There are two surface analytical techniques as representatives of electron spectroscopy. These are X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES).
In XPS, the sample is illuminated with X-rays which excite photoelectrons from the surface. A major advantage of this technique is not only indentification of elements but also investigation of chemical states of the surface atoms.
In AES, a beam of electrons is used to excite Auger electrons from the surface. Since electron beams can be focused into fine spots, scanning electron microscope techniques can be used to obtain an image of the region under analysis. This technique is also well suited to depth profiling.
Recently, spatial resolution in both techniques advanced, that of XPS is 10μm range and that of AES is 10nm range.
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