGE: August 25, 2009
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A phase-shifting point diffraction interferometer (PS/PDI) with two optical fibers has been developed for absolute surface figure measurement of large aperture optics. Diffracted spherical wave from point light source is used for standard surface in a PS/PDI. A PS/PDI is appropriate for surface figure measurement of concave mirror. Absolute aspherical mirror measurement is needed. Surface figure measurement of parabolic mirror has been studied as aspherical measurement.
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Seiichi Kakuma, Yasuhiko Katase
Session ID: K36
Published: 2009
Released on J-STAGE: August 25, 2009
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Masaaki Adachi, Masanori Kawamura, Yuuta Iwao
Session ID: K37
Published: 2009
Released on J-STAGE: August 25, 2009
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Keisuke Nose, Yoshihiro Oshida, Yoshihisa Iwahashi
Session ID: K38
Published: 2009
Released on J-STAGE: August 25, 2009
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Yasuhiko Arai, Yasunori Tsutsumi, Shunsuke Yokozeki
Session ID: K39
Published: 2009
Released on J-STAGE: August 25, 2009
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Temporal carrier technology is introduced to electronic speckle interferometry in order to produce virtual speckle patterns. Then, dynamic deformation measurement with a large deformation is performed by using virtual speckle pattern. However, in this method, it takes a long calculating time to make virtual speckle patterns, because the temporal carrier analysis is performed in each pixel of CCD. In this proposed method, virtual speckle patterns are produced without temporal carrier analysis. Then, Carre algorithm is employed. As the results, the calculating cost is improved remarkably and the high measurement accuracy is realized.
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Yuta Urano
Session ID: K40
Published: 2009
Released on J-STAGE: August 25, 2009
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Laser light scattering is commonly used for surface-defect inspections in nanofabrication processes such as the manufacture of semiconductors and hard disks. In this paper, convex/concave discrimination of nano-scale defects on surfaces utilizing laser light scattering is described. Angular distribution of scatter intensity is analyzed for common silicon wafer surface defects (particles, crystal originated particles, and microscratches) using Discrete Dipole Approximation simulation. We show an example of a new method for convex/concave defect discrimination that utilizes angular distribution in both the azimuthal and elevational directions on the basis of calculated defect scatter characteristics. The results of our evaluation show that discrimination accuracy improves compared with the conventional method that utilizes angular intensity distribution only in the elevational direction.
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Shunji Yoshihiro, Keiichi Kimura, Panart Khajornrungruang
Session ID: K61
Published: 2009
Released on J-STAGE: August 25, 2009
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Takanori Yazawa, Yukio Maeda, Takashi Tamura, Tadahiro Yamaide, Masata ...
Session ID: K62
Published: 2009
Released on J-STAGE: August 25, 2009
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Tadahiro Yamaide, Takanori Yazawa, Yukio Maeda, Takashi Tamura, Kimihi ...
Session ID: K63
Published: 2009
Released on J-STAGE: August 25, 2009
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Hideo Sakuma, Akira Kakuta, Toshitake Tateno
Session ID: K64
Published: 2009
Released on J-STAGE: August 25, 2009
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Observation method for contact state of solid surface such as the metal object is proposed. The method is based on the total internal reflection of prism. Elastic layer between the prism and the test surface enlarges the contact area. High polymer sheet or textured material is used as the elastic layer. Depth distribution of the surface is estimated from the observed contact pattern. The depth rang from several micrometer to above a hundred micrometer is adjusted by the sheet thickness or applied load.
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Akihiro Masaya, Motoharu Fujigaki, Yoshiharu Morimoto
Session ID: K66
Published: 2009
Released on J-STAGE: August 25, 2009
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Fumio Kobayashi, Yukitoshi Otani, Toru Yoshizawa
Session ID: K67
Published: 2009
Released on J-STAGE: August 25, 2009
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introduce of digital device
Toru Yoshizawa, Toshitaka Wakayama
Session ID: K68
Published: 2009
Released on J-STAGE: August 25, 2009
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A lot of reports have been proposed on pattern projection methods and nowadays these have been reached to practical applications. However, the problem has been issued that the pattern using a conventional projection method inclines the standard plane on the projected surface. Until now, our group has been developed a digital device using a liquid crystal and achieved fast-three dimensional measurement. We report to solve the countermeasure of this problem by projecting a deformed grating.
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Motoharu Fujigaki, Takayuki Shiokawa, Akihiro Masaya, Yoshiharu Morimo ...
Session ID: K69
Published: 2009
Released on J-STAGE: August 25, 2009
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Inner 3D Measurement of a Cavity
Kazuhiro Enami, Tatsuya Kume, Yasuo Higashi, Kenji Ueno
Session ID: K73
Published: 2009
Released on J-STAGE: August 25, 2009
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introduce of geometrical consideration
Toshitaka Wakayama, Toru Yoshizawa
Session ID: K74
Published: 2009
Released on J-STAGE: August 25, 2009
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Our group has studied an inner profile measuring method using a ring beam device which consists of a conical mirror and a laser diode. Using this instrument, we can measure the inner surface profile of a cylindrical shape with non-contact and fast speed. We will show a new instrument which became more compact than the 1st report as demonstration. Moreover, we will show the evaluation results of the conical mirror using a diffraction technique. In addition of these results, we will discuss geometrical considerations from the measured profile of sample.
