Proceedings of JSPE Semestrial Meeting

Nonlinear effect of torsional spring of micro-mirror scanner generates several problems such as resonant frequency shift. Adding a spring effect of electrostatic force, a method to reduce the nonlinear effect is studied analytically. The hard-spring effect of torsional spring is compensated by the soft-spring effect of electrostatic spring.

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For improvement of the coated cutting tools′ life-span, their regrinding and recoating are commonly used. Successful regrinding and recoating require previous hard film removal or decoating. Up to date chemical processes were commonly used for decoating, however they have several known issues, such as chemical waste generation, operation and handling hazards, cobalt removal from the cemented carbide tools, etc. This paper presents a novel method of hard coating removal from variety of cutting tools such as end mills, drills, insert cutters, hob cutters, etc. The method is based on the ion beam etching process. Ar working gas was utilized for the metal based composite films (TiN, TiAlN, AlCrN, etc) decoating, while O2 gas was utilized for removal of carbon based thin films such as DLC and PCD. The etching rates of various films were measured and discussed in terms of physical sputtering in case of Ar process and ion assisted reactive etching in the case of O2 process. It was shown that literally any sort of thin film used in today′s coating industry can be successfully removed with the ion beam etching method. Reported decoating technique is environmentally friendly, safe and highly efficient alternative for the conventional methods.

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We have been exploring a Ni-free material showing stable self-propagating reaction for medical use, and reported that Ti-Si multilayer films could be a promising candidate. However, the reaction of this material was found to be so sensitive that handling of the films was not easy. The purpose of this work is to control the reaction behavior of the multilayer films with using SiOx layer as an alternative of Si layer. The effects of Ti/SiOx thickness ratio, bilayer thickness and total thickness of Ti-SiOx multilayer films upon their reaction behavior were investigated.

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Stainless steel films were deposited onto glass slide at RT by rf magnetron sputtering using a commercial SUS304 steel target. The effects of sputtering conditions on their compositions, crystallographic structures and mechanical properties were studied. The composition of as-deposited films was the same as that of the target material. We have succeeded to fabricate films having much higher hardness and fracture stress than bulk material by this method. The mechanical properties of the films showed a strong relationship with their internal stresses and depended on the Ar gas pressure during sputtering.

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