Proceedings of JSPE Semestrial Meeting

Browse

Search
Browse

All issues

2016 JSPE Autumn Conference

Displaying 101-150 of 380 articles from this issue

Download citation

Show all abstracts

Improvement of Si-wafer edge flatness, focus on silica particle character included in polishing slurry

Tomoyuki Toda, Tomoki Yamasaki, Yasunari Miyamoto, Yohei Murakami

Session ID: D61
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_201

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (694K)
Nano particle sizing based on Brownian motion analysis by using fluorescence polarization method (2nd report)

Analysis of translational diffusion coefficient based on a photon correlation method

Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa, Yoji Matsukawa

Session ID: D62
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_203

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (417K)
Conditions for Longer Service Life of Micro Porous Membrane Filter in CMP Slurry Filtration

Masato Sumiya, Mitsutoshi Nakagawa

Session ID: D63
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_205

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

Micro porous membrane filters have been applied to CMP slurry filtration for reducing micro scratches. But short service life by fouling is major issues. This study investigated relationship of large particle count (LPC), abrasive particle concentration with filter service life and found that optimum pre-filtration had significant effect on longer service life by reducing LPC and that combination of lower LPC and lower abrasive particle concentration had further significant effect.

View full abstract

Download PDF (536K)
Evaluation of slurry flow behavior in chemical mechanical polishing of hard to process material

Relationship between slurry flow behavior in slurry film thickness and surface texture of polishing pad

Yuichi Tomiie, Michio Uneda, Kazutoshi Hotta, Kazusei Tamai, Hitoshi M ...

Session ID: D64
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_207

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

This study investigates the slurry flow behavior in the contact surface between the substrate and the polishing pad in chemical mechanical polishing (CMP) of hard-to-process materials. In the evaluation of slurry flow behavior, the digital image correlation method was used. In this paper, we tried to estimate the slurry flow behavior in the slurry film thickness direction by using the phenomenon that the light transition ratio is affected by the slurry film thickness. Furthermore, we discussed the reliability of estimated slurry film thickness compared with the polishing pad surface texture. As a result, we can estimate the slurry flow velocity at the neighborhood of the substrate surface during the CMP, and the removal rate increase with the increase of the slurry flow velocity ratio.

View full abstract

Download PDF (489K)
[title in Japanese]

Hajime Okumura

Session ID: D66
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_209

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (738K)
[title in Japanese]

Yuta Nakahira, Ai Isohashi, Van Pho Bui, Tatsuaki Inada, Daisetsu Toh, ...

Session ID: D68
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_211

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (735K)
[title in Japanese]

Hitoshi Hosokawa, Shinnosuke Kobune, Yohei Yamada, Junichi Ikeno

Session ID: D69
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_213

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (736K)
Analysis of dynamic material properties based on asperity model of polishing pad surfaces

Shingo Oshika, Norikazu Suzuki, Yohei Hashimoto, Eiji Shamoto

Session ID: D73
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_215

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (738K)
Production Prototyping of Polishing Pad Surface Asperity Pasted Upper Platen for Double Sided Polisher and Its Fundamental Examination

Kosuke Hayakawa, Michio Uneda, Kazutaka Shibuya, Yoshio Nakamura, Daiz ...

Session ID: D74
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_217

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

The removal rate in CMP is affected by the polishing pad surface asperity. The relationship between the surface asperity and the removal rate is only discussed in the single-sided polisher. Moreover, it is well known that the contact image analysis device which uses the image rotation prism is effective for evaluating the surface asperity. However, the conventional device cannot evaluate the upper platen of the double-sided polisher (DSP). On the other hand, the DSP is frequently used for fabricating the high planarized substrate. This study demonstrates the characteristics of newly produced prototype device for measuring polishing pad surface asperity pasted upper platen of the DSP. This prototype device has a mechanism which can apply the measuring load to the image rotation prism by the spring load. In this paper, we tried the effectiveness evaluation on newly device from the viewpoint of the comparing the conventional device. As a result, it is founded that newly device has enough performance for measuring the surface asperity pasted the upper platen in the DSP.

View full abstract

Download PDF (672K)
A novel in-situ observation of local polishing efficiency by utilizing heat measurement

Hirotaka Misono, Norikazu Suzuki, Shingo Oshika, Eiji Shamoto

Session ID: D75
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_219

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (750K)
Study on low power laser processing with instant surface excitation by using femtosecond double pulse beam

Terutake Hayashi, Keigo Matsunaga, Syuhei Kurokawa, Hideaki Yokoo, You ...

