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Katsuya Muyoh, Sayaka Hatano, Jiro Abe
2010 年 23 巻 3 号 p.
301-306
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
We describe an efficient strategy for designing high-performance fast-photochromic molecules with increased photosensitivity to solar UVA radiation. The photosensitivity of [2.2]paracyclophane-bridged imidazole dimers can be readily enhanced through appropriate design of the phenyl rings attached to the imidazole rings. The diversity of the molecular design and the ease of synthesis make this class of photochromic molecules highly attractive for high-performance ophthalmic plastic lenses.
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Takeshi Yasuda, Tsutomu Ishi-i, Liyuan Han
2010 年 23 巻 3 号 p.
307-312
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
We studied three different benzothiadiazole-triphenylamine (BTD-TPA) derivatives as donor materials for bulk-heterojunction organic photovoltaics (OPVs), and investigated the resulting OPV performance. We found that the increased concentration of (6,6)-phenyl C61 butyric acid methyl ester (PCBM) as acceptor material and the decreased thickness of active layers led to high-performance OPVs with sufficient percolated pathways for the photogenerated mobile carriers to the respective electrodes. The highest performance was observed for OPVs based on BTD-Th-TPA:PCBM (1:2, w/w) with thickness of 76 nm, yielding a power-conversion efficiency of 1.0% under 100 mW/cm
2 of AM 1.5 illumination and incident photon conversion efficiency of 32% at a wavelength of 540 nm.
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Ryo Morioka, Kei Yasui, Masaki Ozawa, Keisuke Odoi, Hisashi Ichikawa, ...
2010 年 23 巻 3 号 p.
313-316
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
For a promising approach to improve the energy conversion performance of organic thin layer solar cells, a buffer layer between a hole collecting electrode (anode) and organic active layer containing electron accepting and donating materials mixture is investigated. A conductive polymer, PEDOT:PSS, is generally used as the buffer layer to realize the best performance. However, it often causes degradation in long term stability due to its highly acidic and absorbent nature. In the present study, we investigate properties of a new class of buffer materials substituting PEDOT:PSS, a composite of gold nanoparticles and hyper-branched polystyrene.
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Tatsuo Mori, Keisuke Fujita, Makoto Kimura
2010 年 23 巻 3 号 p.
317-322
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Dibenzo[g,p]chrysene (DBC), which belongs to a cyclic aromatic hydrocarbon similar to pentacene, is drawn attention to. DBC is soluble and dissolves in THF, etc. We estimate the crystal structure of DBC by XRD and the morphology of evaporated and spin-coated DBC thin film by atomic force microscope. DBC is used as the active layer of organic thin-film transistor (TFT). The TFT characteristics cannot be obtained in a top contact-type TFT structure, but those can be done in a bottom contact-type TFT structure using SiO
2/Si substrate. Unfortunately, the TFT mobility is 10
-5 cm
2/Vs-order and poorer than that of pentacene TFT because of broken carrier paths between DBC grains and many discrete valleys.
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Yoshihiko Kunugi, Tatuya Arai, Masanori Tsutsui, Hidetoshi Maeda, Kazu ...
2010 年 23 巻 3 号 p.
323-326
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
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Hideo Nakako, Yasushi Kumashiro, Kazunori Yamamoto
2010 年 23 巻 3 号 p.
327-332
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
The printing process requires the gate insulating material to have the solution processability of solution before curing, and the chemical resistance, high resistivity, high breakdown voltage, and organic field effect transistor (O-FET) properties after curing. The epoxy resin using the esterified bisphenol F as hardener satisfied these conditions except high threshold voltage (V
th) of O-FET. In this paper, the V
th was found to be brought not from the inside of the gate insulator but from the interface between the gate insulator and the semiconductor. Eight types of epoxy resins consisting of bisphenol F esterified were prepared with different pendant groups on the ester groups. By the SFG spectrum, the pendant groups on the ester groups existed on the surface. The V
th and δV
th (hysteresis of O-FET) correlated with the γ
p/γ
total, which is the index of the polarity effect on the surface free energy. This meant that the pendant groups on the ester groups existed on the surface and affected V
th and δV
th. The epoxy resin with bisphenol F esterified with dimethyl pendant groups showed the O-FET properties with small V
th and δV
th (-1.1 V and 0.2 V, respectively) keeping the superior characteristics of epoxy resin such as solubility, chemical resistance, high breakdown voltage (7.6 MV/cm), and high resistivity (2.7 x 10
14 Ωcm).
