In order to study the mechanism of H
- production caused by hydrogen discharges and the dependence of H
- production on plasma parameters, a comprehensive model is presented. The model considers important processes for the production of both H
- and positive ions. A set of particle balance equations in a steady state hydrogen plasma is solved numerically. The calculated results have confirmed that H
- ions are generated by dissociative attachment to highly vibrationally excited hydrogen molecules (vibrational level v ″= 5-10) and these molecules are produced by electrons with energies in excess of 30 eV.
View full abstract