Artificial intelligence based on deep learning has developed drastically in the past decade, requiring
more computing capability. However, the saturation in Moore’s law is expected in the next decade, promoting
research for new computing technologies which do not rely on Moore’s law. A deep learning
accelerator based on a Si programmable photonic integrated circuit (PIC) is one of the promising computing
technologies. After the first demonstration in 2017, many proposals of optical neural network using
Si photonics has been reported. To program a programmable PIC, an optical phase shifter is a key
device. Currently a thermo-optic phase shifter is used in a programmable PIC, while its power consumption
is too high for large-scale integration. To resolve this issue, we have investigated a hybrid
metal-oxide semiconductor (MOS) optical phase shifter enabling an ultralow-power programmable PIC.
We have also proposed a Si microring crossbar array which enables on-chip inference and learning.
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