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Takashi Hosono, Yoshiya Okabe, Masayoshi Kinbara, Kazuhiko Sakaki
Session ID: K34
Published: 2011
Released on J-STAGE: March 05, 2012
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Laser irradiation in liquid etchant using optical fibers is investigated in this report for debris-less grooving of single crystalline silicon. Little debris is observed around the grooves because laser ablated materials are successfully dissolved into KOH etchant. Oxide layer formed with H
2O
2 in the etchant simultaneously prevents the workpieces from unselective silicon etching by the alkaline. The optical fibers, one end is dipped into the etchant, provide a laser beam avoiding wobble of the laser spot. Width of the produced grooves is not depends on traverse speed besides depth of them decreases as the speed increases. The fact indicates the pulse duration of the Q-switched Nd:YAG laser, 6ns, is short enough to remove the materials without excessive heating of the materials out of the laser spot.
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measurement of temperature distribution at laser irradiation area
Tatsuya Ohta, Shunichi Kobayashi, Takashi Ueda, Tatsuaki Furumoto, Aki ...
Session ID: K36
Published: 2011
Released on J-STAGE: March 05, 2012
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Shin-ichi Nakashiba, Yasuhiro Okamoto, Tomokazu Sakagawa, Kazuya Miura ...
Session ID: K37
Published: 2011
Released on J-STAGE: March 05, 2012
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Masashi Ide, Takehiro Watanabe, Souta Matsusaka, Hirofumi Hidai, Nobor ...
Session ID: K38
Published: 2011
Released on J-STAGE: March 05, 2012
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Makoto Sasaki, Junichi Ikeno
Session ID: K39
Published: 2011
Released on J-STAGE: March 05, 2012
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Rika Matsuo, Koichi Chabana, Masayuki Shiraishi, Junichi Ikeno, Yosuke ...
Session ID: K43
Published: 2011
Released on J-STAGE: March 05, 2012
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Kenta Takahashi, Yasuhiro Okamoto, Akira Okada
Session ID: K44
Published: 2011
Released on J-STAGE: March 05, 2012
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It is important to reduce the edge damage in cleavage of sapphire substrate for cost reduction. In this study, the internal modification technique of a sapphire substrate by picosecond pulsed fiber laser were investigated. Internal modification of sapphire with a high aspect ratio such as 5µm width and 150µm height were successfully performed by the irradiation from the epitaxial layer side. A sapphire wafer of 0.4 mm thickness could be broken from the internal modified line without less damage of the epitaxial layer.
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Takahide Matsunaga, Takashi Ueda, Tatsuaki Furumoto, Akira Hosokawa, R ...
Session ID: K45
Published: 2011
Released on J-STAGE: March 05, 2012
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Keisuke Yahata, Etsuji Ohmura, Seiji Shimizu, Masanao Murakami
Session ID: K46
Published: 2011
Released on J-STAGE: March 05, 2012
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Masato Fujii, Hirohumi Hidai, Souta Matusaka, Noboru Morita
Session ID: K61
Published: 2011
Released on J-STAGE: March 05, 2012
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Xuan Khai PHAM, Rie Tanabe, Yoshiro Ito
Session ID: K62
Published: 2011
Released on J-STAGE: March 05, 2012
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Micro-holes of 100 to 300 µm were drilled through on cemented tungsten carbide plates of 0.5 and 1 mm thick by ultrafast laser pulses (150 fs at 800 nm, 1 kHz repetition rate) via a galvano-scanner with an 80 mm focal length lens. Effects of scan speed and polarization were examined. It is found that circularly polarized beam results in regular holes while linearly polarized beam produces distortions on their shape. Scan speed affects the shape of drilled hole, too. Laser induced periodic surface structures (LIPSS), which are formed at a period of 300 nm and oriented perpendicular to laser incident axis, were found on whole side of the hole drilled by circular polarized light. The formation of LIPSS by linearly polarized beam was dependent on the relative angle between the incident plane on the wall surface and the polarization direction.
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Wataru Okazaki, Yoshikazu Yoshida
Session ID: K63
Published: 2011
Released on J-STAGE: March 05, 2012
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Shogo Ume, Tomoko Kobayakawa, Souta Matsusaka, Hirofumi Hidai, Takehir ...
Session ID: K64
Published: 2011
Released on J-STAGE: March 05, 2012
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Yasuhiko Kamiya, Tsuyosi Tokunaga, Kazuki Igarashi, Shunrou Yoshioka, ...
Session ID: K66
Published: 2011
Released on J-STAGE: March 05, 2012
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Fabricating a plastic lens by cutting and polishing and its evaluation
Sho Morita, Tsuyoshi Tokunaga, Ryouichi kuwano
Session ID: K67
Published: 2011
Released on J-STAGE: March 05, 2012
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Takayuki Numata, Daiji Fukuda, Yoshirou Ichino
Session ID: K68
Published: 2011
Released on J-STAGE: March 05, 2012
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Toru Kizaki, Takuro Kudo, Toshihiro Ogasahara, Naohiko Sugita, Mamoru ...
