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Hironao Okada, Takeshi Kobayashi, Takashi Masuda, Tadatomo Suga, Toshi ...
Session ID: F19
Published: 2009
Released on J-STAGE: August 25, 2009
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We have developed a digital output piezoelectric accelerometer for ultra-low power wireless sensor nodes. The accelerometer has an array of piezoelectric parallel-plate capacitor structures on a Si cantilever. The piezoelectric plates are joined together in series and connected to a CMOS switch array. This composition makes it possible to realize a digital output accelerometer in which the number of on-state CMOS switches increases with increasing acceleration. The switches can be turned on by the voltage generated due to the piezoelectric effect and then the acceleration can be directly converted to digital output without an A/D converter. In this study, we have designed this type of accelerometer and developed its fabrication process utilizing SOI wafer and sol-gel derived PbZrTiO3 (PZT) thin films. Evaluating the devices, it has been shown that an ultra-low power accelerometer can be realized with improving the piezoelectric property of the piezoelectric thin film.
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Munehisa Inokuchi, Hideyuki Ando, Minoru Kinoshita, Kazuyoshi Akase, R ...
Session ID: F20
Published: 2009
Released on J-STAGE: August 25, 2009
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We have developed an ultra-micro displacement sensor (Size:1.3mm X 1.3mm X 1.3mm) that consists of the silicon substrate monolithically integrated with several photodiodes (PD) in every direction and a vertical cavity surface emitting laser (VCSEL). This sensor can measure the liner movement and rotating angle separately. The beam diverged from VCSEL was irradiated to the measured object. PDs receive the reflected light after the reflected light reflected at the measured object. So we can detect the change in the intensity of light reflected by the measured surface, which is based on the liner movement and rotating angle of the measured object. For example, this sensor can measure the liner movement and biaxial tilt and concavo-convex shape for the micro-mirror.
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Ryo Seto, Fumio Matsuoka, Wataru Iwasaki, Toshihiro Ito, Eiji Higurash ...
Session ID: F21
Published: 2009
Released on J-STAGE: August 25, 2009
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Micro integrated laser Doppler blood flow sensor (MEMS sensor) is anticipated as a sensor for animal watching so as to prevent avian influenza infection which has been a subject of our capital concern recently. However, there are challenges, such as light weight and low power consumption, for applying the conventional MEMS sensor to birds. To solve these challenges, we have newly developed MEMS sensor for birds, being aimed at light weight, low power consumption and wireless signal transmittance. We describe the results of attaching these developed sensors to chickens.
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Munehiko Kato, Eric Blasius, Yoshiaki Ukita, Kunihiko Mabuchi, Yuichi ...
Session ID: F22
Published: 2009
Released on J-STAGE: August 25, 2009
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Hiroshi Mizumoto, Youichi Tazoe, Shigeru Yokouchi, Yoshito Yabuta, Shi ...
Session ID: F31
Published: 2009
Released on J-STAGE: August 25, 2009
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For small diameter of end-mills and grinding wheels, a high-speed precision aerostatic and aerodynamic bearing system is proposed. At the top of the spindle, an active aerodynamic bearing controlled by piezoelectirc actuators is incorporated. In this hybrid spindle, the weight of the spindle and the load are basically supported by aerostatic thrust and radial bearings, and the radial vibration occurred in the high rotational speed is suppressed by the active aerodynamic bearing. Final goal of the hybrid spindle is as follows: the spindle vinration is less than 0.1um at the maximum spindle speed of 100,000min-1.
