Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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Volume 53, Issue 12

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Nanotechnology Related Programs in MEXT and NIMS

Kazuo FURUYA

2002 Volume 53 Issue 12 Pages 788-792
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.788

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Introduction of National R & D on Nanotechnology in METI and AIST

Masahito SATO

2002 Volume 53 Issue 12 Pages 793-800
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.793

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Electrochemical and Electroless Deposition Processes for Fabrication of Nano Structures and Devices

Takayuki HOMMA, Hideo HONMA

2002 Volume 53 Issue 12 Pages 801-805
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.801

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Materials Nanotechnology

Hideyo KODAMA, Mitsuo HAYASHIBARA, Yuuzou KOZONO

2002 Volume 53 Issue 12 Pages 806-811
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.806

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Sensors and Nanotechnology

Manabu TAKEUCHI

2002 Volume 53 Issue 12 Pages 812-817
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.812

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New Materials Technology for Future Nano-Scale ULSIs

Shigeaki ZAIMA, Yukio YASUDA

2002 Volume 53 Issue 12 Pages 818-822
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.818

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Recent Advances in Dry Etching Technology

Itsuko SAKAI, Tokuhisa OHIWA, Makoto SEKINE

2002 Volume 53 Issue 12 Pages 823-827
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.823

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Cu Electrode Surface Investigated by Electrochemical STM

Junji INUKAI, Kingo ITAYA

2002 Volume 53 Issue 12 Pages 828-834
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.828

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The Role of Electronmicroscopy on the Nano-Scale Analysis of Functional Surfaces

Sachiko ONO

2002 Volume 53 Issue 12 Pages 835-838
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.835

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SIM with FIB to Support Nano-Technology

Toshiaki SUZUKI, Noriaki ENDO, Masateru SHIBATA, Seiji KAMASAKI, Takeo ...

2002 Volume 53 Issue 12 Pages 839-842
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.839

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Transparent Inorganic EL Displays and ALD Technology

Takeshi YAMAUCHI, Ryonosuke TERA, Yutaka HATTORI, Nobuei ITO

2002 Volume 53 Issue 12 Pages 843-846
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.843

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Particulate Magnetic Recording Media with Nano-Scaled Magnetic Layer

Kiyomi EJIRI, Shinji SAITO, Mikio TOMARU

2002 Volume 53 Issue 12 Pages 847-851
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.847

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Preparation of Nano-ordered Co/Pd Multilayered Films by Electroplating Using Automatic Plating Machine

Hideyuki OHTSUKA, Yuichi SATO

2002 Volume 53 Issue 12 Pages 852-856
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.852

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Fluorocarbon Porous Films with Low-K Formed by Using Plasma-Enhanced CVD and Solvent Process

Kazuo TAKAHASHI, Takashi MITAMURA, Kouichi ONO, Yuichi SETSUHARA

2002 Volume 53 Issue 12 Pages 857-859
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.857

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Formation of Preferentially Oriented Polycrystalline Silicon Thin Films Employing Pulse-Modulated Plasma PE CVD

Masaru HORI, Toshio GOTO

2002 Volume 53 Issue 12 Pages 860-862
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.860

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Simple Preparation of Carbon Nanohorns by Arc Discharge

Hirofumi TAKIKAWA

2002 Volume 53 Issue 12 Pages 863-864
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.863

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Silica Ultrathin Film Deposition onto Organic Pigments and Purification

Atsushi TAKEDA, Chihiro KAITO

2002 Volume 53 Issue 12 Pages 865-867
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.865

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Nanoimprint Technology

Simple Lithography Technique for Nano-Scale Pattern

Akihiro MIYAUCHI, Kousuke KUWABARA, Mitsuru HASEGAWA, Takao MIWA

2002 Volume 53 Issue 12 Pages 868-870
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.868

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Fabrication of Highly Ordered Nanohole Array Structures by Anodization of Al and Their Functional Applications

Hideki MASUDA

2002 Volume 53 Issue 12 Pages 871-874
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.871

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Composite Plating Containing Nanometre-Sized Particles from a Non-Aqueous Electrolyte

Tetsuji HIRATO

2002 Volume 53 Issue 12 Pages 875-877
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.875

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Overcoat for Hard Disk Medium

Preparation and Evaluation

Shigehiko FUJIMAKI, Yuichi KOKAKU

2002 Volume 53 Issue 12 Pages 878-880
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.878

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Etching of ITO Films Using HI

Mitsuru SADAMOTO

2002 Volume 53 Issue 12 Pages 881-883
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.881

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Surface Modification of Micro Drills

Mamoru KOHATA

2002 Volume 53 Issue 12 Pages 884-886
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.884

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SEI Films Obtained by the Addition of Functional Additives to Li-Ion Batteries

Hideya YOSHITAKE, Tatsumi ISHIHARA, Masaki YOSHIO

2002 Volume 53 Issue 12 Pages 887-889
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.887

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Ballistic Electron Surface-Emitting Device (BSD) Based on Nano-Crystalline Silicon and Its Application to Flat Panel Display

