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A new fabrication process of a metal nano-dot array on plastic film is proposed in this paper. This process comprises four steps. Firstly a thin metal film is coated on a grid patterned quartz/silicon substrate by a spatter coater. Secondly, the substrate is annealed, when the metal film is aggregated to a nano dot array. Then epoxy resin is coated on the nano-dot array. Finally the epoxy resin film is peeled off the substrate and the nano-dot array is transferred on the epoxy film. Effects of process parameters on the dot transfer ratio, i.e. annealing temperature, kinds of substrate materials, kinds of epoxy resin, is studied in this paper. It is revealed that silicon substrate causes higher dot transfer ratio than the quartz glass substrate. Dot transfer ratio decreases with the increase of annealing temperature when viscous epoxy resin (Araldite Rapid) is used. In the meantime, when low viscosity epoxy resin (SpeciFix-20) is used, dot transfer ratio increases with the increase of annealing temperature.

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Improving materials surface function by introducing micro-textures is of great interest in various fields. The authors have also tried to improve the photocatalytic surface functions by introducing the microcutting textures and achieved an improvement in the hydrophilicity, which is one of the photocatalytic functions, due to the increase in the real surface area. In this report, vibration assisted cutting with higher frequency is performed to fabricate more precise surface micro-textures. A pure copper plate is cut by a sharply pointed triangular diamond tip vibrated by a fast tool servo system with micron order amplitude and several kHz frequency. As a result, it is found that the periodical micro concave-convex patterns with the combinations of impressions and pileups can be obtained by the proposed method using almost the same vibration amplitude as the cutting depth. It is also achieved that a micro-textured surface with numerous concave-convex patterns less than 1 micron in height with 3 microns in pitch.

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Cutting tests of mono-crystalline SiC, on the surface of which an amorphous layer was pre-formed by ion implantation, were carried out. The ductile-mode machining was observed at the depth of cut smaller than 60nm. Under the larger depth of cut than 60nm, cracks were observed on work surface. However, transmission electron micrographs show that crack extension was obstructed on the interface between amorphous layer and crystalline base material even in brittle-mode machining and no sub-surface damage was observed in crystalline SiC. The results suggest that a damage free machining of mono-crystalline SiC is possible by surface modification to amorphous structure.

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A micro/nano scale cutting mechanism using a non-rigid tool holder has been developed. The control principle of this mechanism is based on the nano-cutting technique using an Atomic Force Microscope (AFM); however, unlike the current nano-cutting systems, the manufacturing area of this equipment is in the order of several square centimeters. Using a flexible cantilever, with a mono-crystal diamond tool attached at its tip, a piezoactuator, a displacement sensor and a feedback control system, it is possible to fabricate micro-grooves in the order of few microns. The produced micro-grooves present a constant cutting depth even if they are fabricated on inclined surfaces because in this technique the normal cutting force is maintained constant. This cutting mechanism can be attached to a common machine tool, and the feedback control system is capable to compensate the errors that the machine can present without the necessity of a complicated control system. In this paper, different experimental results are presented, showing the performance of the cutting mechanism and allowing us to make new proposals for its improvement.

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We've been studying about micro-fabrication by using highly-charged heavy ion beams, which were prepared by means of the irradiation facility installed in Kochi University of Technology. In order to expand the area for fabrication, an X-Z axis table was installed in this facility. The uniformity of the fabrication was verified through the irradiation of ion beams with moving the X-Z axis table. The results of this study have shown the possibility of micro-fabrication with highly-charged ion beams as the mass production process.

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In previous study, particles were self-assembled on a substrate and then transferred to another substrate on which resin is coated. By changing particle materials, the reflectance or transmittance of electromagnetic waves can be changed. In addition, stacking such layers with various thickness of various material particles, the method for improving reflectance of electromagnetic waves was examined. The structure laminated alternately on which barium titanate particles (400 nm of particle diameter) and a silica particle (1μm of particle diameter) was fabricated, and the experiment performed fundamental verification.

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In order to develop the supporting system for process planning in machining of the products in which a large number of cutting tools and machining processes are required, a supporting system for process planning using an algorithm of shortest path problem was proposed in previous reports. Principal cutting force and machining power in milling for the workpiece which have several drilling holes with a shoulder mill were calculated by applying the cutting model and energy methods proposed by Usui et al. Relationship between machining power and machining time was shown. It is constituted that foundation of a supporting system in which machining time and machining power can be estimated.

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