Session ID: D77
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_221

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (707K)
[title in Japanese]

Takuya Hommyo, Yoshihiro Kaneko, Yohei Yamada, Junichi Ikeno

Session ID: D78
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_223

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (693K)
Development of dry planarization method using a transport of active species

processing of the silicon carbide substrate

Toshinobu Miyazaki, Reiji Ryokume, Yasuhisa Sano, Satoshi Matsuyama, K ...

Session ID: D79
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_225

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

There is generally a need for high efficiency flattening processing method of a next generation of semiconductor substrate such as SiC, GaN and diamond in order to commercialize these materials. Plasma Chemical Vaporization Machining (PCVM) method at atmospheric pressure is well known as the high efficiency processing, but this processing method does not have the effect of flattening. In such circumstances, we devised new flattening processing method by adsorbing F radicals to a flat plate of a reference plane and transporting F radicals to the surface of sample. In this report, we report on the processing results of SiC substrates by the new flattening processing method.

View full abstract

Download PDF (501K)
Effects of the substrate bias voltage on hydrogenated ECR-sputtered carbon film deposition

Hydrogenated carbon film and the substrate bias of the quality of the relationship

Koji Akashi, Shun Wakai, Shinsuke Matsui, Shigeru Umemura

Session ID: E01
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_227

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (727K)
Development of Nanofabrication Technique with Catalytically Active Platinum-Coated AFM Probe (3rd Report)

Effects of Applied Potential on Localized Material Removal Rate

Kota Yamamoto, Yurino Furukawa, Junji Sasano, Moeto Nagai, Takayuki Sh ...

Session ID: E02
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_229

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (737K)
[title in Japanese]

Tatsuya Tokuyama, Hiroki Teshima, Hiroshi Kawakami, Yoshihiro Sato

Session ID: E03
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_231

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (655K)
[title in Japanese]

Takeshi Nakano, Minoru Ota, Kai Egashira, Keishi Yamaguchi, Kouki Maed ...

Session ID: E04
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_233

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (672K)
Development of Laser/Imprint complex machining technology for fine shape forming on glass surface

Tsuneo Kurita, Syunya Hongo, Kazuyuki Mizuhara, Kiwamu Ashida

Session ID: E06
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_235

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (833K)
[title in Japanese]

Kosuke Kawahara, Hiroshi Sawada

Session ID: E07
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_237

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (691K)
[title in Japanese]

Yuuta Konno, Makoto Yamaguchi, Noritaka Kawasegi, Tomomi Koudu, Noboru ...

Session ID: E08
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_239

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (501K)
The control of SiC crystal surface swelling around several nanometer on Ar ion-beam

Noriyuki Sato, Sadao Momota, Daisuke Tominaga, Koutaro Mokuo, Takuya S ...

Session ID: E09
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_241

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

SiC crystal was irradiated by Ar beam at 90 and 700 kV with the fluence range from 1×10 to the power of 15 up to 2×10 to the power of 17 [ion/cm2] and the induced swelling height was measured. Irradiation effect and the range distribution were calculated by TRIM to evaluate the optimization of the experimental condition. As a result of experiment, a swelling structure was successfully processed on the SiC crystal surface. The swelling height could be controlled from 1nm up to 100nm with a precision of about 5nm.

View full abstract

Download PDF (295K)
Study of Nano-stereolithography Using Evanescent Light (25th report)

Development of apparatus for micro structured surface fabrication to evaluate function

Yuki Suzuki, Yuki Matsumoto, Masaki Michihata, Kiyoshi Takamasu, Sator ...

Session ID: E13
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_243

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (826K)
[title in Japanese]

Akihiro Mori, Ryuu Sannomiya, Hayato Kobayashi, Masayuki Hasegawa, Kaz ...

Session ID: E14
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_245

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (463K)
[title in Japanese]

Ryuta Suzuki, Souta Matsusaka, Hirofumi Hidai, Akira Chiba, Noboru Mor ...

Session ID: E15
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_247

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (754K)
Influence of Na₂SO₄ Electrolyzed Oxidizing Water on Polishing Surface of Permalloy 45

Unkai Sato, Hideki Kawakubo

Session ID: E16
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_249

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (786K)
[title in Japanese]

Naoyuki Sato, Jun Taniguchi

Session ID: E31
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_251

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (655K)
[title in Japanese]

Noa Kobayashi, Toshiyuki Horiuchi

Session ID: E32
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_253

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (569K)
[title in Japanese]

Yuta Takano, Jun Taniguchi

Session ID: E33
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_255

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (409K)
Fabrication of Multi-Slits on Stainless-Steel Pipes with a Diameter of 100 μm Using Electrolytic Etching

Hiroshi Takahashi, Tomoya Sagara, Toshiyuki Horiuchi

Session ID: E34
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_257

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (620K)
A Miniature Fuel Cell with Monolithically Fabricated Si Based Electrodes

Development of Au-Pd-Pt catalyst

Ryo Shirai, Masanori Hayase

Session ID: E36
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_259

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (729K)
[title in Japanese]

Hisahiro Wadayama, Jun Taniguchi

Session ID: E37
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_261

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (630K)
[title in Japanese]

Hiroki Takemoto, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi

Session ID: E38
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_263

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (653K)
[title in Japanese]

Hikari Eto, Shin Hiwasa, Jun Taniguchi

Session ID: E39
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_265

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (635K)
[title in Japanese]

Shuhei Yasuda, Satoshi Matsuyama, Hiromi Okada, Yasuhisa Sano, Yoshiki ...

