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Takeshi Morita, Jens Twiefel
Session ID: B15
Published: 2008
Released on J-STAGE: September 03, 2008
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Masato Nishikara, Hitoshi Kihara, Tatsuyuki Nakagawa, Kentaro Nakamura
Session ID: B16
Published: 2008
Released on J-STAGE: September 03, 2008
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Development of transportation unit with derailment prevention capability
Tomohiko Sekiguchi, Akira Kyusojin, Hiromi Isobe
Session ID: B17
Published: 2008
Released on J-STAGE: September 03, 2008
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In recent years, plane substrates and semiconductor wafers become larger year by year. Therefore, some problems occur such as fracture and stain of substrates under conventional contact transportation. In order to solve these problems, a new non-contact transportation technology is proposed in this study. The substrates are levitated by an aerostatic force and transported by the acoustic viscous force by the traveling wave of flexure stator deformation. In this paper, transportation unit with derailment prevention capability is proposed and experimental results are presented.
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Yoichi Kadota, Mutsuo Ishikawa, Hiroshi Hosaka, Takeshi Morita
Session ID: B18
Published: 2008
Released on J-STAGE: September 03, 2008
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Yasumasa Kyodo
Session ID: B19
Published: 2008
Released on J-STAGE: September 03, 2008
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Accurate control method for Langevin typed ultrasonic vibrator has been just achieved. In this development, the behavior of phase difference between voltage and current of piezoelectric device is applied to keep the state of resonance, which was formally proposed by the author in the field of ultrasonic motors. High power piezoelectric devices usually require pulse driven MOSFET in order to obtain high efficiency. However, its process tends to generate a lot of noise compared with sinusoidal wave driving. The experimental result shows the availability of the method in case of pulse driving.
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Tsuyoshi Takemura, Manabu Aoyagi, Takehiro Takano, Hideki Tamura, Yosh ...
Session ID: B21
Published: 2008
Released on J-STAGE: September 03, 2008
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Sheng Wang, Dongming Sun, Seiichi Hata, Akira Shimokohbe
Session ID: B22
Published: 2008
Released on J-STAGE: September 03, 2008
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The standing wave type cylindrical ultrasonic linear microactuator (CULM) is introduced in this paper, including the structure of the CULM, the driving principle and the experiments of CULM. CULM is composed by a hollow cylindrical stator and a slider pipe which is loaded on the outsider of the stator, whose size is about 2mm in diameter and 12 mm in length. The cylindrical stator is consisted of a hollow cylindrical piezoelectric ceramic pipe (PZT pipe) and an elastic material-thin film metallic glass pipe (TFMG pipe) on the surface of the PZT pipe. The PZT pipe has 2 inner electrodes. Using properly selected driving signals loaded on these electrodes, the TFMG pipe would vibrates in r direction while the PZT pipe vibrates in z direction, these two direction vibrations compose an elliptical motion, which drives the slider pipe to move linearly in axial direction. The driving principle of CULM is simulated using FEM software, getting the elliptical motion. In experiments, the linear motion of the slider pipe is observed. The motion of the slider pipe driven by the elliptical motion is identified, measured and compared with the simulation results.
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Dongming Sun, Sheng Wang, Seiichi Hata, Akira Shimokohbe
Session ID: B23
Published: 2008
Released on J-STAGE: September 03, 2008
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The miniaturization of the cylindrical ultrasonic linear microactuator (CULM) is introduced. The length and diameter of the stator are 10 and 1.5mm, respectively. In the driving mechanism, the fourth eigen mode of PZT pipe is used, and inner electrode of PZT pipe is separated into three parts. The stator consists of a cylindrical piezoelectric ceramic element (PZT) and elastic material - thin film metallic glass (TFMG). The vibration on PZT surface is amplified by elastic material under the actuating voltage at the resonance frequency. The rotor, a stainless pipe with high precision, can be driven to move linearly by the friction generated in the interface between stator and rotor. The experimental process is described in detailed, and the vibration characteristics of the stator are investigated using Laser Doppler Vibrometer system. Furthermore, the performance of the prototype is evaluated.
