Proceedings of JSPE Semestrial Meeting

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2003 JSPE Spring Meeting

Displaying 251-300 of 662 articles from this issue

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A Development of Super High-Pressure Micro Jet System for Pad Dressing and POST-CMP Cleaning in CMP Process

Yoshiyuki Seike, Sayuri Kawashima, Keiji Miyachi, Toshiroh Doy

Session ID: F69
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.312.0

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STI-CMP Process with CeO₂ Slurry for 90nm or More Shrinked Devices

Takashi Watanabe, Toshiyuki Isome, Naoki Idani, Motosyu Miyajima

Session ID: F73
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.314.0

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The New Bell-Jar Type CMP Machine (3rd Report)

Watanabe Shigeru, Doy Toshiro, Seyama Takashi, kasai Toshio

Session ID: F74
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.315.0

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Study on Cu-Chemical Mechanical Polishing Using Optical Radiation Pressure(1th Report) -Aggregation Property of Silica Particles-

[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...

Session ID: F75
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.316.0

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Super Thin SOI Wafer Flattening using Namerically Controlled Local Dry Etching

Kazuyuki Tsuruoka, Michihiko Yanagisawa, Shinya Iida, Yasuhiro Horiike

Session ID: F76
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.317.0

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Study of Polishing Pad for Silicon Wafer

keiji yamamoto, kouichi yoshida, tsuyoshi mizuno, hajime shimamoto, ma ...

Session ID: F77
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.318.0

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Mechanochemical Polishing of Si Wafers by Mica Abrasive

Nobuo Yasunaga, Shojiro Okada

Session ID: F79
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.320.0

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Development of the Polishing Pad Involving Abrasive Grains (2nd Seport)

Makoto Sato, Toru Nonami, Yamato Samitsu, Junji Ishizaki, Toshie Kanei ...

Session ID: F80
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.321.0

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Effect of Viscoelastic Behavior of Polishing Pads on Edge Profile of Silicon Wafers

kumiko sanda, masatoshi ikeda, katsuyoshi kojima, takayuki masunaga

Session ID: F81
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.322.0

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Estimation of a Polishing Rate Distribution on a Silicon Wafer (2nd Report)

Hajime Kohno, Kenji Takita

Session ID: F82
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.323.0

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Profile Modification for a Large-sized Wafer in Polishing (4st Report): Polishing-Head and Pressure Distribution

Kenichiro Yoshitomi, atsunobu Une, Masaaki Mochida

Session ID: F83
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.324.0

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Session ID: G01
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.326.0

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Development of 6 Axis Ultraprecision Machining System

Hitoshi Ohmori, Weimin Lin, Kazutoshi Katahira

Session ID: G02
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.327.0

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Characteristics of ELID-lap Grinding for Double Sided (Characteristics of ELID Grindiing)

Yuhji Hasegawa, Takashi Sasaki, Nobuhide Itoh, Hitoshi Ohmori

Session ID: G03
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.328.0

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Ultra Precision ELID Grinding of ZERODUR Mirror

Toru Suzuki, hotoshi Ohmori, yoshihiro Uehara, Weimin Lin, Tomoyuki Sh ...

Session ID: G04
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.329.0

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Development of Metal Free Electro Conductive Bonded Wheel for ELID Grinding

Nobuhide Itoh, ryuichi Komazawa, hitishi Ohmori, Akira Akutu

Session ID: G06
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.331.0

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Development of Metal Free Electro Conductive Bonded Wheel for ELID Grinding

nobuhide itoh, hitoshi ohmori, ryuuichi komazawa

Session ID: G07
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.332.0

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Estimation of Tribological Properties of ELID-Grinding Wheel

teruko katou, hitoshi ohmori, nobuhide itou, yutaka watanabe, akihiko ...

Session ID: G08
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.333.0

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ELID Grinding System by Minimum Quantity Liquid (3rd. Fabrication of Micro Pin)

yosihiro uehara, Hitoshi Ohmori, Weimin Lin, Yutaka Watanabe, Kazutosi ...

Session ID: G09
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.334.0

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ELID Grinding Characteristics of Ceramics Spherical Lens Molds

Kazutoshi Katahira, Hitoshi Ohmori, Klocke Fritz, Schmidt Christian, D ...

Session ID: G13
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.336.0

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ELID Grinding on the Lens of CCD Camera for In-process Observation of Rolling Interface

Guo Jianqiang, Ohmori Hitoshi, Lin Weimin, Ike Hiroshi, Ehara Tatsuya, ...

Session ID: G14
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.337.0

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Ultraprecision ELID Grinding of Solid Immersion Mirror

Tomoyuki Shimizu, Hitoshi Ohmori, Yoshihiro Uehara, Toru Suzuki, Weimi ...

Session ID: G15
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.338.0

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Development of Sintered SiC Ultla Lightweight Mirror - ELID Grinding of Rib-structures in the Rear Side

Hiroaki Eto, Yutang Dai, Toru Suzuki, Noboru Ebizuka, Toshikazu Ebisuz ...

Session ID: G16
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.339.0

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Effect of ELID Grinding on Corrosion Resistance and Micro-Hardness of Biomaterials (Ti-6Al-4V alloy)

[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...

Session ID: G18
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.341.0

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Surface Valuation of Ceramics for Lightweight Mirrors after ELID Grinding

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Session ID: G19
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.342.0

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Study on High Quality Machining of Sapphire using ELID Grinding

Akihiko Nemoto, Hitoshi Ohmori, Yshiyuki Ueno, Nobuhide Itou, Weimin L ...

