Manual finishing is an important die manufacturing process, which decides surface roughness and form accuracy of a die. However, manual polishing consumes several days to finish the die surface. Therefore, high precision die milling or grinding is required that improve surface roughness, in order to minimize manual polishing time and to save labor. In the previous report, ultrasonically assisted grinding experiments were carried out and 3D shape mirror surfaces were obtained. And cutting edge truncation is necessary to perform mirror surface grinding, before grinding operation. In this study, we investigated relationship between truncation height, grinding force and ground surface roughness to estimate optimum truncation height for mirror surface finishing.

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The improvement of the Equipment and Process recipe has been the driving force to realize precise CMP process. With the recent shrinkage of the devices, the CMP system technology has been rapidly adapted to advanced fabs to watch the behaviors of equipment and Process phenomenon. This system technology is introduced to reduce the fluctuation and excursion of the process by APC (Advanced Process Control) and FDC (Fault detection and Control). The effect of this technology can be shown through the examples of the implementation cases. Now it becomes essential and fundamental technology for advanced CMP Mass production process. On the other hand, these methodology and technique are still on its leaning curve and has plenty of space for development. In this discussion, the technology trend is reviewed first and the importance and position of CMP system technology is clarified, so that the technological opportunity will be extracted to implement these items to advanced fab.

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Organic El films, currently manufactured by a vacuum machine, are facing a serious problem to meet ever-growing film size and continuing low cost competition.To solve this problem, we propose the next generation of the ultra precision deposition technology to form organic El films without using vacuum equipment. This is a fused technology combining the spraying method to deposit EL films and CMP method that subsequently planarize the deposited films.

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A method to estimate Cu removal rate in Electro-Chemical Mechanical Polishing (ECMP) is proposed based on the dissolved type removal mechanism. By comparing calculated results with experimental ones, the method is proved to be effective to estimate the dependence of removal rate on aperture ratio of polishing pad, while discrepancy is found between calculated and experimental results of the dependence of removal rate on the pad aperture diameter due to disregarding the electrolyte-filling ratio effect in the calculation.

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Development of 22 nm node devices has started. Difficult challenges of interconnects are Cu deposition on thin (2.4 nm) and conformal liners and removal of Cu and several liners without galvanic corrosion and within 6 nm planarity for ELK dielectric (k effective is 2.2). First of all, in this paper, success result of the Cu deposition direct on Ru liner without the terminal effect is reported by using dummy effect plating tool. Secondly, the planar plating with same tool is reported which shows the planar Cu plating with a special pad. In case of conventional plating, the deposition profile has a big step height depending on device pattern. This new method had no device pattern dependency. A special porous pad is mounted on the wafer. Then, the several removal methods are also introduced herein such as CMP (Chemical Mechanical Polisher), ECMP (Electrical Chemical Mechanical Polisher), ECP (Electrical Chemical Polisher), CE (Chemical Etching) and those combination technologies in accordance with the general principle of several planarization technologies. In order to clear the severe requirement on planarization in 22 nm node devices, not only CMP but also help from deposition technologies may be needed. The example of good approach from deposition to removal is reported herein.

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In this study, we aim to present parameters that can be used to evaluate pad surface conditions. Therefore, we discuss based on distribution analysis method of surface roughness profiles and contact image method using image rotation prism. Our previously report showed the results obtained by laboratory apparatus as fundamental experiment. This paper shows the results of application characteristics of presented evaluation parameters to commercially available apparatus. As the results, (1) the deviation value based on the roughness profiles, and (2-1) the contact ratio, (2-2) number of contact points and (2-3) spatial FFT results of a contact image were found to be effective for evaluating pad surface conditions.

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This paper presents the 3-D.O.F. planar parallel serial hybrid mechanism V-I which is developed for the multi-tasking grinding machine. The V-I has the parallel mechanism part with 2 D.O.F. of X-axis and C-axis. The whole of parallel mechanism part is driven along z-axis. In the parallel mechanism part, the singularities are removed by using three actuators. The over-constraints are also avoided by the passive joint on the spindle.

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This study deals with new planning method of tool posture for continuous 5-axis control machining with ball endmill. In the previous studies, we developed the new representation method for tool posture planning, called as M-Map (Machine/Mercator Map), in order to put a limitation of acceleration on each axis and avoid collision between cutting tool and workpiece surface. In this paper, we proposed a new planning method for continuous change of two rotation axes through vast amount of cutter location. The proposed method is based on M-Map representation and drawing function of GPU (Graphics hardware). The proposed method is consists of two new ideas. One is spatial temporal representation method designed to detect collision. It is called as CAVE (Configuration Arrays for Visual Estimation). The other is D-Spatial method (Distorted Spatial Temporal Distribution method). In the proposed algorithm, the collision is estimated by referring color on rendered image by using 3D CG technology as known as parallel projection, texture mapping and alpha channel. The developed prototype system can detect collision for each candidate of tool posture change within several milliseconds.

