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Displaying 351-400 of 676 articles from this issue
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Step measurement using double laser optical heterodyne interferometer
[in Japanese], [in Japanese]
Session ID: H06
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.435.0
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Multi Surface Interferometry Using a Wavelength Scanning Interferometer
Ryohei Hanayama, Kenichi Hibino, Jan Burke, Bozenko F. Oreb, Shin'ichi ...
Session ID: H07
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.436.0
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(833K)
Development of Non-Contact Measuring System for Machined Surface by Laser Displacement Sensor and Coordinate Measuring Machine
[in Japanese], [in Japanese], [in Japanese]
Session ID: H08
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.437.0
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(116K)
Development of ultra precise gear measuring instruments
Hiroomi Ogasawara, Noritsugu Maeda, Masato Ogasawara, Yoshiharu Shibuy ...
Session ID: H09
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.438.0
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Characterization of Shape Memory Behavior of Ti-Ni Alloy Thin Films Prepared by dc Magnetron Sputtering
Shozo Inoue, Yusuke Ozawa, Akihiro Hirayama, Takahiro Namazu, Keiji Ko ...
Session ID: H13
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.440.0
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High-rate Deposition of SiNx Films by Atmospheric Pressure Plasma CVD -Optical Emission Spectroscopy of the Deposition Plasma-
[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...
Session ID: H14
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.441.0
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Mechanical properties of diamond like carbon film coated by focused ion beam chemical vapor deposition method
Takahiro Yagi, Yasuo Kogo, Jun Taniguchi, Iwao Miyamoto, Kiyoshi Shino ...
Session ID: H15
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.442.0
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Development of Micro-Parts by use of FIB Technique
Akira Tanji, Masashi Yanagisawa, Sadao Takeuchi, Hiroyuki Noguchi, Ken ...
Session ID: H16
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.443.0
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(480K)
Development of Parametric CAD for Generation of a Surface Texture
[in Japanese], [in Japanese], [in Japanese]
Session ID: H18
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.445.0
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Three-Dimensional Motif Analysis of Surface Topography
Yoshiyuki Tsuganezawa, Seiichiro Hara, Kazuyuki Sasajima
Session ID: H19
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.446.0
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Self-Assembly of Fine Particles with the Aid of Patterned-Wettability (2nd report)
[in Japanese], [in Japanese], [in Japanese]
Session ID: H20
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.447.0
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(680K)
Low-temperature catalytic synthesis of carbon onions and evaluation of its solid lubricant property
[in Japanese], [in Japanese]
Session ID: H21
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.448.0
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(185K)
Variation of microstructure in thin film controlled residual stress by substrate vibration method.
Takamasa Suzuki, Akihito Matsumuro, Yutaka Takahashi
Session ID: H23
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.450.0
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(926K)
Mechanical Properties of Boron Containing Thin Films Prepared by Magnetron Suputtering Method
[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...
Session ID: H24
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.451.0
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(88K)
Study on Clearing of the Micro Clack Using RIE -Visualization of the Micro Crack Using RIE
Seiichi Yokomizo, Shinichirou Kubota, Yoshiyuki Uno
Session ID: H25
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.452.0
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Study on Clearing of the Micro Clack Using RIE - The Improvement in Shape Quality of the Micro Crack Cleared by RIE
Seiichi Yokomizo, Shinichirou Kubota, Yoshiyuki Uno
Session ID: H26
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.453.0
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[title in Japanese]
[in Japanese]
Session ID: H30
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.455.0
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(83K)
Development of High Speed Machining Technology for Elevator Guide Rails
Hideaki Onozuka, Keii Ueno, Yukio Maeda, Shigeaki Kikuchi, Yukihisa Ko ...
Session ID: H31
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.456.0
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Development of New-Style cBN Ball-Nosed End Mill (2nd report)
Isamu Goto, Takeshi Watanabe, Takashi Goto, Masahiko Jin, Masao Muraka ...
Session ID: H32
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.457.0
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(77K)
Tool Life Improvement and Machining Stabilization by Means of Magnetic Field Assisted Polishing on Ball End Cutting Edge
Yi Lu, Yoshimi Takeuchi, Ichiro Takahashi, Masahiro Anzai
Session ID: H33
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.458.0
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(312K)
Fundamental Study on Process of Small Radius End Milling Using Ultra-High Speed Air Turbine Spindle
Norikazu Baba, Jun-ichiro Takagi, Meng Liu
Session ID: H34
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.459.0
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(72K)
Progress of Wear in end milling of difficult to cut materials
Katsuhiko Sekiya, Yasuo Yamane, Rie Yamada
Session ID: H36
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.461.0
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(999K)
Analysis of Chatter Stability Limits in End-Milling
Eiji Shamoto, Norikazu Suzuki, Hiromi Suzuki, Gyouken Se, Atsushi Inou ...
Session ID: H37
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.462.0
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(627K)
Study on Ultrasonic Milling (9th report)
Masahiko Jin, Hidenari Kanai, Shinjiro Yamada, Masao Murakawa
Session ID: H38
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.463.0
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(118K)
Optimization of P-Voxel Representaion Method For High Speed Estimation of Cutting Force
Jun'ichi Kaneko, Koji Teramoto, Masahiko Onosato, Yoshimi Takeuchi
Session ID: H39
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.464.0
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(405K)
Direct engraving processing of super-hard alloy material and practical use
Masahiko Fukui, Katsuya Taguchi
Session ID: H50
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.466.0
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(106K)
Ball Burnishing of Three Dimensional Shapes
Sachiko Fuse, Ichiro Takahashi, Masahiro Anzai
Session ID: H51
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.467.0
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it is based on the method proposal of scratch processing, and the method proposal of multi-axis processing -- precise -- a metallic mold -- realization of processing, and development
[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japane ...