Session ID: K69
Published: 2011
Released on J-STAGE: March 05, 2012
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Yuta Sato, Keiko Yukawa, Masahiro Kinoshita, Takashi Kawakami
Session ID: K73
Published: 2011
Released on J-STAGE: March 05, 2012
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Yuta Umemura, Ikuo Suzuki, Masahito Yamamoto, Masashi Furukawa
Session ID: K74
Published: 2011
Released on J-STAGE: March 05, 2012
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Takayuki Suzuki, Kazuma Suzuki, Keitaro Naruse
Session ID: K75
Published: 2011
Released on J-STAGE: March 05, 2012
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Yoshiyuki Watanabe, Sigeru Aomura, Hiromichi Nakadate
Session ID: K76
Published: 2011
Released on J-STAGE: March 05, 2012
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The violin is played by combining the fingering and bowing. Bowing is assumed that it has a big influence on the tone.This study sees bowing and control of bow speed and bow force. Purpose of this study is development of the device that plays the violin near man's performance.
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Tadaaki Niwa, Keiko Yukawa, Masahiro Kinoshita, Takashi Kawakami
Session ID: K77
Published: 2011
Released on J-STAGE: March 05, 2012
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Acquisition of standing up behavior and walking behavior
Motoki Murase, Michiko Watanabe
Session ID: K79
Published: 2011
Released on J-STAGE: March 05, 2012
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Jun Tominaga, Akihiro Hayashi, Shinya Haramaki, Toshifumi Satake
Session ID: K80
Published: 2011
Released on J-STAGE: March 05, 2012
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Kazuyuki Yorozuya, Ikuo Suzuki, Masahito Yamamoto, Masashi Furukawa
Session ID: K81
Published: 2011
Released on J-STAGE: March 05, 2012
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Tomohiro Ueki, Shigeru Aomura, Hiromichi Nakadate
Session ID: K82
Published: 2011
Released on J-STAGE: March 05, 2012
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Tadahiko Shinshi, Masato Ishibashi, Minoru Uehara
Session ID: L01
Published: 2011
Released on J-STAGE: March 05, 2012
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Yoshihiro Morimoto, Tadahiko Shinshi, Tatsuki Okamoto, Takahiro Nakai
Session ID: L02
Published: 2011
Released on J-STAGE: March 05, 2012
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Yoichiro Dan, Yoshiaki Kubota
Session ID: L03
Published: 2011
Released on J-STAGE: March 05, 2012
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Kaiji Sato, Mariam Md Ghazaly
Session ID: L04
Published: 2011
Released on J-STAGE: March 05, 2012
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This paper describes the driving method and the control system design for ultra-precision fine motion stage with multi-layer electrostatic actuator of which electrodes are covered by isolation film and supported by only lubrication oil. The working range of an experimental electrostatic actuator is wider than 50micrometers. When the only lubrication oil is used for lubrication between the electrodes, electrostatic attractive forces produce large friction force with time and make the working range much small. In this paper, the suitable driving method is proposed to overcome the problem. The effectiveness of the proposed driving method was first examined by experiments in open-loop. Next, the performance of closed loop system with the driving method was evaluated. The closed loop system with the driving method shows the positioning accuracy better than 15nm.
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Yosuke Fukuhara, Satoshi Honda
Session ID: L06
Published: 2011
Released on J-STAGE: March 05, 2012
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Shohei Tokudome, Akira Kakuta, Toshitake Tateno
Session ID: L07
Published: 2011
Released on J-STAGE: March 05, 2012
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Burak Sencer, Tatsuya Mori, Eiji Shamoto
Session ID: L08
Published: 2011
Released on J-STAGE: March 05, 2012
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Motion synchronization of servo systems carries great importance in various precision manufacturing operations. For double-sided (duplex) milling of thin plates, in particular, the cutting tools must engage with both sides of workpiece in a precisely synchronized manner to avoid forced vibrations. A continuous sliding mode controller (SMC) is developed to deal with the problem of position synchronization for dual spindle servo systems. Synchronization error is defined as the differential position error between the two servo systems that follow same reference motion command. Hence, developed continuous SMC penalizes 3 error states; namely the individual servo positioning errors, and the synchronization error between them. As a result, individual trajectory tracking as well as motion coupling objective is introduced. The final control law is implemented in the form of a PID controller in real time, and double-sided milling experiments are performed to verify its effectiveness.
