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Volume 23 (1975)
- Issue 4 Pages 237-
- Issue 3 Pages 161-
- Issue 2 Pages 105-
- Issue 1 Pages 1-
Volume 23, Issue 3
Displaying 1-7 of 7 articles from this issue
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AKIRA NAKAI1975 Volume 23 Issue 3 Pages 161-171
Published: October 31, 1975
Released on J-STAGE: June 28, 2010
JOURNAL FREE ACCESSIn the electromagnetic mass separator, the larger aperture angle for obtaining higher ion beam currents results in dominant aberrations of higher order and decreas es its practical required resolution. In this paper, taking account of both effects of the fringing field and the entrance-and exit-angles of the central ray to the boundaries of the pole piece, the method of caluculation of trajectories was discussed in a third order approximation for ion beam in a sector type analyzing magnetic field with linear pole piece boundaries and parallel plane pole faces. Space charges may also affect the behavier of ion beam in the mass separator, which will be described in another occasion.View full abstractDownload PDF (954K) -
ISAO TAKESHITA1975 Volume 23 Issue 3 Pages 173-181
Published: October 31, 1975
Released on J-STAGE: March 01, 2011
JOURNAL FREE ACCESSThe ion optical system using two Q lenses and a prism magnet of 90°deflection with parallel pole edges between them are analyzed. In this system the focal line can be rotated around the focal point by adjusting the focal lengths of two Q lenses. In special case, it becomes vertical to the optical axis. The effect of the rotation of pole edges is examined, and it is found that the rotation angle should be less than 5°. The condition of stigmatic focusing is also discussed.View full abstractDownload PDF (664K) -
FUSAFUMI NAKAO, TERUMASA YAMAMOTO1975 Volume 23 Issue 3 Pages 183-193
Published: October 31, 1975
Released on J-STAGE: June 28, 2010
JOURNAL FREE ACCESSAn improved ion detector for a partial pressure measurement at low levels has been developed using the off-axis technique. The ion detector consists of the electrostatic deflection plates and a channel electron multiplier. The arrangement and the configuration design are determined from the results of the map of electric equipotential surfaces and the trajectory analyses. The ion detector of this arrangement can greatly reduce the noise and base line shifts caused by photons and excited neutrals, which are dependent on the emission current and the pressures in the ion source. The noise count rate is on the order of 1-2 cps at a multiplier voltage of 3000 volts. The ion collection efficiency of 100% in this detector arrangement is obtained at a multiplier voltage of 3000 volts or more with the help of electrostatic deflection plates. The ion detector also permits focusing of ions with fairly different ion energies onto the multiplier. The off-axis ion detector gives a factor of 140 increase in effective sensitivity of the mass spectrometer. The minimum detection limit of the mass spectrometer with the off-axis ion detector is also given.View full abstractDownload PDF (1822K) -
HIROSI HIROSE, KAZUMITU NAKAMURA, ATUSI SHIBATA, HIFUMI TAMURA1975 Volume 23 Issue 3 Pages 195-208
Published: October 31, 1975
Released on J-STAGE: June 28, 2010
JOURNAL FREE ACCESSThis paper describes a hollow cathode duoplasmatron which has been developed for the use as primary ion source in the ion micro prove analyzer(IMA). Design parameters have been given for construction and operation of the ion source. Ion beams of O+2, O-, A+r of 10 keV energy were obtainable with the beam intensities of 1.7×10-5 -1.8×10-4Ampere having an initial energy of less than 25 eV at full width at half maximum. The stability of the ion beam current was within±1% fluctuation range under optimum gas pressure in the discharge chamber. The constituents of the ion beam was mass-analyzed by means of a Wien filter. A technique for measuring the beam emittance was developed and results are discribed. The normarized maximum brightness and the normarized minimum emittance of the ion source were 3×1010A/m2·rad2and 1.7×10-8 m ·rad respectively. Finally, the ion source was incorporated to the Hitach model IMA-2 ion micro probe analyzer for the examination of the focusing properties .The specimen current of 25 μA and minimum spot size of about 2μm diameter were obtained. By apply ing Oxygen+primary ion with oxygen gas introduction technique and specimen tilting method, the secondary ion current intensity of F+e increased to approximately 200 times larger than that obtained by applying Argon ion and without applying above mentioned technique.View full abstractDownload PDF (4319K) -
HIROSHI DOI, ICHIRO KANOMATA1975 Volume 23 Issue 3 Pages 209-220
Published: October 31, 1975
Released on J-STAGE: March 01, 2011
JOURNAL FREE ACCESSA new method for accurate in-depth analysis is developed. Since the ion beam is rapidly scanned with triangle waves, a sample surface is evenly etched in a very short time. In this case, the frequency of the triangle wave which is fed to the x-deflector is slightly different from that to the y-deflector and the ratio of these frequencies is held constant. The mass spectrometer can be scanned during ion beam scanning because one-frame scanning time of the ion beam is much shorter than one-peak scanning time of the mass spectrometer. Consequently, concentration profiles of several elements are obtained in one measurement without spoiling the accuracy of in-depth analysis. The accuracy of in-depth analysis by this method is 100Å against 5000Å depth. This value is 8 times smaller than that obtained by conventional ion-beam stopping method. Although ion-etched surface are observed with a scanning electron microscope, a roughness gauge and an optical microscope, unevenness is not identified. This method is applied to practical analyses, i. e. in-depth analyses of aluminum oxide deposited on silicon wafer, copper-diffused gallium arsenide and Se-Te-As compound. The result shows superiority of this method to a conventional one.View full abstractDownload PDF (5094K) -
TOSHIO KONDO, HIFUMI TAMURA, TOHRU ISHITANI, KAZUMITU NAKAMURA1975 Volume 23 Issue 3 Pages 221-229
Published: October 31, 1975
Released on J-STAGE: March 01, 2011
JOURNAL FREE ACCESSA thermodynamic approach to quantitative analysis with an ion microanalyzer(IMA)was applied to standard samples of low alloy steel for the two different measurements. The one of them was at an oxygen partial pressure of 5×10-5Torr in the sample chamber of IMA and the other was at high vacumm of-10-7Torr. The error of the quantitative analysis was discussed. The results by the IMA quantitative analysis werere ferred to the wet chemical analysis. The error in the IMA analysis for two measurements is almost same, and to a certain extent is observed.View full abstractDownload PDF (781K) -
TOSHIHIRO FUJII1975 Volume 23 Issue 3 Pages 231-236
Published: October 31, 1975
Released on J-STAGE: March 01, 2011
JOURNAL FREE ACCESSIn an analytical system of the gaschromatograph-quadrupole mass spectrometer, a total ion monitor was designed in which a simple modification was made to an electronics of the quadrupole mass spectrometer. It's performance was studied and discussed. The amount of 5×10-11 g was detectable for methyl stearate. This method could be a promising potential as a new, sensitive and universal GC detector. The effect of helium on the sensitivity of the mass spectrometer, in the other hand, was strict for the high sensitive GC/MS analysis. Ion space charge caused by helium was discussed. It is necessary to select the optimum value of the electron energy for the high detection sensitivity in the condition of the partial pressure of helium in the mass spectrometer.View full abstractDownload PDF (1692K)
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