巻号一覧
41 巻, 9 号
「産業用固体レーザー及びファイバレーザーの新展開」特集号
選択された号の論文の12件中1～12を表示しています
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「産業用固体レーザー及びファイバレーザーの新展開」特集号
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溝口 計, 松永 隆, 斎藤 隆志2013 年 41 巻 9 号 p. 668-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスMass production EUV market is delayed 3 years, because of delay of high power EUV light source. Therefore DUV is still used in leading edge of mass production line in semiconductor industry. Requirement for DUV source is higher power, precise spectral control and ECO friendly hardware. Gigaphoton released, 120 W product GT64A with Focus drilling technology into the market. On the other hand bottle neck of EUV lithography is still power of EUV light source. In the fi eld the EUV source achieved only 10W level operation. Gigaphoton is developing Proto-2nd phase machine to demonstrate key technologies. Droplet generator is improved dramatically, stable operation >100 h is demonstrated. CO2 laser achieved 9.0 kW operation with 75% duty. EUV light emission 5 W @I/F(at Intermediate Forcus) Clean power during 2 hours is demonstrated very recently. Target of proto-2 is 50 W level one week operation demonstration by Q4 2013. Base technologies for HVM are under development in parallel. High CE technology, we found around 5% CE average with picosecond prepulse. Also demonstrated remarkable reduction of mist after the picosecond pre-pulse. New 25 kW CO2 laser amplifier development project is on going co-operation with Mitsubishi electric. Our target of “Real pilot” shipment is 2015.抄録全体を表示PDF形式でダウンロード (2028K)
特集
レーザー解説
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鷲尾 邦彦2013 年 41 巻 9 号 p. 677-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスPDF形式でダウンロード (229K) -
Robert VAN LEEUWEN, Tong CHEN, Laurence WATKINS, Jean-Francois SEURIN, ...2013 年 41 巻 9 号 p. 679-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスVertical-cavity surface-emitting lasers (VCSELs) can be processed in large two-dimensional (2-D) arrays of single emitters to scale up the power for solid-state laser pumping. VCSEL-based kW-level 808 nm pump modules, comprising multiple 2-D arrays, were developed to pump compact Nd:YAG lasers. Various quasi-CW (QCW) VCSEL-pumped pulsed Nd:YAG lasers were investigated, both in end- and sidepumping configurations, demonstrating the viability of VCSEL pumping of compact solid-state lasers.抄録全体を表示PDF形式でダウンロード (679K) -
Leonid GLEBOV2013 年 41 巻 9 号 p. 684-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスThe paper is a survey of properties and applications of optical elements which are volume Bragg gratings (VBGs) recorded in photo-thermo-refractive (PTR) glass. These elements are narrow band filters that operate in spectral, angular and temporal domains. They provide spectral narrowing, stabilization and tuning of laser radiation; narrowing of divergence and beam steering; stretching, compression and temporal shaping of laser pulses, integration of different laser components in the same material and fabrication of monolithic solid state lasers; and passive and active coherent combining along with high density spectral combining of fiber lasers.抄録全体を表示PDF形式でダウンロード (1380K) -
Louis DESBIENS, Pascal DELADURANTAYE, Alain COURNOYER, David GAY, Cla ...2013 年 41 巻 9 号 p. 691-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスOptical fiber amplifiers used in a MOPA architecture open up a lot of possibilities for developing flexible laser sources, thanks to their efficiency, their high single-pass gain, broad spectral gain bandwidth and intrinsic high beam quality and stability. Combining fiber amplifiers with advanced digital electronics, used for synchronizing and modulating high-speed signals for the generation of programmable nanosecond pulse shapes and bursts of picosecond pulses, can make remarkable laser sources offering unprecedented opportunities for the exploration of laser-matter interactions on a wide and fine scale. Those monolithic laser sources show great potential as development tools for speeding up the optimization of laser materials processing as well as sufficient maturity and robustness to be used as single, multi-role laser sources, working in industrial environment and performing multiple tasks requiring wildly varying laser parameters.抄録全体を表示PDF形式でダウンロード (688K) -
佐久間 純2013 年 41 巻 9 号 p. 697-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスDeep ultraviolet (DUV) lasers are widely used in the semiconductor industry. Photolithographic exposure tools typically employ pulsed excimer lasers operating at 10’s of Watts average power, whereas wafer- and mask-inspection applications utilize lower-power, solid-state, continuous-wave (CW) and quasi-continuous-wave (QCW) ultraviolet (UV) lasers based on nonlinear frequency conversion. In this paper, we review recent technology trends of DUV light sources developed for photomask inspection tools.抄録全体を表示PDF形式でダウンロード (2045K) -