Session ID: G20
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.343.0

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Effects of ELID Grinding on Surface Properties of Cemented Carbides Alloy

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Session ID: G21
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.344.0

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ELID-Grinding of Single-Point Sintered Diamond Tool by Tool Grinder

Katsuhiko Karikomi, Yoshiyuki Ueno, Hitoshi Ohmori

Session ID: G23
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.346.0

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Development of 4 Axis Desktop Grinding Machine

Yoshihiro Uehara, Hitoshi Ohmori, Wimin Lin, Kazutoshi Katahira, Yutak ...

Session ID: G24
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.347.0

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Micro V-grooves Fabrication of Large Germanium Immersion Grating Element for Mid-infrared Spectrograph by using of ″N-aou-VEL″ System 1st Precision Micro-sharpening for Large Grinding Wheel

Shaohui Yin, Hitoshi Ohmori, Yoshihiro Uehara, Tomoyuki Shimizu, Weimi ...

Session ID: G25
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.348.0

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Simulation for Supporting the Design of the Electrode in the Die-sinking EDM

[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...

Session ID: G31
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.350.0

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Study on Thermal Analysis in Electric Discharge Machining - 3rd Report, about the Energy Density of Arc Column in the Diameter Direction -

Kazuo Muto, Yutaka Kazama

Session ID: G32
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.351.0

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Time-Resolved Measurement of Emission Spectra in High-Current, Single Discharge

Rie Tanabe, Shinsuke Chihara, Yoshiro Ito, Hideki Takezawa, Naotake Mo ...

Session ID: G33
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.352.0

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Dielectric Fluid Flow in EDM Gap during Electrode Jump

Serkan Cetin, Akira Okada, Yoshiyuki Uno, Yoshifumi Kawazoe

Session ID: G34
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.353.0

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The debris exclusion from the gap in EDM is an important phenomenon for stable and precise machining. Therefore, in this study, the dielectric fluid flow during electrode jump is experimentally observed, analyzed and computational calculated for die-sinking EDM. A dummy electrode-workpiece is fabricated to simulate the real dielectric flow in gap. Observation and flow visualization in the model gap is carried out by using PIV (Particle Image Velocimetry). Separately, the flow field in EDM gap is computed using CFD calculations. The results of both PIV analyses and CFD simulations are discussed and compared.

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Study on Square Shaped Groove Machining by EDM Using Stepped Plate Electrode

Masakazu Negishi, Masakazu Kagawa

Session ID: G36
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.355.0

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Study on Diminishing the Corner Dullness of Machined Micro Hole by EDM Using Assisting Plate

Takayuki Tomizawa, Masakazu Kagawa

Session ID: G37
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.356.0

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Development of Discharge Micro Machining Center

[in Japanese], [in Japanese], [in Japanese], [in Japanese]

Session ID: G38
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.357.0

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Microsurgery Tool Manufactured by Electro-Discharge Machininng

Hajime Nakasuka, Akira Yamamoto, Masakazu Yamaoka, Takeo Satou, koichi ...

Session ID: G39
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.358.0

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Deposition of Lubricant Layer by Electrical Discharge Machining during Finishing Process. (3rd report) -Lubricity of Modified Layer -

Yousuke Shimizu, katsushi FURUTANI

Session ID: G50
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.360.0

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Mechanisms of TiC Powder Adhesion onto High Speed Steel by a Single Pulse Discharge

[in Japanese], [in Japanese]

Session ID: G51
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.361.0

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Machining Phenomenon of Hard Layer Formation by EDM

Yasuhiro Fukusima, Naotake Mohri, Hideki Takezawa, Nagao Saitou

Session ID: G52
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.362.0

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Study on Combined EDC Process with Lapping

Naohide Yotani, Toru Kawasima, Humihiro Itoigawa, Sinya Hayakawa, Taka ...

Session ID: G53
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.363.0

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Machining Characteristic of WEDM on Revolving Insulating Material

Hiromithu Gotou, Yasusi Fukuzawa, Naotake Mohri, Takayuki Tani

Session ID: G60
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.365.0

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Machining of Oxide Insulating Ceramics by WEDM

Tetsutaro Oohori, Yasusi Fukuzawa, Naotake Mohri, Takayuki Tani

Session ID: G61
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.366.0

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Machining Characteristics of EDM on Insulating Si3N4 Ceramics using Frame Electrode

takahiro iio, yasusi fukuzawa, naotake mohri, takayuki tani

Session ID: G62
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.367.0

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Machininng of Noblc Crystal Materials by EDM

Tosifumi Nagaya, Yasusi Fukuzawa, Naotake Mohri, Takayuki Tani, Muttam ...

Session ID: G63
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.368.0

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Machining Characteristics of Various Kinds of Ceramics by EDM -Comparison of Conductive Ceramics and Insulating Ceramics-

Takayuki Tani, Naotake Mohri, Yasushi Fukuzawa, muttamara apiwat

Session ID: G64
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.369.0

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Remote Machining by EDM with State Feedback System

[in Japanese], [in Japanese], [in Japanese], [in Japanese]

Session ID: G66
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.371.0

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High Accuracy Machining by Wire Cut EDM

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Session ID: G67
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.372.0

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An Analysis on Crack Initiation of TiAl Intermetallic Compound when Machining by Wire Electrical Discharge Machine

Toshiaki Furusawa, Koji Yoshida, Sadatosi Koroyasu, Hiroshi Hino, Shin ...

Session ID: G68
Published: March 26, 2003
Released on J-STAGE: March 01, 2005

DOIhttps://doi.org/10.11522/pscjspe.2003S.0.373.0

CONFERENCE PROCEEDINGS FREE ACCESS

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