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In recent years, 5-axis control machining has attracted a wide attention because of having many advantages compared with 3-axis control machining. However, there have been few roughing procedures corresponding to 5-axis control machining. This study especially deals with roughing by 3+2-axis control machining, which performs 3 translational axes machining after determining a suitable tool axis vector by 2 rotational axes movement. For 3+2-axis control machining, the determination of tool axis vectors, tool lengths and tool diameters largely affects the rough machining time. The previous study proposed a method of determining the optimal tool axis vectors and selecting the tool diameters for efficient roughing. In order to improve the method more effectively, this study propose a new method of searching optimal combinations by taking account of shorter overhang.

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Due to the high demand of reliability, safety, lightening, and high performance in airplane parts, the ratio of the structure materials used for the aircraft has changed from aluminum to composite materials. As the composite material and titanium alloy ratios rises, the demand for durable material that is difficult to cut increases as well. This lecture will explain the processing technology of the durable material with several examples.

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In this development, NC machine tool directly reads 3D model data and recognizes model shape together with selecting the ideal machining condition from database. Then data will go under motional analysis and output the ideal machining path for each machine. This system does not require NC code because motor drive command will be directly output to motion controller. Compare with conventional NC cutting method, this system achieves to dramatically increase cutting speed and machining accuracy. The advantages have already be seen on minute shape cuttings.

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The shape of the surface texture by the machining varies depending on the diameter of ball end mill. Then, the tool diameter is calculated from the curvature that is calculated from the shape data of the texture. However, the curvature of the texture surface is different by the point. Therefore, I propose a method that divides into an area where processing is possible and an impossible area and change a tool diameter step by step. This method is available when I process the convex shape center on the top in the tool path of the spiral.

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Recently as high feed rate is adopted for machining under high duty ratio, the thermal expansion of ball screw and the thermal deformation of structure are induced by the generation of heat. For improvement of the thermal deformation of machine tool feed drive, both cooling and pre-load of the ball screw are used. However, cooling effect of ball screw is not provided enough under high duty ratio. The compensation of the thermal deformation is effective. But there is a little example applied to ball screw added pre-load to because behavior of the thermal deformation is complex. In this paper, the thermal deformation is measured at neutral structural point at which thermal expansion of ball screw hardly affects position accuracy. By dividing the thermal deformation of structure from the thermal expansion of ball screw, influences are considered independently. Based on the experimental results, the compensation of the thermal deformation of machine tool feed drive are proposed.

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Recently, machine tool spindles are required not only high speeds but also high rotational accuracies. Factors affecting spindle performance include the amount of the lubricants in the bearing and unstable lubricant application. This research aims to develop the technology that stabilizes the amount of the lubricants that contributes to lubrication in the ball bearing, and to apply this technology to machine tool spindles. This report presents a new concept in lubrication methods, where the lubricant of raceway track that contributes to lubrication in the bearing is stabilized directly.

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We present a medial voxel extraction method from large volumetric models. Based on the prior report, we optimize the method as follows. First, we combined pseudo-geodesic-based evaluation and correct-geodesic-based method. Second, we optimize bounding boxes to compute correct geodesic distance as tight as possible. As a result, we can compute medial voxels from large scanned engineering objects in practical time.

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This report presents a method for gap analysis of assembly models.Our method computes medial surfaces from anisotropic distance fields based on Riemannian Metric.Thickness of the models is defined by the distance to the medial surfaces.Since the medial surfaces are affected to global features of gaps, we can compute desired thickness from gaps with non-uniform thickness.

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A cyber field is a virtual system which represents a real system. The cyber field should manage dynamic states of object models. Therefore, in the cyber field, dynamic states of three-dimensional object models should be represented as a temporal-spatial model. In previous report, a four dimensional geometric modeling method which can manage dynamic states of a three-dimensional object model as a four-dimensional mesh model had be proposed. In this report, generation method of a time-series of voxel models from 3D applications using OpenGL is proposed. Plug-in tool for extracting OpenGL API calls is developed and surface mesh models from OpenGL calls per frame is voxelized. This series of voxel models is used as input model data for four-dimensional mesh model generation.

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A free-form curve can be interpolated by the circular arc or the straight line. As a result, data size is decreased and the machining is speed up to a traditional machining tool. The problem of cutting over the processing shape occurs in the interpolated data.The problem of cutting over is solved by offsetting the tool path. I developed the program that generate the offset tool path. This program reads the interpolated data, and inputs the quantity of offset and direction of offset. The program generates an offset tool path.

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When texture shape is mapping on processing object, discontinuity of shape occurs in a curved surface or an angle part. In this study we researched mapping texture shape on primitive shape. Primitive shape is consists of cube and cylinder planes. A texture for a regular sign wave is used for mapping. A regular thing like a sign wave is used for the texture for mapping. In order to process the mapped texture, we evaluate the shapes.

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