Takuya KOMODA

2002 Volume 53 Issue 12 Pages 890-893
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.890

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Nanotechnology in Liquid Crystalline Display

New Alignment Method for Liquid Crystal

Atsushi KUMANO

2002 Volume 53 Issue 12 Pages 894-896
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.894

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Self-Assembled Zirconium Phosphonate Films for Corrosion Protection

Azusa SHIDA, Masanobu FUTSUHARA, Hiroyuki SUGIMURA, Osamu TAKAI

2002 Volume 53 Issue 12 Pages 897-898
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.897

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Pin-Point Characterization of Nano-Materials Using FIB Technique

Takeo KAMINO, Toshie YAGUCHI, Mitsuru KONNO, Takahito HASHIMOTO, Hidem ...

2002 Volume 53 Issue 12 Pages 899-901
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.899

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Microfluidic Device for Detection of Environmental Gases Using Nano-porous Silica

Yuko UENO

2002 Volume 53 Issue 12 Pages 902-905
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.902

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Scanning Probe Microscopy Observation of Catalyst Surfaces

Masaharu KOMIYAMA

2002 Volume 53 Issue 12 Pages 906-908
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.906

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DNA Imaging by Scanning Near-Field Optical Microscopy and Surface Modification of Mica

Hiroshi MURAMATSU, Jong-Min KIM

2002 Volume 53 Issue 12 Pages 909-911
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.909

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In Situ Observation of Adsorption Phenomena of Proteins on Solid/Liquid Interfaces Using Slab Optical Waveguide spectroscopy

Naoki MATSUDA, Takamitsu YOSHIDA, Hajime ASANO, Jose H. Santos, Zhi-me ...

2002 Volume 53 Issue 12 Pages 912-914
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.912

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Liquid Phase Growth of Carbon Nanotubes in Alcohols

Mikka NISHITANI-GAMO, Kiyoharu NAKAGAWA, Yafei ZHANG, Keishin OTA, Hid ...

2002 Volume 53 Issue 12 Pages 915-919
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.915

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A novel synthesis of high density aligned carbon nanotubes in the liquid-phase has been demonstrated. Carbon nanotubes have been grown on Si substrate in methanol, and other alcohols by using Fe catalyst. Hollow multiwall carbon nanotubes external diameters ranging from 6 to 26nm standing well on the Si substrate were obtained. The growth rate of carbon nanotubes was∼several microns per minutes. The large difference in temperature between the substrate surface and the liquid can cause very high nucleation density and high growth rate and affect the growth direction of the carbon nanotubes. Very few amorphous components was produced among the carbon nanotubes because reaction proceed only on the hot substrate and no reaction can proceed in the liquid phase. This simple method can promise to give a large scale production of the carbon nanotubes.

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Electrodeposition of Zn-Al₂O₃ Composite from Non-Suspended Solution Containing Quaternary Ammonium Salt

Satoshi OUE, Hiroaki NAKANO, Shigeo KOBAYASHI, Tetsuya AKIYAMA, Hisaak ...

2002 Volume 53 Issue 12 Pages 920-925
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.920

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Electrolytic production of Zn-Al₂O₃ composite coatings was tried in sulfate solutions containing Zn²⁺ and Al³⁺ ions by codepositing Al³⁺-compound formed due to pH rise in the cathode layer. The results obtained are as follows:
(1) The Zn-Al oxide composite was obtained under the conditions that hydrogen evolution was significantly accelerated by the suppression of Zn deposition. Addition of stearyle benzyl ammonium chloride (C-18 benzyl) to the baths was effective for an increase in Al content in the deposit and Al was codeposited in trivalent state in the deposits;
(2) The partial polarization curves of Zn were shifted to the less positive direction due to the suppressed rate of Zn deposition by additive C-18 benzyl
(3) X-ray diffraction patterns of the deposited composites showed that the Al³⁺-compound that existed in the deposits was θ-Al₂O₃
(4) TEM observation revealed that the codeposited Al₂O₃ with a small size of 10 to 100nm was homogeneously dispersed in the deposits.

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The Electrical Properties of Anodic Oxide Films Formed on Al-Nd Alloy Thin Films in Mixed Solutions of Ethylene Glycol and Water

Fumikazu MIZUTANI, Sachie TAKEUCHI, Hiroshi TAKAHA, Makoto UE, Kiyoshi ...

2002 Volume 53 Issue 12 Pages 926-932
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.926

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In mixed solutions of ethylene glycol and water, Al-Nd alloy films were anodized at 1mA cm^-2 up to 100V. Al-10wt.% Nd and Al-3wt.% Nd sputtered films were used as substrates, and electrolytes containing various kinds of solute were used. After annealing at 300°C, FT-IR spectrum and dielectric strength were measured for each sample. By anodizing in the electrolytes, the species originating from the ethylene glycol are incorporated into the oxide films, as well as the anions of the solute. As a consequence of the incorporation, the electrical properties of the anodic films are varied. Whereas various kinds of electrolyte were used for two kinds of Al-Nd substrates, FTIR peak position associated with Al-O stretching vibration and the dielectric strength had a certain relationship. Therefore, it is considered that the insulating property mainly depends on the microstructure of the oxide films, and that the influence of a change in the oxide film composition is very small.