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Tomoaki Mashimo, Shigeki Tohyama
Session ID: B24
Published: 2008
Released on J-STAGE: September 03, 2008
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We report a rotary-linear piezoelectric actuator using a 3.5mm cubic stator. The stator has been fabricated of a metal rectangular solid and a through-hole. The stator generates vibration modes at the resonant frequencies and generates rotary or linear motion of a shaft which is inserted to the through-hole. This study describes the principle the translational motion and clarifies how to design the stator, using finite element methods (FEM). New TR Motor was developed by the simulation, and the principle and design method was verified by an experiment.
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Clear Up Principle of Motor Driving
Terunao Hirota, Kenji Makita, Tadashi Moriya, Yuji Furukawa
Session ID: B25
Published: 2008
Released on J-STAGE: September 03, 2008
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Kazuya Tsujimoto, Shinji Miura, Akira Tsumaya, Toshiharu Taura
Session ID: B31
Published: 2008
Released on J-STAGE: September 03, 2008
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Taiga Higuchi, Satoshi Kanai
Session ID: B32
Published: 2008
Released on J-STAGE: September 03, 2008
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Yui Endo, Satoshi Kanai, Takeshi Kishinami, Natsuki Miyata, Makiko Kou ...
Session ID: B33
Published: 2008
Released on J-STAGE: September 03, 2008
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Toshiki Hirogaki, Eiichi Aoyama, Keiji Ogawa, Tomohiro Shiomi, Masaki ...
Session ID: B34
Published: 2008
Released on J-STAGE: September 03, 2008
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Shin'ichi Agari, Makoto Fujisawa, Kenjiro/T. Miura
Session ID: B36
Published: 2008
Released on J-STAGE: September 03, 2008
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Kazuhiro Uchida, Shin'ichi Agari, Yohei Kawata, Makoto Fujisawa, Kenji ...
Session ID: B37
Published: 2008
Released on J-STAGE: September 03, 2008
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Norimasa Yoshida, Takafumi Saito, Toshinobu Harada
Session ID: B38
Published: 2008
Released on J-STAGE: September 03, 2008
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This paper clarifies the overall shapes of log-aesthetic curves. Log-aesthetic curves are curves whose logarithmic curvature graph and logarithmic torsion graph are both linear. We classify the overall shapes of log-aesthetic space curves depending on the arc length, the behavior of the tangent and binormal vectors, and the radius of curvature and radius of torsion at the bound of arc length.
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Primitive Creation
Kouichi Matsuzaki, Hiromasa Suzuki
Session ID: B39
Published: 2008
Released on J-STAGE: September 03, 2008
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Elimination of the mis-extracted edges
Tetsuo Oya, Masatake Higashi
Session ID: B43
Published: 2008
Released on J-STAGE: September 03, 2008
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Data structure for variation of car types
Hiroshi Kato, Tetsuo Oya, Masatake Higashi
Session ID: B44
Published: 2008
Released on J-STAGE: September 03, 2008
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Improvement of the method of generating a ruler-surface
Tetsuo Oya, Masatake Higashi
Session ID: B45
Published: 2008
Released on J-STAGE: September 03, 2008
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Satoshi Nakatsuka, Hideki Aoyama
Session ID: B46
Published: 2008
Released on J-STAGE: September 03, 2008
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Kei Shibasaki, Hideki Aoyama
Session ID: B47
Published: 2008
Released on J-STAGE: September 03, 2008
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Wood grain textures used for products are generated from pictures of cut sections of real trees. In order to get many types of texture patterns, many trees must be cut and the generated patterns are limited. This study supports wood grain texture design by generating many types of patterns with cut of digital trees which are grown in a computer as digital models.
