Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Volume 69, Issue 8
Displaying 1-8 of 8 articles from this issue
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Special Feature / Surface Treatment of Biomaterials
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Research Papers
  • A Rotating Ring Disk Study of Accelerators with Cl－ and Br－ for Copper Damascene Electrodeposition
    Anh Van Nhat TRAN, Ha Van HOANG, Tetsuji HIRATO, Kazuo KONDO
    2018 Volume 69 Issue 8 Pages 352-355
    Published: August 01, 2018
    Released on J-STAGE: February 01, 2019
    DOIhttps://doi.org/10.4139/sfj.69.352
    JOURNAL FREE ACCESS
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    The acceleration effects of bis（sodiumsulfopropyl） disulfide（SPS） and its derivatives in the presence of Cl－ and Br－ were studied using a rotating ring disk electrode（RRDE） in a CuSO4/H2SO4 solution. The positive ring current increased with the addition of accelerators providing that the Cu（I） thiolate complex was formed during the dissolution step of electrodeposition. SPS and mercaptopropylsulfonic acid（MPS） show better acceleration effect with Cl－ while propane-1,3-disulfonic acid（PDSH） has higher acceleration effect with Br－. The highest acceleration effect is achieved with 4 ppm of PDSH and 50 ppm of Br－. Copper electrodeposition, which was conducted using periodic pulse reverse current waveform with Ion ＝－20 mA/cm2, achieved perfect filling with 2 ppm of PDSH and 50 ppm of Cl－ in which the ring currents measured at dissolution step are significant. Results show that the cuprous complexes which formed during the dissolution step hastened via-filling.

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