Kinetic process and lasing characteristics of IF halogen lasers are described for electron-beam pumped Ar/CF
3I/NF
3gas mixtures. According to individual fluorescence yields of IF (D′-A′), I
2 (D′-A′) and Ar F (B-X), it is found that (1) the I (
4P) species are confirmed as the common precursor to IF (D′) and I
2 (D′), and (2) the formation of I
2 (D′) competes with the formation of IF (D′) because the ratio of IF fluorescence yield to the I
2 fluorescence yield is nearly equal and the formation of I
2 (D′) leads to the reduction of the number of I (
4P). We also investigated the performance characteristics of the IF laser., It is found that the lasing is delayed due to the absorption by the I
2 (X) that causes the extraction of IF laser energy to be decreased.
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