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Motohisa Takanosu, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsu ...
Session ID: B61
Published: 2008
Released on J-STAGE: September 03, 2008
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Haruhisa Sakamoto, Akihito Ishii, Shinji Shimizu
Session ID: B62
Published: 2008
Released on J-STAGE: September 03, 2008
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Sethapon Sintrakarnpon, Yoshihiko Murakami, Osamu Horiuchi, Mitsuyoshi ...
Session ID: B63
Published: 2008
Released on J-STAGE: September 03, 2008
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In micro milling, it is difficult to measure cutting force. Therefore, for keeping tool life, accuracy and surface roughness of work materials, the cutting conditions tend to be not found. In this report as the first step, 3 dimensions cutting force by the end mill under mm and optimum cutting condition will be established.
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Takashi Matsumura, Hideyuki Ozawa, Takenori Ohno
Session ID: B64
Published: 2008
Released on J-STAGE: September 03, 2008
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The tool displacement induces the large undeformed chip thickness in milling with small diameter tools, which have low stiffness. Brittle fracture occurs in cutting of glass in a large undeformed chip thickness. Therefore, the tool displacement has an influence on brittle facture. This study discusses the influence of the stiffness of the tool on brittle fracture. The cutting experiment with changing the shank geometry of the milling tool is performed to show that the maximum feed rate in cutting of glass without brittle fracture increases with the stiffness of the tool.
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Naoto Ikeda, Yoshikazu Kobayashi, Kenji Shirai, Kouichi Tozawa
Session ID: B66
Published: 2008
Released on J-STAGE: September 03, 2008
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The purpose of this study is to evaluate the machining accuracy for high-precise surface texture generation. In basic experiments, measurement and evaluation of metal surface machined in end milling were carried out. The surface of S50C work material was machined by a square end mill, and machining difference surface roughness were measured using a scanning white light interferometer. From the data, features of the planar shape based on the influence of the tool and machining chips in flat machining were analyzed, and evaluation for higher precision was carried out.
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Shunsuke Iso, Yoshikazu Kobayashi, Kenji Shirai, Kouichi Tozawa
Session ID: B67
Published: 2008
Released on J-STAGE: September 03, 2008
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The purpose of this study is to improve the accuracy of surface texture by correcting machining errors occurring in end milling, focusing on tool bending. We developed a system for predicting the degree of fluctuation in shape accuracy caused by tool bending during end milling. For this reason, we proposed a method which can be applied to the CAM system, taking into consideration the bending of the tool holder, etc. This report outlines the tool and discusses the method of predicting surface texture accuracy.
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Teppei Nebuka, Hidetake Tanaka, Kazuhisa Yanagi
Session ID: B68
Published: 2008
Released on J-STAGE: September 03, 2008
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To study the relation between milling operation and surface texture is useful for high-precision machining technology. In this study, A model for prediction of surface texture considering tool deflection, tool run-out and cutting edge profile and measurement instruments of tool run-out trajectory and cutting edge profile by optical method are developed. The relation between surface texture and tool run-out trajectory, cutting edge profile and tool deflection is investigated from the viewpoint of both analysis and experiment.
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Unkai Sato, Toshikazu Takenouchi, Hiroshi Hara, Takao Yamazaki
Session ID: B69
Published: 2008
Released on J-STAGE: September 03, 2008
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In this study, it developed the cutting process with electrolytically-reduced water to improve in the cleanliness of the cutting surface of the oxygen-free copper material. That is, it used electrolytically-reduced water of dilute sodium chloride solution for the replacement of cutting fluids (both water-miscible and water-immiscible) which has the possibility to pollute a cut surface. Almost, it processed an oxygen-free copper material with the end milling using electrolytically-reduced water, the dry process cut and cutting fluids. Next, it analyzed about the cleanliness in the cutting surface. As the results, the cleanliness of the cutting surface by electrolytically-reduced water is the best.
