Proceedings of JSPE Semestrial Meeting

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2014 JSPE Spring Conference

Displaying 151-200 of 651 articles from this issue

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[title in Japanese]

Tatsuki Yokoyama, Tsuyoshi Tokunaga, Sho Morita, Chiharu Murase

Session ID: D33
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_301

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Study on Nano-Stereolithography Using Evanescent Wave (18th report)

Experiments of Fabricating by Using Integrated Exposure of Propagating Light and Evanescent Light

Kodai Miyakawa, Hiroyuki Tahara, Satoru Takahashi, Kiyoshi Takamasu

Session ID: D34
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_303

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Yutaro Itagaki, Kentaro Hara, Toshiki Niino

Session ID: D36
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_305

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Kentaro Hara, Yutaro Itagaki, Toshiki Niino

Session ID: D37
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_307

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[title in Japanese]

Takashi Uehara, Kentaro Hara, Toshiki Niino

Session ID: D38
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_309

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[title in Japanese]

Yohei Horimoto, Toshiki Niino

Session ID: D39
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_311

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Study on drilling of Printed Circuit Board by micro drill

Effect of copper layer of PCB on drilling performance

Taiju Yamashita, Shunsuke Aikawa, Hiromi Yoshimura, Kota Tachibana

Session ID: D43
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_313

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Kouta Suzuki, Mitsuyoshi Nomura, Wu Yongbo, Masakazu Fujimoto

Session ID: D44
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_315

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Shoichi Tamura, Hiroyasu Kondo, Yuichi Nakano, Takashi Matsumura

Session ID: D45
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_317

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Development of a Laser-Guided Deep-Small-Size Hole Measurement System

Factors to cause Measurement errors

Akio Katsuki, Takao Sajima, Hiroshi Murakami, Hazrat Ali MD, Osamu Ohn ...

Session ID: D46
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_319

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[title in Japanese]

Takahiro Kidokoro, Jiwang Yan

Session ID: D61
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_321

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Bonding of stainless steel at low temperatures and pressures with iron insert piece.

Yuki Kitamura, Yuko Aono, Atsushi Hirata

Session ID: D62
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_323

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Kaori Nakasuji, Yuuji Miyagawa, Tetsuo Yumoto, Ryou Ogawa, Takayuki Mi ...

Session ID: D63
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_325

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Ken Hasegawa, Naoki Asakawa, Masato Okada, Keigo Takasugi, Hidetake Ta ...

Session ID: D64
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_327

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Study on the Shape Error in Cylindrical Traverse Grinding of the Long Workpiece

Takashi Onishi, Takuya Kodani, Kazuhito Ohashi, Daisuke Matsubara, Mor ...

Session ID: D73
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_329

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Feed control based on prediction of workpiece deflection in grinding

Verification of a control logic and estimation of workpiece stiffness

Makoto Tano, Masashi Yoritsune, Toshiki Sakai, Shinji Murakami

Session ID: D74
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_331

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[title in Japanese]

Keigo Nakae, Nagatoshi Nakatsuka, Yudai Hirai, Hiroyuki Sasahara

Session ID: D75
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_333

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Modeling of the fixed abrasive diamond wheel structure

Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima

Session ID: D77
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_335

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Recently, Recently, diamond wheels with rotary in-feed face grinding mechanism are often used for wafer grinding in the thinning process or the planarization process, such as Si wafers, sapphire wafers and SiC wafers. The wafer grinding by use of a diamond grinding wheel is required to create a high-quality wafer surface. In general, it is known that the grinding performance of the grinding wheel is determined by the grinding wheel composition and grinding conditions. Especially, the cutting edge distribution of the grinding wheel working surface a significant effect on grinding force and surface roughness. In this study, we aim to understanding of the three-dimensional distribution of grains on diamond wheel working surface, from modeling of the fixed abrasive diamond wheel structure.

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Development of High-efficiency Mirror Grinding System

Hideo Shibutani, Tsubasa Ono, Jun-ichi Ikeno

Session ID: D78
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_337

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[title in Japanese]

Yoshifumi Takasu, Masahiro Kubo, Toshihiko Wada, Shinsaku Osawa, Keita ...

Session ID: D79
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_339

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[title in Japanese]

Takeshi Kobayashi

Session ID: E01
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_341

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The Fabrication Technology for PZT Thin Film Devices on 200 mm wafers

Nobuyoshi Moriwaki, Takeshi Kobayashi, Natsumi Makimoto, Yasuhiro Suzu ...

Session ID: E03
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_343

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[title in Japanese]

Yoshiyuki Kaiho, Hidetoshi Takahashi, Yutaka Tomimatsu, Takeshi Kobaya ...

