KOBUNSHI RONBUNSHU
Online ISSN : 1881-5685
Print ISSN : 0386-2186
ISSN-L : 0386-2186
Volume 66, Issue 3
Displaying 1-5 of 5 articles from this issue
Comprehensive Papers
  • Jun-ichi MAMIYA, Munenori YAMADA, Yumiko NAKA, Mizuho KONDO, Tomiki IK ...
    2009 Volume 66 Issue 3 Pages 79-87
    Published: 2009
    Released on J-STAGE: March 25, 2009
    JOURNAL FREE ACCESS
    An actuator is an energy transducer that can convert a variety of input energies to mechanical quantities such as displacement, strain, velocity and stress. Up to now, many types of materials have been developed as actuator materials. Polymer materials driven by light could play an important role as an efficient energy conversion system because light is an energy source that can be controlled remotely, instantly and precisely. Liquid-crystalline elastomers (LCEs) are superior soft materials that possess both LC orders and elasticity due to polymer networks. A large deformation can be generated in LCEs, such as reversible contraction and expansion, and even bending, by incorporating photochromic molecules, such as an azobenzene, with the aid of photochemical reactions of these chromophores. We summarize the recent progress of polymer materials that can convert light energy into mechanical work directly (photomechanical effect), especially photomobile polymers that show movements in all dimensions controlled by light.
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  • Nobuji SAKAI, Tanano HIRASAWA
    2009 Volume 66 Issue 3 Pages 88-96
    Published: 2009
    Released on J-STAGE: March 25, 2009
    JOURNAL FREE ACCESS
    Nanoimprint lithography has been attracted attention as a promising nano fabrication technology. Especially UV-NIL, using photo-curable resins as transcribed materials, is enable to reduce the process cost and is expected to be used for mass production. Properties required for the UV-NIL resins are classified in “basic properties” and “application properties”. In this paper, a number of evaluation methods for the resins were illustrated and the differences of seven kinds of resins are described. The basic properties contribute to the high-throughput process. Thus the release property, mechanical property and photo-curing rate were evaluated. As the release property is especially important, modified investigations have been carried out. On the other hand, the application properties vary depending on the products, being related to their function. As examples, the experimental results of thermal stability, transparency, application for roll-to-roll transcription, dry etching process and plating process were shown.
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Original Papers
  • Masaru IKEDA, Takashi SHIMEGI, Shin-ichi KURODA
    2009 Volume 66 Issue 3 Pages 97-101
    Published: 2009
    Released on J-STAGE: March 25, 2009
    JOURNAL FREE ACCESS
    Glass-like thin films were prepared by plasma enhanced chemical vapor deposition (CVD) using the atmospheric pressure cold plasma jet generated with argon as working gas fed with nitrogen bubbled tetramethoxysilane (TMOS) or hexamethyldisiloxane (HMDSO) as precursors. The temperature of substrates exposed to the plasma jet was measured and changes in plasma stability was monitored. A slight temperature raise of the substrate was observed. The larger flow of nitrogen stabilized the plasma jet at higher applied voltages, while it decreased the plasma emission intensity. The prepared thin films were analyzed by FT-IR and XPS. A glass-like thin film with a small amount of carbon (less than 10 mol%) was successfully obtained when TMOS was used as precursor and the film thickness was proportionally increased with exposure time. In a similar procedure, CVD films were deposited on cycloolefin polymer plates resulting in smooth and uniform films.
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  • Masamichi MORITA, Takuji ISHIKAWA, Tsuneo YAMASHITA, Takashi KANEMURA, ...
    2009 Volume 66 Issue 3 Pages 102-110
    Published: 2009
    Released on J-STAGE: March 25, 2009
    JOURNAL FREE ACCESS
    The effects of F Polymer, which is a unique acrylate copolymer with short fluoroalkyl chains, in fluorine lyophobic resists on lyophobic and development properties were characterized by contact angle measurements, quartz crystal micro balance (QCM) studies, and gradient shaving preparation TOF-SIMS (GSP TOF-SIMS) methods. The lyophobic resist had a good balance between lyophobic and development properties. Some segregation of F Polymer in the resist film occurred during spin coating and a segregation layer was formed with 50 nm thickness near the surface.
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  • Tomoyuki OHTAKE, Toshiaki TAKAOKA, Masaru NAKAGAWA
    2009 Volume 66 Issue 3 Pages 111-117
    Published: 2009
    Released on J-STAGE: March 25, 2009
    JOURNAL FREE ACCESS
    A graft reaction of four types of benzophenone derivatives with poly(methyl methacrylate) in a thin film state was investigated with FTIR spectroscopy and gel-permeation chromatography (GPC). The benzophenone derivatives were benzophenone (BP), 4-methoxybenzophenone (MBP), 2-decyloxy-4-methoxybenzophenone (2D4MBP), and 4-phenylbenzophenone (PBP). A thin film of PMMA containing each benzophenone derivative, spin-coated on a silicon wafer, was exposed to ultraviolet light (UV) of 313 and 365 nm emitting from an Hg lamp. The photochemical reaction of the benzophenone derivative was monitored by the decrease of the characteristic absorption band of its carbonyl symmetrical vibration (νC=O) with FTIR spectroscopy. The photochemical reaction during the UV-exposure decreased in the order of 2D4MBP>MBP>BP, which is well correlated to their molecular absorption coefficient at 313 nm. PBP gave the lowest decrease rate, because excitation state of PBP was different from others. GPC analysis revealed the generation of a photo-induced graft-product of each benzophenone derivative except PBP with PMMA. The order of generating the graft-product was BP>MBP>2D4MBP. These results led us to the conclusion that benzophenone (BP) is the most reactive for graft-product generation and 4-methoxybenzophenone (MBP) gave the most graft-product with PMMA at the lowest UV-exposure dose.
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