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Takanobu Oba, Keiichi Nakamoto, Tohru Ishida, Yoshimi Takeuchi
Session ID: F32
Published: 2009
Released on J-STAGE: August 25, 2009
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Complicated 3-D microparts can be created by the development of multi-axis control ultraprecision machining centers. Multi-axis control machining has several advantages, i.e. the use of short tools, and the avoiding of workpiece resetting and so on. 3-D CAD/CAM systems for multi-axis control micromachining are also developed to save time and labor in preparing numerical control data. However, operators consume a long time in process planning since there are few computer systems that help process planning for multi-axis control micromachining. Therefore, operators have to make the process plan, based on empirical knowledge and intuition. It is vital to develop CAPP (Computer Aided Process Planning) system for 3-D ultraprecision micromachining in response to the demands. The study deals with the development of fundamental CAPP/CAM system for multi-axis control 3-D micromachining. The system developed in the study can contribute the automation 5-axis control micromachining. Tool path regarding tool length and effect of tool posture change in machining is generated by developed system.
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Shingo Yamamoto, Minoru Hirano, Keiichi Nakamoto, Tohru Ishida, Yoshim ...
Session ID: F33
Published: 2009
Released on J-STAGE: August 25, 2009
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In recent years, the demand of optical devices with complicated and highly accurate shape, such as Fresnel lens and CD/DVD pickup lens, is growing up in terms of miniaturization and improvement of information equipments.This study aims at the establishment of the machining process for the complicated optical lens mold. As an example, the study deals with the high accuracy machining method of non-axisymmetric asphere mold with minute structures, which is generally very difficult to machine. The especially difficult points in the machining are highly accurate tool change and minute structure machining on non-axisymmetric asphere. Therefore, the study proposes the high precision machining method in case of the necessity of the tool exchange.Moreover, the proposed method aims at machining of minute structures with high shape accuracy by combining grinding with diamond cutting.
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Observation of Machined Surface of silica glass using Confocal Scanning Laser Microscope with a Raman Spectroscopy Interface
Tamotsu Iizuka, Makoto Yamaguchi, Shigeru Ueno, Noboru Morita
Session ID: F34
Published: 2009
Released on J-STAGE: August 25, 2009
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Fly cutting allows the glass to be cut 10 times more in depth than turning in ductile-mode. In this research, synthetic fused silica work pieces were machined by fly cutting with an ultra-precision lathe and machined area were observed by Confocal Scanning Laser Microscope with a Raman Spectroscopy Interface. Different spectra were observed from the machined area and optically polished surface of fused silica. Moreover, fluorescence was observed on the machined area by excitation with UV laser (wavelength: 266 nm).
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Hirokazu Shimoda
Session ID: F36
Published: 2009
Released on J-STAGE: August 25, 2009
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It is not too much to say that the history of ball screw development began with its application to NC machine tools, and its later technological evolution progressed in tandemwith the steady increases in speed, stiffness and precision of NC machine tools. Today, ball screws are put to use in extensive fields ranging fromsemiconductor production equipment, injectionmoldingmachines, robots, automobiles, and aircraft, to general industrial machinery. In fact, the evolution of electric actuators and control technology has been remarkable in recent years. As the performance of actuators has progressively improved, demand for ball screws has escalated further and further. The author will try to introduce the main technological advances that have enabled performance enhancement and the current level of application.
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Shoji Noguchi
Session ID: F37
Published: 2009
Released on J-STAGE: August 25, 2009
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Takahiro Fujii, Shigeo Shimizu
Session ID: F38
Published: 2009
Released on J-STAGE: August 25, 2009
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Taku Oba, Shunsuke Sakai, Shigeo Shimizu
Session ID: F39
Published: 2009
Released on J-STAGE: August 25, 2009
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Influence of Manufacturing on Gear Strength
Ryohei Ishimaru, Yoji Umezaki, Shuhei Kurokawa, Toshiro Doi
Session ID: F61
Published: 2009
Released on J-STAGE: August 25, 2009
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A gear is one of the most popular machine element parts. It is used to transmit power between two axes, to change speed, to obtain large torque and so on. The history of gear is old. It is known that a wooden gear had already been used since B.C.. Nowadays, steel, cast iron, and plastic are used as gear material, and gears are used at severe conditions. Therefore, it becomes important problem for gears to miniaturize more, and to make the vibration and the noise a more decrease. This research introduced some typical machining methods of gears, reported the influence of machining methods on gear strength, and considered the future of gear as machine element parts.
