The FT-IR spectra of the CaO-SiO
2 and CaO-SiO
2-CaF
2 slags were measured to understand the structural aspects of (fluoro-) silicate systems. The relative intensity of Si-O rocking band is very strong at SiO
2 saturation condition and this band disappears in the composition greater than 44.1 (mol%) CaO in the CaO-SiO
2 binary system. The bands for [SiO
4]-tetrahedra at about 1 150-760 cm
-1 split up with increasing content of CaO greater than 44.1 mol%. The IR bands in this wavenumber range are divided into four groups, that is about 1090, 990, 920, and 870 cm
-1, which have been assigned to NBO/Si=1, 2, 3, and 4, respectively. In the CaO-SiO
2 -CaF
2 (2CaO · SiO
2-Satd.) system, the center of gravity of the bands at about 1170-710 cm
-1 shifts from about 980 to 850 cm
-1 by increasing the ratio
XCaF2/
XSiO2 from 0.22 to 0.64. The bands for [SiO
4]-tetrahedra are observed from about 1 070 to 730 cm
-1 in the CaO-17.6(mol%)SiO
2-CaF
2 system, while these bands are observed from about 1120 to 720 cm
-1 in the CaO-40.0(mol%)SiO
2-CaF
2 system. The effect of substitution of CaF
2 for CaO on the depolymerization of silicate network is observed to significantly depend on the SiO
2 content in the slags. The bands for [SiO
4]-tetrahedra are observed from about 1110 to 720 cm
-1 in the CaO-SiO
2 -14.1(mol%)CaF
2 system and the center of gravity of these bands shifts from about 990 to 850 cm
-1 with increasing CaO/SiO
2 ratio. The fraction of the relatively depolymerized units continuously increases from about 0.5 to 0.8 as the composition of slags changes from 2CaO · SiO
2 to CaO saturation condition.
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