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Mechanical Properties of Fluorocarbon Plasma Treated Silicon Containing Diamond Like Carbon Films

Jongduk KIM, Shojiro MIYAKE, Masahito BAN

2002 Volume 53 Issue 12 Pages 933-938
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.933

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Diamond like carbon (DLC) and silicon containing DLC (Si-DLC) films were deposited by EBEP (electron beam excited plasma)-CVD. The effects of CF₄ plasma treatment and Si-inclusion on DLC film on surface energy, nanoindentation hardness and nanoscratching properties were investigated. DLC and Si-DLC films were surface modified by CF₄ plasma treatment. CF₄ plasma treatment decreases surface energy evaluated by the liquid drop method. Si-inclusion decreases the nanoindentation hardness. CF₄ plasma treatment decreases nanoindentaion hardness of DLC film, however increases the hardness of 20% Si containing DLC film. Micro wear depth increases by Si-inclusion evaluated by nanoscratch test. CF₄ plasma treatment increases the micro wear of DLC film, however decreases the micro wear of 20% silicon containing DLC film. Friction coefficients of both DLC and Si-DLC films were decreased by CF₄ plasma treatment.

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Surface Modification of Magnetic Recording Layer by Low Energy Beam Irradiation

Shojiro MIYAKE, Yukio SEKINE, Shuichi WATANABE, Naoyuki YAMAMOTO

2002 Volume 53 Issue 12 Pages 939-944
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.939

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To improve the reliability of high-density magnetic systems, a new thin protective layer against wear and corrosion must be applied on magnetic disk media. Various low-energy beams produced from N₂, O₂, CF₄ and CH₄ plasma were irradiated onto Co-Cr-Ta magnetic media, and then the effects on hardness, corrosion resistance and magnetic coercive force were studied, and the following results were obtained. (1) To clarify the relationship between hardness and plasma state, plasma spectroscopy analysis was performed. The hardness was affected by ion and radical quantities in the plasma. (2) Various low energy beam irradiations increase the surface Vickers and nanoindentaion hardness. Especially, nitrogen and CF₄ beam irradiations increase the hardness. The modulus of dissipation in deformation energy decreases with hardness increase. (3) Various low energy beam irradiations remarkably improve corrosion resistance evaluated from natural corrosion voltage in distilled water and physiological salt water solution. (4) Proper energy beam irradiation slightly degrades the magnetic coercive force of a magnetic disk.

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Analysis of Auger Depth Profiles by Logistic Function

Toshiya OGIWARA, Mineharu SUZUKI

2002 Volume 53 Issue 12 Pages 945-948
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.945

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We have analyzed the interfaces in Auger depth profiles, for the Ni/Cr multilayer specimen, the GaAs/AlAs superlattice specimen and the InP/GaInAsP multilayer specimen, using curve fitting process by the logistic function. In consequence, the calculated fitted profile curves are in very good agreement with the measured points. Moreover, it has been found that the depth resolution function is expressed by two parameters of the interface-width and the asymmetry. In this report, we recommend that the surface roughening effect and atomic mixing effect are clearly shown using these two parameters.

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Evaluation of SIMS Depth Profiles Using a Depth Resolution Function

Akio TAKANO, Yoshikazu HOMMA, Mineharu SUZUKI

2002 Volume 53 Issue 12 Pages 949-950
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.949

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Miniaturizing an electron device, characterization of ultra shallow region and ultra thin film is becoming important, and then high depth resolution has been required of the secondary ion mass spectrometry (SIMS). A measured depth profile is generally spread rather than the actual distribution because of atomic mixing and roughness caused by ion irradiation. We need a development not only in SIMS measurement procedure but also in analysis technique to presume a true depth distribution from a measured depth profile. In this paper, we report the evaluation of the depth resolution in SIMS data for boron nitride multi-delta-doped silicon and for isotope separated silicon dioxide on natural abundance silicon dioxide using physical model and we will demonstrate to presume a true depth distribution.

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Formation of an Organic Monolayer through the Surface Chemical Reaction of Hydrogen-Terminated Si with Phenyl-Acetylene

Hiroyuki SUGIMURA, Nagahiro SAITO, Yutaka KADOYA, Kazuyuki HAYASHI, Os ...

2002 Volume 53 Issue 12 Pages 951-952
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.951

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Development of Automatic Plating Machine and Preparation of Nano-Ordered Co/Pd Multilayered Films Using it and Their Magnetic Properties

Hideyuki OHTSUKA, Fujio ASA, Koichi KOBAYAKAWA, Yuichi SATO

2002 Volume 53 Issue 12 Pages 953-954
Published: December 01, 2002
Released on J-STAGE: October 30, 2009

DOIhttps://doi.org/10.4139/sfj.53.953

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