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Susumu Nishida, Keiji Ogawa, Heisaburo Nakagawa, Yoshiaki Kakino, Kats ...
Session ID: B73
Published: 2008
Released on J-STAGE: September 03, 2008
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This paper describes studies on the failure of (Al,Ti)N coated sintered carbide ball end mill cutters used for the machining of hardened steel SKD11(HRC60) which has fairly large, very hard particles in the material. Theoretical analyses and a lot of cutting test are conducted. In the cutting tests all cutters had fatal failures at the boundary area, because real depth of cut at this area is extremely thin and chip generations are not so stable that these very hard particles cut the tool materials. Large pick feed distance and feed per a blade at high cutting speed produced very short tool lives. The longest tool life was obtained at the cutting of 15deg.work inclination angle.
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Masashi Yamanaka, Keigo Sugimoto, Katsumi Inoue
Session ID: B74
Published: 2008
Released on J-STAGE: September 03, 2008
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Daisuke Igarashi, Hiroyuki Sasahara, Souhei Shimojo, Hisayoshi Ito
Session ID: B75
Published: 2008
Released on J-STAGE: September 03, 2008
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Effect of diameter of ball nose end mills on the drilling accuracy
Shigehiko Sakamoto, Yusuke Kajiwara, Keisuke Higashinicho, Yuuki Arima
Session ID: B76
Published: 2008
Released on J-STAGE: September 03, 2008
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Koji Teramoto
Session ID: B78
Published: 2008
Released on J-STAGE: September 03, 2008
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The objective of this research is to investigate the small-batch size fabrication of the low-rigidity parts. Because of the utility in usual machine shop, end milling with non-dedicated fixture is employed to realize the objective. In this paper, a framework for the small-batch size endmilling is proposed. In the framework, three important functionalities are focused: workholding planning, workholding inspection and operation planning. The paper also described the details and investigation of the functionalities.
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Hiroshi Hasegawa, Shingo Nakamura, Yoshihiro Ohnishi, Takahiro Serigan ...
Session ID: B79
Published: 2008
Released on J-STAGE: September 03, 2008
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In this study, a drilling process is executed by AdvantEdge that is FEM simulation software. And, we compared its result with experimental result. We considered about result's difference in cutting condition, intended mainly at torque, thrust power and cutting chips. Finally, we described our observations about variability effect of model development or simulation method.
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Hirohisa Narita, Hideo Fujimoto
Session ID: B80
Published: 2008
Released on J-STAGE: September 03, 2008
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Influence of hydrogen content on DLC film quality
Kazushi Minaki, Koichi Kitajima, Yu Nakahira, Nobuhiko Shima, Takashi ...
Session ID: B81
Published: 2008
Released on J-STAGE: September 03, 2008
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Coating tools have been developed for the purpose of high cutting accuracy, high cutting surface accuracy and extension of tool life now. However, conventional coating tools have a high affinity for ductile materials, like aluminum alloy, so cutting chips tend to adhere to cutting edge and work material surface. Therefore, Chipping causes and surface texture is degraded. In order to solve these problems, recently, DLC (Diamond-Like-Carbon) has been applied to coating material. In this research, it is curried out cutting of Aluminum alloy by the use of DLC coating tool, and examined influence of DLC coating conditions on cutting characteristics. We have proposed that it carried out hydrogen ion bombardment technique for realization of high hardness and low resistance cutting tool. As a result of cutting test by the use of this tool, it is cleared that cutting resistance decreases and surface roughness improves.
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Tatsuyuki Saito
Session ID: C01
Published: 2008
Released on J-STAGE: September 03, 2008
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Akira Fukuda, Tetsuo Fukuda, Hirokuni Hiyama, Manabu Tsujimura, Toshir ...