Session ID: H52
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.468.0
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Applying the non-rotational cutting method using multi axes machine at finishing metal molds.
Masafumi Yoshimaru, Hiroshi Suzuki, Hiroyuki Narahara, Hiroshi Koresaw ...
Session ID: H53
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.469.0
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(604K)
Application of the non-rotational cutting method in the cylindrical form metal.
Yuuki Tanigawa, Hiroshi Suzuki, Hiroyuki Narahara, Hiroshi Koresawa
Session ID: H54
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.470.0
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(773K)
[title in Japanese]
[in Japanese]
Session ID: H64
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.472.0
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(39K)
The PIEZO Semiconductor Pressure Sensor Using SOI Structure
Hirokazu Niitsu, Tetsuya Takahashi, Tsutomu Yamada, Yasushiro Nishioka ...
Session ID: H66
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.473.0
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(95K)
Development of silicone microphon using the SOI processes
Tetsuya Takahashi, Hirokazu Niitsu, Tsutomu Yamada, Yasushiro Nishioka ...
Session ID: H67
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.474.0
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(104K)
A Study of electro statically driven wineglass-mode resonators.
Tsutomu Yamada, Tetsuya Takahashi, Hirokazu Niitsu, Yasushio Nishioka, ...
Session ID: H68
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.475.0
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(154K)
Development of a vacuum sensor using SCREAM process for measuring pressures of sealed cavities
Hironao Okada, Toshihiro Itoh, Tadatomo Suga
Session ID: H69
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.476.0
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(203K)
Development of large area deep x-ray lithography system
Yuichi Utsumi, Takefumi kishimoto, Harutaka Mekaru, Tadashi Hattori
Session ID: H73
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.478.0
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(67K)
Fabrication of LIGA Mold Master for Spiral Micro-Coil Using 3D X-Ray Lithography
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu ...
Session ID: H74
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.479.0
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Production of a metal mold with high aspect ratio and fine patterns
Yuta Shimada, Yasusiro Nishioka, Masaharu Takahashi, Yoichi Murakoshi, ...
Session ID: H75
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.480.0
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(94K)
Micro/Nano 3D Structuring of Glassy Carbon by FIB for Hot Embossing of Glass Materials
Masaharu Takahashi, Yoichi Murakoshi, Ryutaro Maeda, Kohichi Sugimoto
Session ID: H76
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.481.0
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Development of Ultra Precision Dies for Hot Press Forming of Micro Optical Lens – Focused Ion Beam machining properties of GC and Ni-P Dies
Hiroaki Ito, Kohshi Ito, Masahiro Arai, Koh-ichi Sugimoto, Toshiaki Ma ...
Session ID: H77
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.482.0
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(86K)
Mechanical Property Evaluation of Poly-crystallne TiN Films by XRD Tensile Test for Surface Modification in MEMS
Takahiro Namazu, Daisuke Ano, Shozo Inoue, Keiji Koterazawa
Session ID: H79
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.484.0
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(787K)
Integrated Thin Film Metallic Glass Microprobes
Taiyo Uejima, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
Session ID: H80
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.485.0
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(558K)
Characterization of Multi-layer Electroplated Micro-spring Array for MEMS Probe Card
Kenichi Kataoka, Toshihiro Itoh, Kazuo Inoue, Tadatomo Suga
Session ID: H81
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.486.0
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(773K)
Development of Electrostatically Actuated Microprobes for Low Contact-force MEMS Probe Card Utilizing Fritting Contact -Characteristics of Electrostatically Acatuated Microprobes
Shingo Kawamura, Kenichi Kataoka, Toshihiro Itoh, Tadatomo Suga
Session ID: H82
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.487.0
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Simultaneous self-alignment of microparts using liquid surface tension(2
nd
Report) -examination of alignment characteristic-
Shoichi Hoshino, Kaiji Sato
Session ID: H83
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.488.0
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[title in Japanese]
[in Japanese]
Session ID: I01
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.490.0
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Overhanging micro fabrication by incremental forming
Shinya Hiramatsu, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo ...
Session ID: I02
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.491.0
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Development of Newly Micro Compression Molding System for Plastic Parts
Hitoshi Ohmori, Weimin Lin, Yoshihiro Uehara, Hatsuichi Takeyasu, Kiwa ...
Session ID: I03
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.492.0
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Evaluation of Adhesion Strength Between Injection Molded Substrate and Metal Film Using Energy Release Rate
Naoto Ikegawa, Masahiro Sato, Keiji Higashi, Hiroyuki Hamada
Session ID: I04
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.493.0
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Development of the reducing work of a 100kgf class high-strength steel board
Masahiko Fukui, Nobutaka Itabashi, Syunnzi Suganuma
Session ID: I06
Published: March 16, 2004
Released on J-STAGE: March 01, 2005
DOI
https://doi.org/10.11522/pscjspe.2004S.0.495.0
CONFERENCE PROCEEDINGS
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