三浦 泰祐, 遠藤 彰, MOCEK Tomáš2013 年 41 巻 9 号 p. 703-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスOverview of the HiLASE project is reported. Development of high-power, picosecond laser sources is desirable for industrial, scientifi c, and medical applications. The framework of the Research Program 1 (RP1) of the HiLASE project is to develop both the 500-mJ at 1-kHz repetition rate and the 5-mJ at 100-kHz repetition rate laser systems with 1‒2ps pulse duration based on thin disk technology. The front-end of our laser system contains a regenerative amplifi er as the fi rst stage of amplifi er chain. We are developing a high energy regenerative amplifi er and a high repetition rate regenerative amplifi er. The average power of 50-W of the high repetition rate amplifi er has been achieved at the repetition rate of 100-kHz. Also, we have obtained the output energy of 45-mJ at the repetition rate of 1-kHz from the high energy amplifi er. The measured M2 of amplifi ed beam was 1.2.抄録全体を表示PDF形式でダウンロード (2216K) -
尾松 孝茂2013 年 41 巻 9 号 p. 708-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスOptical vortex laser, showing an annular intensity profile and orbital angular momentum owing to a spiral wavefront, has a potential to be applied to various fields such as optical manipulation, super resolution microscopy, and optical telecommunication. Recently, we and our co-workers have discovered that optical vortex lasers enable us to provide chiral structured materials on nano-scale. In this paper, we review a recent progress of high power optical vortex lasers based on a fi ber and solidstate laser technologies, and we also address physical properties of chiral structured materials formed by irradiation of optical vortex lasers.抄録全体を表示PDF形式でダウンロード (2081K)
レーザーオリジナル
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Bryce SAMSON, Adrian CARTER2013 年 41 巻 9 号 p. 714-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスPower scaling of single mode Yb‐doped fiber lasers operating at around 1064 nm has now reached the 10 kW level making it suitable for a variety of high power industrial material processing applications1）. However, progress on narrow linewidth, single frequency fiber amplifiers has been much slower because of the fundamental limitations from fiber non-linearities such as stimulated Brillouin scattering (SBS) in the optical fiber. In this paper we discuss the physics of SBS, the fiber and amplifier designs that overcome this limitation and through optimization have allowed narrow linewidth fiber amplifiers to achieve output powers exceeding 1 kW for the first time. We also discuss some of the applications enabled by the latest advances in fiber technology.抄録全体を表示PDF形式でダウンロード (628K)
一般論文
レーザーオリジナル
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Kenji GOYA, Kazuhiro WATANABE2013 年 41 巻 9 号 p. 718-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスA novel optical fiber sensor has been developed using a femtosecond laser which emits single pulses of 210 fs, 3.6 μJ irradiation at a wavelength of 800 nm. Femtosecond laser machining has successfully been applied to create a bending direction sensing function in an optical fiber sensor, which has previously been impossible for conventional fiber sensors. The sensing portion of the fiber has an internal array micro-voids aligned along the optical fiber axis. The non-axisymmetric disposition of the micro-void array allows bending direction to be detected by observing increases and decreases in the light intensity propagated in the core. In this paper, the performances of fiber bending sensors are shown in terms of directional bending detection capability, sensitivity, reproducibility and laser machining conditions for sensor fabrication. A 2 mm-long sensor element gives average sensitivities of －0.08 and +0.06 dB/mm over a 5 mm displacement range for bending in opposite directions.抄録全体を表示PDF形式でダウンロード (1384K)
レーザー技術ノート
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今 亮, 中堤 基彰, FUCHS Julien, BUFFECHOUX Sebastien, AUBERT Patrick, 林 圭輔, ...2013 年 41 巻 9 号 p. 723-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスOne critical goal of ultra-intense laser applications is the achievement of an ultra-high fi eld, which has never been obtained in laboratories; this would open a new fi eld of science. To realize a high fi eld with high power lasers that are as strong as possible, extremely small f-number or fast focusing optics have been recently developed using a plasma mirror (PM) technique and introduced to high power laser systems. To optimize PM utilization, we experimentally studied the focus abilities of ultra-intense laser light with PM by measuring the focal spot and the laser light refl ectivity. Such PM surface dynamics as thermal expansion depend on the laser intensity and could become one critical factor to determine the PM performance by comparing the experimental result of focus spot with calculations of the laser light foci by a PM.抄録全体を表示PDF形式でダウンロード (527K)
レーザーレクチャー
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植田 俊彦2013 年 41 巻 9 号 p. 727-
発行日: 2013年
公開日: 2020/09/07
ジャーナル オープンアクセスPDF形式でダウンロード (1185K)
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