Session ID: E61
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_267

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (1025K)
[title in Japanese]

Jumpei Yamada, Satoshi Matsuyama, Kazuto Yamauchi

Session ID: E62
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_269

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (1004K)
Development of Split-and-Delay Optics for Hard X-ray Free-electron Lasers

Spatio-temporal overlapping of split X-ray pulses at SACLA

Takashi Hirano, Taito Osaka, Yasuhisa Sano, Yuichiro Inubushi, Satoshi ...

Session ID: E63
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_271

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (1006K)
Development of soft X-ray Laminar-type varied-line-spacing gratings using Two-Beam interference

Design of exposure system

Hiroto Ogimoto, Hidekazu Mimura

Session ID: E64
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_273

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (740K)
[title in Japanese]

Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi

Session ID: E66
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_275

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (644K)
[title in Japanese]

Yuki Kobayashi, Yuiki Goto, Katsuyoshi Endo, Dai Yamazaki, Ryuji Yamaz ...

Session ID: E67
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_277

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (601K)
[title in Japanese]

Yuiki Goto, Yuki Kobayashi, Katsuyoshi Endo, Dai Yamazaki, Ryuji Maruy ...

Session ID: E68
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_279

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (563K)
[title in Japanese]

Shogo Sakaiya, Daisuke Funato, Katsuyoshi Endo, Kazuya Yamamura

Session ID: E69
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_281

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (503K)
[title in Japanese]

Yoshinori Takei, Yuusuke Matsuzawa, Hidekazu Mimura

Session ID: E73
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_283

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (784K)
[title in Japanese]

Gota Yamaguchi, Takehiro Kume, Hidekazu Mimura

Session ID: E74
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_285

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (726K)
Development of high-efficiency and high-quality dry-polishing method of diamond

Proposal of the method using a nitrogen

Akihisa Kubota, Hiroyuki Yokoi, Mutsumi Touge

Session ID: E75
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_287

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (495K)
Development of high-efficiency and high-quality dry-polishing method of diamond

Proposal of the method using an ozone

Akihisa Kubota, Hiroyuki Yokoi, Mutsumi Touge

Session ID: E76
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_289

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (534K)
[title in Japanese]

Takahiro Higashi, Hidekazu Mimura

Session ID: E77
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_291

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (597K)
[title in Japanese]

Shinsuke Matsui

Session ID: F02
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_293

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (683K)
[title in Japanese]

Kazuhiro Araki, Sunao Murakami, Takahiro Ito

Session ID: F04
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_295

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

[in Japanese]

View full abstract

Download PDF (398K)
Experimental evaluation of wet-coil based pick and place method

Hitoshi Funatsu, Ohmi Fuchiwaki, Noriyuki Mori, Kenichiro Imai, Yoshim ...

Session ID: F05
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_297

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

We report that experimental evaluation of wet-coil based pick and place method for 100 micro meter sized silicon cuboid. In experiments, we get 70% success rate for picking up and 100% placing down to commercially available double-stick tape. We also discuss about future works.

View full abstract

Download PDF (692K)
Design and Development of Polymer-made 3DOF Spherical Parallel Manipulator

Mikio Horie, Issei Unezawa

Session ID: F07
Published: August 20, 2016
Released on J-STAGE: February 20, 2017

DOIhttps://doi.org/10.11522/pscjspe.2016A.0_299

CONFERENCE PROCEEDINGS FREE ACCESS

Show abstractHide abstract

In this research, in order to realize the functions equivalent to the functions of the spherical bearing which is frequently used in conventional spatial mechanisms, a polymeric manufactured hinge with Hytrel®(DU PONT-TORAY), which has excellent flexural fatigue resistance, have been proposed. Next, the shape and dimensions of the polymeric manufactured hinge having low stress values at bending deformation have been found by FEM analysis results. In addition, a polymer-made three-degrees-of-freedom(3DOF) spatial parallel manipulator which consists of this polymer-made hinge is designed and developed, and the output displacement characteristics of the manipulator are revealed.

View full abstract

Download PDF (806K)

feedback

Top

Register with J-STAGE for free!