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Yasushi Niwase, Makoto Fukuda
Session ID: L09
Published: 2011
Released on J-STAGE: March 05, 2012
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It has been popular to use the sampled data control in positioning a mechanical stage system. Choosing a proper sampling rate in positioning control is important to improve the positioning accuracy and responsiveness. For this purpose, we make a control system that has a high speed sampling rate in order to control the position of an air bearing lead screw stage. In this paper, the characteristics of the mechanism and the results of the positioning control are described.
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Takuro Higuchi, Hiromichi Kunisada, Yoshinori Kunii, Ryuta Sato, Masao ...
Session ID: L13
Published: 2011
Released on J-STAGE: March 05, 2012
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Hirofumi Itagaki, Masaomi Tsutsumi, Hideaki Iwanaka
Session ID: L14
Published: 2011
Released on J-STAGE: March 05, 2012
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7th report, In case of offset-lead preloading
Shigeo Fukada, Ryosuke Fukuda
Session ID: L15
Published: 2011
Released on J-STAGE: March 05, 2012
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Hiroki Yokoi, Kenta Seki, Makoto Iwasaki
Session ID: L16
Published: 2011
Released on J-STAGE: March 05, 2012
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This paper shows the experimental results of friction characteristics and positioning performance for servo motors with air bearings and rolling bearings. Although rolling bearings are widely adopted as a supporting mechanism in the positioning system with servo motor, it is well known that positioning performance deteriorates by the influence of nonlinear friction on the contact surface. In order to avoid the influence of nonlinear friction, air bearings are adopted to make shaft and bearing noncontact. In this paper, the difference of the characteristic is clarified by measuring nonlinear friction of each servo motor with rolling bearings and air bearings. In addition, the influence on the positioning performance by the difference of friction is verified by experiments.
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Asuka Inagaki, Toshiharu Tanaka, Takaaki Oiwa, Jiro Otsuka, Yasumitsu ...
Session ID: L17
Published: 2011
Released on J-STAGE: March 05, 2012
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Makoto Hasegawa, Ryuuta Sato, Keiichi Sirase
Session ID: L19
Published: 2011
Released on J-STAGE: March 05, 2012
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Ryuta Sato
Session ID: L20
Published: 2011
Released on J-STAGE: March 05, 2012
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Temperature-rise decrease of ball screw
Kenichi Taneishi, Jiro Otsuka, Ning Zhu, Shigeomi Koshimizu, Takeki Sh ...
Session ID: L21
Published: 2011
Released on J-STAGE: March 05, 2012
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In the previous report, Peltier modules indirectly cooled the motor of the precision positioning device whose ball screw was connected with the motor shaft. As a result, the total thermal deformation drift (ball screw elongation and stage tilting motion) could be decreased to some extent. In this report, about the normal-type positioning device whose ball screw is connected to the motor shaft by a coupling, the each part of positioning device such as the moving stage and the support unit of ball bearing were cooled by Peltier modules to decrease the temperature-rise of the ball screw as same as the room temperature.
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Takeshi Morishima, Ron van Ostayen, Jan van Eijk
Session ID: L22
Published: 2011
Released on J-STAGE: March 05, 2012
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Thermal errors are important sources of positioning errors in precision machines and are increasingly becoming determining factors to meet increasing specifications. In this paper, we introduce our ongoing research on the reduction of transient thermal errors in precision machines using design and control methodologies based on thermal modal analysis (TMA). TMA is a modal analysis technique applied to the thermal domain to reduce model complexity by the decomposition and the reassembly of a structure's thermal modes and related deformation shapes. The basic theory of TMA, its advantages and our preliminary result on 1D beam deformation control are presented.
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Susumu Makinouchi, Akihiro Watanabe, Masahisa Takasaki
Session ID: L31
Published: 2011
Released on J-STAGE: March 05, 2012
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Tomoaki Noda, Hisao Kikuta, Akio Mizutani, Satoru Yoneyama
Session ID: L32
Published: 2011
Released on J-STAGE: March 05, 2012
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Hiroshi Mizumoto, Yoshito Yabuta, Shirou Arii, Tomohiro Hirose, Youich ...
Session ID: L33
Published: 2011
Released on J-STAGE: March 05, 2012
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Kazuki Kurashige, Shigeka Yoshimoto, Kei Somaya
Session ID: L34
Published: 2011
Released on J-STAGE: March 05, 2012
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Modal analysis and improvement of the main resonance frequency
Akira Sakurada, Shigeki Mori, Akihiro Naganawa, Yotsugi Shibuya, Goro ...
Session ID: L35
Published: 2011
Released on J-STAGE: March 05, 2012
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Yoshio Ichida, Hideo Ueno, Ryunosuke Sato
Session ID: L37
Published: 2011
Released on J-STAGE: March 05, 2012
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Ryunosuke Sato, Yoshio Ichida, Hideo Ueno, Takamasa Terabayasi, Hitosh ...
Session ID: L38
Published: 2011
Released on J-STAGE: March 05, 2012
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