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Toshiro Oyama, Yong-Jin Pu, Hishahiro Sasabe, Ken-ichi Nakayama, Junki ...
2010 年 23 巻 3 号 p.
333-336
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Three type of electron-transporting materials, containing two pyridiylphenyl group linked with alkyl fluorene, binaphthyl, and spirofluorene, were synthesized. Their thermal and optoelectrochemical properties were affected by a type of a central group, and the alkyl fluorene centered derivative showed the highest crystalline property and delocalized π-conjugation. Organic light-emitting devices using these materials as an electron-transporting layer showed lower driving-voltages and high efficiencies, compared with those of the device with Alq
3.
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Yongrong Li, Yong-Kazumi Tsuboi, Tsuyoshi Michinobu, Yoshihito Ishida, ...
2010 年 23 巻 3 号 p.
337-342
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Block copolymers composed of unsubstituted polystyrene and electron-rich alkyne functionalized polystyrene segments were prepared by atom transfer radical polymerization (ATRP) of N,N-didodecyl-4-[(4-vinylphenyl)ethynyl]aniline (2) with bromine-terminated polystyrene (1). Subsequently, the atom-economic addition reaction between electron-rich alkynes and tetracyanoethylene (TCNE) was applied as an efficient post-functionalization method to introduce donor-acceptor chromophores. All polymers were comprehensively characterized by GPC,
1H NMR, IR and UV-Vis spectroscopies, and electrochemistry. The TCNE-adducted polymers showed intense charge-transfer (CT) bands, well-defined redox activities, and good thermal stability. Furthermore, the second harmonic generation (SHG) of the spin-coated polymer thin films on a glass slide was measured before and after electric poling, and the SHG coefficient (d
33) of the poled thin film reached 3.0 pm V
-1.
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Nobuhiro Kawatsuki, Ayumi Yamashita, Mizuho Kondo, Hiroshi Ono, Akira ...
2010 年 23 巻 3 号 p.
343-348
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
New photo-cross-linkable liquid crystalline polymethacrylate with 4-methoxybistolane side groups was synthesized and its thermally enhanced photoinduced molecular reorientation behavior was investigated using a linearly polarized (LP) UV light. Since the bistolane mesogenic side groups were axis-selectively photoreacted under irradiating with LPUV light, annealing procedure generated the thermally enhanced molecular reorientation parallel to the polarization (E) of LP-365 nm light. The axis-selectively photoreacted bistolane moieties acted as the photo-cross-linked anchor to reorient non-photoreacted side groups along them, which direction was parallel to E. The maximum generated in-plane order parameter and birefringence were 0.43 and 0.18, respectively. The influences of degree of the photoreaction and the annealing temperature on the molecular reorientation behavior were investigated in detail. Furthermore, polarization holography using 325 nm He-Cd laser was carried out to fabricate pure polarization gratings with various polarization of the light source.
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Hirokazu Furue, Kentaro Okazoe, Masanori Tamura
2010 年 23 巻 3 号 p.
349-352
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Polymer-stabilized ferroelectric liquid crystals (PSFLCs), in which a photocurable mesogenic monomer is doped into a ferroelectric liquid crystal and a UV photocure is carried out in the SmC
* phase under the application of a monopolar DC electric field, show the monostable half-V-shaped electrooptical characteristics. In this research, we have investigated the dependence of the electrooptical characteristics of PSFLC on the type of monomer such as the number of functional group and the presence of chirality. As a result, it is found that the response time of PSFLC with relatively soft polymer is shorter than that with hard polymer.