Session ID: C03
Published: 2008
Released on J-STAGE: September 03, 2008
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Optimum wafer edge profile for uniform removal rate near wafer edge in STI-CMP process was investigated. The distribution of removal rate was estimated by calculating the contact pressure on wafer surface using FEM analysis. As a result, shortening the edge width is confirmed to achieve flatter distribution of removal rate near the wafer edge. To meet the specification for the generation of hp=36nm with 1.5mm edge exclusion, the edge width would be reduced to 250um in case of ROA being 100nm.
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Nobutaka Sumomogi, Keiichi Kimura, Panart Khajornrungruang, Kazuki Uen ...
Session ID: C04
Published: 2008
Released on J-STAGE: September 03, 2008
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Shuhei Yamada, Masahiro Ito, Shogaku Ide, Kazusei Tamai, Yutaka Inoue, ...
Session ID: C05
Published: 2008
Released on J-STAGE: September 03, 2008
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Takuo Toyofuku, Katsuya Nagayama, Keiichi Kimura, Kazuhiro Tanaka
Session ID: C07
Published: 2008
Released on J-STAGE: September 03, 2008
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Kazusei Tamai, Hitoshi Morinaga
Session ID: C08
Published: 2008
Released on J-STAGE: September 03, 2008
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The CMP is made up of continuous friction between abrasive, pad and work. The energy from the polishing tool will be changed to the abrasion energy through the abrasive and pad. Abrasion energy gives heat energy. And the heat energy will be divided into heat loss and the promotion energy of chemical etching. In this study, the chemical and mechanical factor analysis for CMP process has been tried by monitoring platen motor current and pad surface temperature.
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The investigation into the influence of pad conditioning on the Cu-CMP
Kazunori Kadomura, Toshio Fukunishi, Kazumasa Kuriduka, Yoji Umezaki, ...
Session ID: C09
Published: 2008
Released on J-STAGE: September 03, 2008
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As the basic research for the pad conditioning by the diamond conditioner on the Cu-CMP, relationship between the pad surface function, which was ground by the diamond pad conditioner, and the polishing rate was investigated. Correlating the pad surface functions using various types of diamond pad conditioner and the polishing propaties of the Cu layer, the optimum conditions for the pad conditioning on the Cu-CMP were discussed.
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Fine conditioning performance by flexible fiber conditioner
Takashi Fujita, Akihiko Kurihara, Toshiro Doi
Session ID: C10
Published: 2008
Released on J-STAGE: September 03, 2008
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Hitoshi Morinaga, Kazusei Tamai
Session ID: C14
Published: 2008
Released on J-STAGE: September 03, 2008
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Correlation between thickness probability calculated from roughness carve and polishing behavior
Maiko Oshida, Koichi Yoshida, Masaharu Kinoshita
Session ID: C16
Published: 2008
Released on J-STAGE: September 03, 2008
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Ra, Rpk, and Rvk are adopted generally as reference index for surface roughness evaluation of Polishing pad. On the other hand, new technique has been reported to evaluate surface condition of CMP polishing pad circumstantially that calculate thickness probability from roughness carve. Surface condition of polishing pad is extremely important for Silicon polishing which is more mechanical process. This presentation is about introduction of new technology for Silicon polishing pad and correlation between the result and polishing itself.
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KEIJI MIYACHI, YOSHIYUKI SEIKE, YOSHINORI KOBAYASHI, HIROYUKI YAMAMOTO ...
Session ID: C17
Published: 2008
Released on J-STAGE: September 03, 2008
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This report refers to, as a part of study to explicate relation between particles' movement and cleaning efficiency in spray cleaning tool, an experiment to see cleaning efficiency of two fluids spray using glass board on which polystyrene latex spheres are applied. For a comparison purpose, the same cleaning test was conducted for high pressure micro jet system, another cleaning tool also using spray. As the result, it was found that each of these two types of spray has its own characteristics caused by its construction, that is, the cleaning efficiency of two fluids spray depends more largely on distance between the spray nozzle and glass plate and distance from nozzle movement locus.
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