Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Volume 69, Issue 12
Displaying 1-24 of 24 articles from this issue
Special Feature / Forefront of Studies on Anodizing for Metals and Semiconductors
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  • Tomoko URATA, Kazuhiro FUKAMI, Mitsuhiro YAMAMOTO, Tetsuo SAKKA
    2018 Volume 69 Issue 12 Pages 637-640
    Published: December 01, 2018
    Released on J-STAGE: June 01, 2019
    JOURNAL FREE ACCESS

    Formation mechanisms of macropore-like structure filled with micropores (skeleton structure)and conventional macroporous structure (macropores being not filled with micropores)are studied. By controlling the current density and HF concentration in the electrolyte solu tion, it has been clarified that the skeleton structure is formed under conditions where the bulk HF concentration is higher and the current density is lower. Porous silicon prepared under such conditions does not have oxidized silicon at the bottom of pores. This suggests that the mechanism of the skeleton structure formation is totally different from that reported for the explanation of conventional macropore formation. In this study we propose a model for skeleton formation based on hole-supply in a silicon electrode.

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