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Takaya Murakami, Fumiaki Kato, Kenichi Oyaizu, Hiroaki Nishide
2010 年 23 巻 3 号 p.
353-355
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
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Tomohiro Sago, Hideyuki Itagaki
2010 年 23 巻 3 号 p.
357-362
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
A sort of orientation in amorphous region of atactic polystyrene (aPS) produced by uniaxial stretching was studied in detail by our novel method where angular distributions of polarized fluorescence intensities of guest naphthalene (NP) molecules were measured by the rotation of films around the excitation light beam. The main arrangement of an NP molecule in an aPS film uniaxially stretched keeping NP in it was determined by our method: either the long axis or the short axis of an NP molecule was found to be perpendicular to the stretching direction. On the other hand, the arrangement of NP molecules was quite different in the case of NP molecules that were introduced by exposure of NP vapors at room temperature into an aPS film already stretched. This means that the orientation of free space in aPS films produced by uniaxial stretching is different from that of an NP molecule in aPS that was stretched all together.
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Tetsuya Ono, Akira Kawai
2010 年 23 巻 3 号 p.
363-366
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
It is important to analyze a behavior of micro liquid droplet in order to achieve a high accuracy of LSI fabrication process such as the cleaning process, the lithography process and the etching process, patterning process and so on. By using a high-speed camera, free fall behavior of a droplet is observed. The Laplace force before falling acts to a droplet effectively. By observing the position of droplet head and tail, it is oberved that the micro droplet falls faster than the free fall velocity. By employing a droplet spring vibration system, the fall nature can be clarified.
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Shunsuke Ohata, Akira Kawai
2010 年 23 巻 3 号 p.
367-370
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Drying property of water thin film formed on a pn-junction array substrate is characterized based on dielectric analysis. In wetting processes such as pattern development, wet etching wet cleaning and drying are recognized as important processes in order to fabricate high quality electronic devices. The pn-junction array is designed with a combination of micro pattern networks. By using a FRA (Frequency Response Analyzer) system, the drying process of water thin film can be monitored. A rapid decrease of capacitance value is observed as vanishing the micro meniscus bridge. The application of endpoint detector of drying of water thin layer is discussed.
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Hiroshi Morita, Yu Aoki, Shigeru Takahara, Masanobu Wakasa
2010 年 23 巻 3 号 p.
371-378
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
With the aid of laser ablation using the third harmonic of Nd:YAG laser light, spherical fine particles were produced from poly(dimethylsilane) (PDMS) powder and poly(methylphenylsilane-co-diphenylsilane) (P(MPS-co-DPS)) powder in the atmosphere of allyltrimethylsilane (ATMeSi). The particle size and the product yield of laser-ablated PDMS/ ATMeSi particles increased with increasing vapor pressure of ATMeSi, suggest- ing that ATMeSi reacted with silyl radical end of polysilane chain and during the poly- merization reaction of ATMeSi, it reacted with silyl radical end of another polymer chain to extend the particle size. Laser-ablated PDMS/ATMeSi particles emitted fluorescence at shorter wavelengths than PDMS powder without laser ablation. With increasing vapor pressure of ATMeSi, fluorescence peak shifted to shorter wavelengths, indicating that recombination of polymer silyl radicals was inhibited by the reaction with ATMeSi, and hence the average length of polysilane chains became shorter. Laser-ablated P(MPS-co- DPS)/ATMeSi particles also emitted fluorescence. In addition to a narrow band observed at 368 nm, a broad band was observed at ∼485 nm due to branching of polysilane chain. Chemical processes to form branched polymer chain were discussed briefly.
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A. Watanabe, M. C. Yang, C. W. Cheng, C. Y. Lin, W. C. Shen
2010 年 23 巻 3 号 p.
379-380
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
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Ohshima Akihiro, Hiroyuki Nagai, Toshiyuki Hyuga, Nozomi Miyoshi, Tats ...
2010 年 23 巻 3 号 p.