Session ID: E04
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_345

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Preparation of the high-density capacitors and its handling technology using self-assembled monolayer

Yuki Amano, Beomjoon Kim, Masaaki Ichiki

Session ID: E06
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_347

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Development of a flexible current sensor by screen printing technology

Takahiro Yamashita, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda

Session ID: E07
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_349

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Riko Shohara, Keisuke Nagato, /Ken Takahashi, Daisuke Suehiro, Tetsuya ...

Session ID: E08
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_351

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Yoshihiro Ishikawa, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi

Session ID: E09
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_353

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Bending and Fatigue Behavior of Single Crystal Si

Kazuya Kurata, Makoto Takagi, Akihito Matsumuro, Hiroyuki Iwata, Hiroy ...

Session ID: E13
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_355

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Fully Monolithically Fabricated Si One-chip Miniature Fuel Cell

Formation of the electrolyte layer by polymerization

Hirotoshi Mizuno, Takahiro Suzuki, Takeo Yamaguchi, Masanori Hayase

Session ID: E14
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_357

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Chip to wafer self-alignment by using a hybrid chip dicing process for size-free MEMS-IC integration

Hiroyuki Kuwabara, Yuuta Nakano, Jian Lu, Hideki Takagi, Masanori Haya ...

Session ID: E15
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_359

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Self-alignment of MEMS or IC chips onto carrier wafer with high accuracy is one the most essential steps to size-free MEMS-IC integration. In our previous works, we have found that the chip diced by Deep-RIE exhibits preferred high alignment accuracy, while the chips diced by blade always suffers from miss-alignment. In this paper, to avoid expensive and time-consuming Deep-RIE process, high speed camera was applied to study the self-alignment phenomena when the chips were diced by Deep-RIE or blade. Based on above results, an improved chip-dicing approach was proposed by using Deep-RIE to precisely define the chip size and using FDTS-coating to improve hydrophobic properties of chip cross-section surface. High-speed (<0.08s) and high accurate self-alignment (<1μm) was therefore successfully achieved by using chips obtained by blade dicing.

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[title in Japanese]

Koji Okazaki, Kentaro Ikeda, Noriaki Ishikawa, Renshi Sawada

Session ID: E16
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_361

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Fabrication and Characteristics of a Monolithically Micro Displacement Sensor

Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Ren ...

Session ID: E18
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_363

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Michitaka Yamamoto, Eiji Higurashi, Tadatomo Suga, Renshi Sawada

Session ID: E19
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_365

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Formic Acid Treatment for Low Temperature Bonding of Copper and Silver Substrates

Kentaro Abe, Masahisa Fujino, Masatake Akaike, Tadatomo Suga

Session ID: E20
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_367

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Genki Kono, Masahisa Fujino, Daiji Yamashita, Kentaroh Watanabe, Masak ...

Session ID: E21
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_369

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Matching of Indoor Laser-scanned Point Clouds with Difference Points to BIM Components by RANSAC and Vertex Type Classification

Shinya Yamaoka, Satoshi Kanai, Hiroaki Date

Session ID: E31
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_371

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Cyber-field construction of a forest with 3D laser scanner

Hiroyuki Nakamura

Session ID: E32
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_373

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[title in Japanese]

Tsubasa Maruyama, Satoshi Kanai, Hiroaki Date

Session ID: E33
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_375

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Kenta Fukano, Hiroshi Masuda

Session ID: E34
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_377

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Kazuma Nitta, Hiroaki Date, Satoshi Kanai

Session ID: E36
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_379

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Ryuji Miyazaki, Makoto Yamamoto, Yasunori Kanetaka

Session ID: E37
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_381

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Shogo Oguri, Hiroshi Masuda

Session ID: E38
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_383

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Shungo Takai, Hiroaki Date, Satoshi Kanai, Yasuhito Niina, Kazuo Oda, ...

Session ID: E39
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_385

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Kazuaki Kawashima, Satoshi Kanai, Hiroaki Date, Shinya Yamanishi

Session ID: E43
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_387

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Ryo Matsuoka, Hiroshi Masuda

Session ID: E44
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_389

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Automatic Generation of Integrated Point Cloud Model of Large Scale Environment

Automatic registration of multiple point clouds based on pair-wise registration and matching judgment

Yusuke Matsuyama, Hiroaki Date, Satoshi Kanai

Session ID: E45
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_391

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[title in Japanese]

Takeru Niwa, Hiroshi Masuda

Session ID: E46
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_393

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[title in Japanese]

Masaru Nakano

Session ID: E61
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_395

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Yoshinari Okumura, Satoshi Shimada, Taiki Ogata, Nariaki Nishino, Jun ...

Session ID: E62
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_397

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Proposal of a Comfort Model for Optimal Design of Demand Response

Keita Muto, Ken Kawase, Jyunya Shindo, Yutaro Nemoto, Koji Kimita, Fum ...

Session ID: E63
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_399

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