It has been generally believed hitherto that X-ray powder diffraction is not suitable for precise quantitative analysis of crystalline materials, owing to its low sensitivity for minor components with its comparatively poor SIN ratio. In this study, this difficulty was greatly reduced by using a high power X-ray diffractometer controlled precisely by a computer system. In order to confirm it, the quantitative analysis of SmCo
5 magnet alloys with excess samarium than the stoichiometric composition was carried out. A small amount of Sm
2Co
7 phase as low as 0.1 wt% in SmCo
5 powder was accurately determined by utilizing the Sm
2Co
7-SmCo
5 calibration curve established here, in which the correlation coefficient was 99.90. Sm
2Co
7 have not been detected but Sm
2O
3 in TDK SmCo
5 magnets. Moreover, the results were confirmed by other structure analysis methods such as X-ray composition image analysis, X-ray diffraction for small limited area and Auger electron spectroscopy. Their results agreed with the quantitative analysis by X-ray diffraction.
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