381-386
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Micro-fabrications of various perfluorinated polymers were carried out by the synchrotron radiation (SR) direct photo etching, and the SR-induced surface modifications were studied by DSC and 19F solid-state NMR spectroscopy. The etching depth measurements of perfluorinated polymers were carried out by optical microscope. Although ETFE could be hardly etched, it was confirmed that the microstructures of PFA and FEP could be fabricated by SR direct photo etching. It was found that the etching rate of FEP at 140 °C was highest and those of PTFE and PFA at 140 °C were lower. It was found that crosslinking reactions were induced by the SR-irradiation at the region within 50 μm from the irradiated surface.
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Hajime Fujita, Fumiya Shiraki, Takeo Yoshikawa, Akihiro Oshima, Masaka ...
2010 年 23 巻 3 号 p.
387-392
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
The revolutionary functionally gradient proton exchange membranes were fabricated by EB irradiation with heterogeneous energy deposition. These heterogeneous energy deposition profiles (Depth-Dose profiles) were simulated by Monte Carlo simulation code EGS5. In the process of EB-grafting method of styrene onto base fluorinated polymer, the energy depositions selected from the Depth-Dose profiles were used. The grafted membranes were sulfonated with chlorosulfonic acid in carbon tetrachloride. The DOGs in the direction of thickness showed that EB Depth-Dose profiles corresponded to the EB grafting reaction. The functionally gradient proton exchange membranes had a water uptake gradient in the direction of depth, and hence could be a promising solution to manage water behavior in Membrane Electrode Assembly (MEA) of Polymer Electrolyte Fuel Cell (PEFC).
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Satoshi Okubo, Tomohiro Takahashi, Tomoko Gowa, Takashi Sasaki, Naotsu ...
2010 年 23 巻 3 号 p.
393-397
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Microfabrication of biodegradable polymers such as poly(butylene succinate-co-adipate) (PBSA) and poly(ε-caprolactone) (PCL) were demonstrated using focused ion beam (FIB) with maskless direct etching. As the result, the micro structures of PBSA and PCL were obtained. The etching depth of both PBSA and PCL were increased with increasing FIB fluence, and the etching rates were estimated to be about 1.3 X 10
-18 μm/(ions cm
-2) and 1.2 X 10
-18 μm/(ions cm
-2), respectively. Moreover, very thin films of PBSA and PCL were made by spin-coating method. The thicknesses of the spin-coated samples were about 200 nm, and the surface roughness was less than 10 nm (RMS). The fine structures such as micro-gear of PBSA and PCL were obtained without solid debris. The line width of the fabricated structure was about 250 nm.
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Gowa Tomoko, Tomohiro Takahashi, Toshitaka Oka, Takashi Murakami, Akih ...
2010 年 23 巻 3 号 p.
399-404
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
6 MeV/u ion beams such as Si
14+, Ar
18+, Kr
36+ and Xe
54+ and 30 kV Ga
+ focused ion beam (FIB) were irradiated to a chemically amplified deep-UV resist TDUR-P722 (Tokyo Ohka Kogyo) and electron beam (EB) resists ZEP520A and ZEP7000 (ZEON). Clear patterns were obtained on all resists for high energy ion beams, and it was confirmed that resist sensitivities were correlated with the energy deposition. In contrast, high flux FIB irradiation induced crosslinking reactions of resist polymers, and positive-negative inversion took place.
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Zhijie Gu, Tatsuya Kanto, Kousuke Tsuchiya, Kenji Ogino
2010 年 23 巻 3 号 p.
405-406
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
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Kohkai Mukai, Hiroaki Seki, Yasunobu Kawajiro, Satoshi Sakamoto, Yuya ...
2010 年 23 巻 3 号 p.
407-412
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
A magnetic micro machine was fabricated by using photopolymerized resin structure as the base, and its motion in viscous liquid was evaluated. The production method of two kinds using a positive-type mold and a negative-type mold was proposed. With ultrasonic vibration after the surface treatment using the ultra-fine particles of silica, electroless copper plating was realized to negative-type resin mold even inside the concave structure of 20 μm in width and 100 μm in depth. The magnetic micro capsule was produced by carrying out ferrite plating to positive-type resin mold, and the magnetic field guidance experiments were conducted in silicone oil. The sample of full length 800 μm swam by the guidance, always turning the head in the advance direction, and it rotated on the same spot.
