There are various bacteria and viruses in our living environment, and they sometimes cause serious infectious diseases. Currently, the threat is expanding due to the changes in the environment and the demand for antimicrobial products is increasing year by year. Surface composition and shape are important factors of antiviral properties. Thus, we propose the mechanical coating with antibacterial and antiviral surface. Diamond-Like Carbon (DLC) film consists of a mixture of sp2 covalent bonded and sp3 covalent bonded carbon atoms and hydrogen atoms. DLC films have characteristics such as high hardness, low friction coefficient, abrasion resistance and so on. Furthermore, these properties of DLC film are changed by doping other elements. On the other hand, it is widely known that copper is one of the antimicrobial properties. Therefore, in this study, we synthesized segment structured DLC films adapted copper which are deposited by plasma chemical vapor deposition (plasma CVD) and magnetron sputtering, and we analyzed mechanical, antibacterial properties of the films. Cu/DLC multilayered films demonstrated antibacterial properties upon wear, providing a viable approach to confer antibacterial properties on DLC films through mechanical coating by combining copper and textured structures. The worn Cu/DLC multilayered films also exhibited effectiveness against A-type influenza virus.

Preventing the re-deposition of nano-particles on the substrate surface is essential in wafer cleaning. Although 3D measurement of the behavior of nano-particles that have been detached and moved by shear flow generated in the extreme vicinity of the surface (moving position) has been performed, it is necessary to use this method in combination with the dark-field observation method, which was limited to observation of suspended particles in very close proximity with surface-localized light. In this paper, we report on our attempt to utilize defocusing using cylindrical lenses to obtain sufficient longitudinal resolution for shallow and deep position measurement of moving particles.

A low-cost, low-environmental impact, slurry-less atomic-level planarization process using only PMMA resin and water has been developed. The machining traces were obtained only under conditions machined with a PMMA tool in water, suggesting that the machining mechanism is based on chemical reactions. In this study, the PMMA tool and the processed silicon surface were analyzed using infrared spectroscopy and X-ray photoelectron spectroscopy, and it was shown that the C-O bonds on the PMMA surface are hydrolyzed during processing, and Si atoms are removed by the formation of C-O-Si bonds with Si atoms.

In micro manufacturing machine systems, not only the machine tool but also the workpiece is small, and the phenomena at the machining point are microscopic, making it extremely difficult to identify the machining state. In this study, acoustic emission (AE) sensing, which measures the elastic stress waves generated during material deformation and fracture, is used to monitor the machining state of a small grinding machine. This report describes the results of a comparison of the sensitivity of contact detection, the effect of dressing the grinding wheel, and the evaluation of machining quality based on machining experiments of single-crystal diamonds.

Dual acoustic emission (AE) sensing is proposed to simultaneously monitor the machining state of an micro machine tool and the machine tool itself: AE is an elastic stress wave generated by material deformation and fracture, and is measured not only at the machining point but also from the bearings, etc. The AE signals can be analysed, extracted and feedbacked to maintain optimum machining conditions. In this report, the measuring concept and application example to a micro lathe are described.

Advancements in three-dimensional microdevices have led to the development of intricate microfabrication techniques, aiming to overcome the limitations of conventional methods like photolithography and focused ion beams. While these methods are effective, they entail complexities or demand expensive setups, spurring the quest for simpler, cost-effective alternatives. In the realm of metal additive manufacturing, we have demonstrated a promising technique called laser-assisted electrophoretic deposition (LAEPD), which combines laser trapping and electrophoresis. This innovative method enables precise nanoparticle deposition onto conductive substrates, facilitating the creation of sub-micrometer structures such as pillars. However, its commercial scalability faces a significant hurdle—reproducibility. In this research, to address this challenge, we developed a feedback-controlled approach to LAEPD. Through a programming language (viz. C++ with OpenCV image processing), we regulate deposition velocity during redeposition, crucial for enhancing reproducibility. By utilizing CCD cameras to capture laser spot references, we've successfully refined the process, ensuring consistent and reliable fabrication of microstructures. This breakthrough holds substantial promise, surmounting previous barriers to reproducibility within LAEPD. Our innovative feedback-controlled system not only improves the manufacturing success rate but also sets the stage for practical, commercially viable three-dimensional microfabrication technologies, fostering a pathway toward scaled production of intricate microdevices.

The surface of graphite (HOPG) has two-dimensional symmetry and a lattice spacing of 246 pm can be observed using a scanning tunneling microscope (STM). In this study, we combine dither circle modulation motion and raster scanning on the STM probe to obtain atomic images of the HOPG. Then, the atomic images are separated into crystal arrays from any six data points on the dither circle, and crystal arrays are also separated from the other six points. This is done many times, and the crystal arrays are added and averaged to see if the signal-to-noise ratio improves.

The surface with the moth-eye structure applied the release agent has more water-repellency than the a smooth surface due to the structure. Here, the surface structure can be replicated by using nanoimprint lithography. In addition, by roll pressing on the microscale pillar structure, adhesion can be partially imparted without compromising the water-repellent property. Both techniques also produce structures with high throughput.