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Shinobu Nakamura, Daisuke Chino, Eiji Higurashi, Tadatomo Suga, Renshi ...
Session ID: K75
Published: 2009
Released on J-STAGE: August 25, 2009
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Numerical analysis of electromagnetic field closely a micro particle tool
Leona Nakamura, Yasuhiro Takaya, Terutake Hayashi
Session ID: K76
Published: 2009
Released on J-STAGE: August 25, 2009
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Terutake Hayashi, Yasuhiro Takaya, Hiromichi Okabe, Atsushi Baba
Session ID: K78
Published: 2009
Released on J-STAGE: August 25, 2009
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Takashi Miyaguchi, Hiroshi Saito, Tomoyuki Kato, Kohroh Kobayashi, His ...
Session ID: K79
Published: 2009
Released on J-STAGE: August 25, 2009
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Spectroscopy for unstructured environmental measurement
Takashi Takuma, Kazuki Yamamoto, Takaki Harada, Takeshi Kawajiri, Kana ...
Session ID: K80
Published: 2009
Released on J-STAGE: August 25, 2009
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We are aiming to apply the imaging-type 2-D Fourier spectroscopy into unstructured environment. The imaging-type 2-D Fourier spectroscopy is the phase-shift interferometry between the objective rays without the reference lights. Therefore, this proposed spectroscopy can be constructed only with reflective optics without the half mirror. In this report, we mention the configuration of the spectroscopic telescope for 2-D spectroscopic imaging of astronomical body.
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Shinji Yabushita, Kazuya Yamamoto, Takaki Harada, Takeshi Kawajiri, Ka ...
Session ID: K81
Published: 2009
Released on J-STAGE: August 25, 2009
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We proposed the imaging type 2-D Fourier spectroscopy that is the phase-shift interferometry between the objective lights. The proposed method can measure the 2D spectral image at the limited depth. Because of the imaging optical system, the 2D spectral images can be measured in high spatial resolution. In this report, we mention about the improvement of the optical system for spectroscopic tomography in infrared region.
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Ju/kyoung Lee, Masahiro Sakuta, Hiromitsu Gotoh, Hideki Takezawa, Naot ...
Session ID: L01
Published: 2009
Released on J-STAGE: August 25, 2009
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Masaru Suzuki, Rie Tanabe, Yoshiro Ito, Naotake Mohri, Takahisa Masuza ...
Session ID: L02
Published: 2009
Released on J-STAGE: August 25, 2009
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Masahito Kimori, Masanori Kunieda
Session ID: L03
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Hirofumi Mikami, Takazo Yamada, Hwa-Soo Lee
Session ID: L04
Published: 2009
Released on J-STAGE: August 25, 2009
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Yuki Kaneko, Kenji Morimoto, Masanori Kunieda
Session ID: L06
Published: 2009
Released on J-STAGE: August 25, 2009
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Teruya Doke, Shinya Hayakawa, Fumihiro Itoigawa, Takashi Nakamura
Session ID: L07
Published: 2009
Released on J-STAGE: August 25, 2009
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Yosiaki Akematsu, Kazuro Kageyama, Naotake Mohri, Hideaki Murayama
Session ID: L08
Published: 2009
Released on J-STAGE: August 25, 2009
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Burst acoustic emission waves were detected during single pulse discharge. Behavior of burst acoustic emission wave depends on cavitations behavior. In this study, air, oil and glycerin were applied as gap region medium. Acoustic emission wave was detected by optical fiber vibration sensor that was not affect on electrical magnetic noise. As the results, burst acoustic emission wave was detected only at once in air and glycerin discharge. On the other hands, burst acoustic emission wave were detected several times in oil discharge.
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Takayuki Tani, Hiromitsu Gotoh, Daichi Kinoshita, Haruo Sai, Naotake M ...
Session ID: L09
Published: 2009
Released on J-STAGE: August 25, 2009
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Observation of Discharge Current
Katsushi Furutani, Hiroyuki Shintani, Yasuo Murase, Shuichi Arakawa
Session ID: L13
Published: 2009
Released on J-STAGE: August 25, 2009
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This report deals with the machining performance of electro-chemical discharge machining (ECDM) with multiple electrodes. Holes were machined by ECDM on glass. The forced discharge current was observed during the machining process. Its machining performance was compared with those with multiple electrodes connected electrically in parallel (equi-potential) and a single electrode. A current with a duration of several milliseconds preceded a series of sharp pulses below 200 μs in the single electrode and divided power method. Long and low peak current pulses occurred in the equi-potential method.