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Masaki Okada, Kieko Harada, Naohide Takamura, Toshihiko Hiaki, Kiyomi ...
2010 年 23 巻 3 号 p.
413-416
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Photo- and thermal reaction of p-substituted benzene diazo compounds (SBD) with [2.2.2]-cryptand (CRP) was studied by UV spectrum and degradation temperature (D.T.). Diazo cation of p-chloro benzene diazo compound (ClBD) was reacted with lone pair electrons of nitrogen atom of CRP by UV spectrum data. When CRP was added, photo-decomposition rate of SBD with electron withdrawing-substituent (WSBD) and of SBD with electron donating-substituent (DSBD) were accelerated two and ten times larger than that without CRP, respectively. D.T. of WSBD with CRP in solid were lower than that without CRP, but D.T. of DSBD with CRP was similar to that without CRP. Photodecomposition rate of a diphenylamine-4-diazonium sulfate salt/formaldehyde condensate (DSR) / Polyvinyl alcohol (PVA) resist with CRP was 3 times higher than that without CRP. Diazo/PVA resist with CRP will be improved in sensitivity without decreasing thermal stability.
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Yousuke Goto, Kyoya Kitano, Takeshi Maruoka, Masashi Yamamoto, Akihiko ...
2010 年 23 巻 3 号 p.
417-420
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
We evaluated the chemical reactivity of wet ozone and polymers by estimating removal of polymers with various chemical structures using wet ozone. The removal rates of polymers that have the carbon-carbon double bond (C-C double bond) in the main chain (novolak resin, cis-1,4-polyisoprene) were the fastest. The removal rates of polymers that have a C-C double bond in the side chain (PVP, PS) were slower than those of novolak resin and cis-1,4-polyisoprene. Polymers with no C-C double bond (PMMA, PVC) were not removed. We believe that wet ozone should react easily with C-C double bonds. The main chain of novolak resin and that of cis-1,4-polyisoprene should be decomposed by reaction with wet ozone. In PVP and PS, the benzene ring in the side chain changes into carboxylic acid by reaction with wet ozone. Therefore, the dissolution ability of PVP and PS to water should increase.
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Atsushi Sekiguchi
2010 年 23 巻 3 号 p.
421-426
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
The quartz crystal microbalance (QCM) has recently emerged as useful tools for studying thin films in many fields. QCMs have been continuously improved since their initial research use application as a vacuum deposition monitor and are now used to monitor diverse conditions under vacuum. Applications have rapidly expanded in various tools used to monitor air and liquids. The authors have pursued research on development monitors based on light interference generated by thin films. Resins that dissolve unevenly during development or materials that swell during development do not produce clear interference patterns with conventional evaluation methods based on thin film interference, and obtaining accurate dissolution rates has proven difficult. In response, we developed a QCM-based development analyzer (RDA-QZ3) capable of directly monitoring changes in film mass as changes in frequency. This paper discusses the development behavior of an acrylic chemically-amplified ArF positive resist measured with the new analyzer.
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Atsushi Sekiguchi, Yuko Matsumoto, Kenji Okubo
2010 年 23 巻 3 号 p.
427-433
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
The resist components that leach out during ArF immersion exposure can contaminate the scanner lens. For this reason, a method for identifying the amount of leaching that might occur would be of high interest. A project team consisting of members from IMEC and IBM has developed the WEXA-2, an analytical system that accurately determines the amount leached of resist components. We obtained a WEXA-2 system and measured the amount leached from an ArF immersion resist. This report discusses the measurement method used. Both PAG-derived cations and anions can leach from ArF immersion resists during immersion exposures; of the two, anions constitute the primary cause of lens contamination. We immersed an unexposed resist in immersion liquid and assessed the immersion liquid collected to determine the amount of anions, applying the LC/MS/MS method. Based on these measurements, we derived leaching rates.