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Atsushi Terada, Takashi Kunimi, Wataru Natsu
Session ID: L14
Published: 2009
Released on J-STAGE: August 25, 2009
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Non Short Circuit Electrode for Machining Curved Holes
Mitsuo Uchiyama, Yoshirou Noguchi, Masanori Kunieda
Session ID: L15
Published: 2009
Released on J-STAGE: August 25, 2009
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Yozo Sakai, Hidetaka Miyake, Kazuhiko Umeda, Naotake Mohri
Session ID: L16
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Masaaki Sano, Kazunori Fujihara
Session ID: L18
Published: 2009
Released on J-STAGE: August 25, 2009
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Shin Muramatsu, Hiroaki Ito, Hajime Osaka, Takafumi Sato, Koh-ichi Sug ...
Session ID: L19
Published: 2009
Released on J-STAGE: August 25, 2009
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Atsutoshi Hirao, Takayuki Tani, Hideki Takezawa, Namba Kazuyuki, Naota ...
Session ID: L20
Published: 2009
Released on J-STAGE: August 25, 2009
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Yoshitaka Ueyama, Xiaoyou Zhang, Tadahiko Shinshi, Akira Shimokohbe, T ...
Session ID: L21
Published: 2009
Released on J-STAGE: August 25, 2009
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Shunsuke Hirai, Shunsuke Tomura, Masanori Kunieda
Session ID: L23
Published: 2009
Released on J-STAGE: August 25, 2009
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Hiroaki Mamuro, Masahide Yamashita, Ken Yamashita, Yasushi Fukuzawa, M ...
Session ID: L24
Published: 2009
Released on J-STAGE: August 25, 2009
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Masanori Nakazawa, Masayuki Higashi, Akira Okada, Yoshiyuki Uno, Toshi ...
Session ID: L25
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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In wire EDM using a fine wire electrode, uniform distribution of spark location is necessary to achieve the high-performance machining. Branched electric current method has been conventionally used for evaluating the distribution of spark location. However, when the workpiece thickness is very thin, it is difficult to evaluate precisely the distribution of spark location by the conventional method. In this study, a new evaluation method by a using high-speed video camera is proposed. The positions of discharge are analyzed using the recorded high-speed images during machining. Then the effects of wire tension and wire running speed on the distribution of spark location are investigated by the new method.
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Effect of working fluid jet flushing from nozzles
Shinya Onoda, Akira Okada, Yoshiyuki Uno, Koji Tabuchi
Session ID: L26
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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In wire EDM, better exclusion of debris and bubbles from the working gap is important to obtain stable electrical discharges and high-performance wire EDM characteristics. However, the flow field of working fluid in the gap has not yet been made clear sufficiently. The purpose of this study is to clarify the fluid flow and to recommend better conditions for jet flushing of working fluid from the nozzles by CFD (Computational Fluid Dynamics). In the previous report, the effects of wire running speed and the workpiece thickness were discussed. In this report, the effects of working fluid jet flushing conditions from nozzles such as flow rate and nozzles gap distance on the flow field and debris exclusion were investigated.
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Daiki Hanaoka, Yasushi Fukuzawa, Naotake Mohri
Session ID: L31
Published: 2009
Released on J-STAGE: August 25, 2009
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Ryuji Ito, Yasushi Fukuzawa, Takayuki Tani, Naotake Mohri
Session ID: L32
Published: 2009
Released on J-STAGE: August 25, 2009
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Koji Kawatani, Yasushi Fukuzawa, Takayuki Tani, Naotake Mohri
Session ID: L33
Published: 2009
Released on J-STAGE: August 25, 2009
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1st report Effect of binary metal alloy composition
Masahide Yamashita, Yasushi Fukuzawa
Session ID: L34
Published: 2009
Released on J-STAGE: August 25, 2009
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Preliminary Experiments and Prototype of Cutting Machine
Katsushi Furutani, Eiji Ikeda, Tatsuaki Okada, Kazuto Saiki, Hiroyuki ...
Session ID: L36
Published: 2009
Released on J-STAGE: August 25, 2009
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In order to elucidate the origin of the space and the earth, it is demanded that a part of rocks showing above the surface is sampled and its inside is inspected on moons, planets or comets. In this report, cutting characteristics of rocks in air and vacuum were investigated for the preprocess of the scientific inspection. Basalt was cut with a saw wire reciprocated. The machining amount was proportional to the number of the wire reciprocation in air. However, the machining amount in vacuum was saturated in a short time. The electrification by the fracture of the rock caused loading on the saw wire.
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In case of cylindrical Workpiece
Yoshinori Abe, Kentaro Nirasawa, Hiroki Tou, Hitoshi Suwabe, Ken-ichi ...
Session ID: L37
Published: 2009
Released on J-STAGE: August 25, 2009
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Relationship between Slicing Characteristics and Diamond Grains or Base oil
Keiji Tsunokawa, Tomohisa Ueno, Hitoshi Suwabe, Ken-ichi Ishikawa
Session ID: L38
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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