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Masayoshi Yamada, Akira Kawai
2010 年 23 巻 3 号 p.
435-438
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
An improvement of resist pattern adhesion has been recognized as one important problem that needs to be solved in micro device fabrication. Dry film resist (DFR) patterns in circle shape are fabricated on glass substrates for the adhesion test. By applying ultrasonic vibration on a edge of DFR pattern in deionized(DI) water, the time until peeling occurred is measured. The DFR pattern can be peeled from a glass substrate under the ultrasonic vibration at 25kHz. The water intrusion model into the DFR/glass interface is employed in order to discuss the adhesion behavior.
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Kanji Suyama, Shunya Ogata, Tomohiro Inoue, Masamitsu Shirai
2010 年 23 巻 3 号 p.
439-446
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Mono- (1), di- (2), and trifunctional (3) O-acyloximes were prepared as novel photobase generators (PBGs) from mono-, di-, and trioximes based on 1,3,5-triacetylbenzene, respectively, and these PBGs and acetophenone O-phenylacetyloxime (4) were compared from the viewpoint of physical, photochemical properties, and crosslinking ability of poly(glycidyl methacrylate)(PGMA). Thermal decomposition temperatures of the PBGs were higher than 200 °C showing good thermal stability. Absorption maxima of PBGs shifted to shorter wavelength as an increase in the number of acetyl groups. Product analysis suggested the photo-degradation of 3 into 1,3,5-triacetylbenzene via 2 and 1. Quantum yields of photolysis of PBGs at 254 nm in acetonitrile were estimated to be around 0.3. The lower quantum yield of 1 suggested the inactive effect of electron withdrawing substituents on the reactivity of excited acyloxime moiety. The yields of benzylamine in polymethacrylonitrile (PMAN) films were analyzed by HPLC after derivatization, and multifunctional PBGs tended to give higher yields than monofunctional ones. However, the yield of benzylamine based on acyloxime unit was in the order 1 > 2 > 3 ∼ 4. PGMA films containing PBGs became insoluble on irradiation after heating due to the addition reaction of the generated amine and epoxy groups in PGMA. The degree of the insolubilization corresponded to the yields of photo-generated benzylamine in PMAN films, showing the apparent advantage of multifunctionality.
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Yukiko Muramatsu, Makoto Kaji, Akihiro Unno, Osamu Hirai
2010 年 23 巻 3 号 p.
447-450
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Terminal group analyses of photochemically initiated polymers were conducted using a matrix-assisted laser desorption / ionization time of flight mass spectrometry (MALDI-TOFMS) in combination with a preparative SEC, a real time FTIR and a gray scale photospeed method. The analysis enabled the assignment of the terminal groups of resulting oligomers from an acrylate monomer and oximate type photoinitiator. Identified built-in terminal groups revealed solvent chain-transfer and difference in photoinitiation due to the chemical structure of oximate.
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Toshiyuki Horiuchi, Takuya Fujii, Ken Nakamura, Hiroshi Hirano, Koichi ...
2010 年 23 巻 3 号 p.
451-456
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー
Sensitivity of the novolac positive resist THMR iP-3300 to violet and blue light emitting diodes with central wavelengths of 404-470 nm was investigated to utilize for developing a new numbering exposure system using a matrix array of such light emitting diodes. In addition, the spectral transmittance of the resist was measured, and the relationship between transmittance and sensitivity was discussed. It was clarified that the sensitivity greatly differed between exposures to violet and blue light rays as much as more than 30 times, and the resist was sensitized only by 3 s exposure to the violet light at minimum. Therefore, reasonable exposure time performance will be obtained if the relevant reduction projection lens is applied.
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Ken'ichi Aoki, Akiko Hiraoka, Kunihiro Ichimura
2010 年 23 巻 3 号 p.
457-458
発行日: 2010/06/22
公開日: 2010/08/20
ジャーナル
フリー