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Takahiro Yotsumoto, Teppei Oya, Yu Asanuma, Tohru Ihara, Imei Ka
Session ID: F62
Published: 2009
Released on J-STAGE: August 25, 2009
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The development of device that supports the visual education
Takekazu Sawa, Takahiro Amano, Jyunichi Yokoyama, Kuniaki Unno
Session ID: F63
Published: 2009
Released on J-STAGE: August 25, 2009
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focused on mechanical drawing in the Skill Olympics
Masaki Ito
Session ID: F64
Published: 2009
Released on J-STAGE: August 25, 2009
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Outlining the Skill Olympics as one of education for junior technicians, I would like to figure out the present situation of mechanical drawing and the problems involved in it, and consider how to educate and train junior technicians for technical drawing from now.
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(In case of a Robocoon team challenge to a 'Tsukuba challenge' robot contest of students)
Ichiro Nishimura, Toshio Kasai, Tadao Kawasima
Session ID: F66
Published: 2009
Released on J-STAGE: August 25, 2009
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Global nano fabrication special course 1st report
Junichi Ikeno, Tsuyoshi Mizuno, Yuichi Sato, Kenichiro Horio
Session ID: F67
Published: 2009
Released on J-STAGE: August 25, 2009
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Shigetoshi Ishizaki, Junichi Ozaki, Shigeru Saito, Takeshi Nakatsuji, ...
Session ID: F68
Published: 2009
Released on J-STAGE: August 25, 2009
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Execution of Educational Mechanical Production Programs for School Children using aluminumu can
Hiromitsu Tsukakoshi, Nobuhide Itoh, Goroh Itoh, Iwao Nakatsu, Tomonor ...
Session ID: F69
Published: 2009
Released on J-STAGE: August 25, 2009
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Rikio Hikiji, Minoru Arai
Session ID: F70
Published: 2009
Released on J-STAGE: August 25, 2009
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The purpose of this report is to exclude risk factors based on the instance of Hiyari Hatto(near-miss accidents)experienced by school personnel and students and to make the environment in which students can participate safely in the class and extracurricular activities. By means of the risk assessment and KYT(training for predicting dangers, (K:Kiken, Y:Yochi, T:Training), it has been considered how the college should control the experiments. As a results, the students have been able to work on the experiments without affecting the school facilities and students' working site, and the number of injuries has decreased.
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Yasuhiko Takeno, Toshiro Doi, Toshio Kasai
Session ID: F74
Published: 2009
Released on J-STAGE: August 25, 2009
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Lapping and Polishing Machines and Technology taking account of Ecology
Toshio Kasai, Junichi Ikeno, Kenichiro Horio, Toshiro Doi, Ichiro Nish ...
Session ID: F75
Published: 2009
Released on J-STAGE: August 25, 2009
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Yoji Matsukawa, Yoji Umezaki, Shuhei Kurokawa, Toshiro Doi, Tosio Kasa ...
Session ID: F76
Published: 2009
Released on J-STAGE: August 25, 2009
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Yuji Hasegawa, Yuki Aizawa, Nobuhide Itou, Hitoshi Ohmori, Teruko Kato ...
Session ID: F77
Published: 2009
Released on J-STAGE: August 25, 2009
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Naohiro Motoishi, Yasuhiro Takaya, Terutake Hayashi
Session ID: G01
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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YOUNGJIN NOH, Jung Chul Lee, Yoshikazu Arai, Gao Wei
Session ID: G02
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Experiment of On-Machine Measurement
Takemi Asai, Yoshikazu Arai, Wei Gao
Session ID: G03
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Ichiro Ogura, Yuichi Okazaki
Session ID: G04
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Probe charateristic in the standing wave field
Daisuke Nakai, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
Session ID: G06
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Principle of position detection using the probe
Sang In Eom, Yasuhiro Takaya, Terutake Hayashi
Session ID: G07
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Verifying Basic Function of Experimental Equipment for 2-Dimension Super Resolution
Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
Session ID: G08
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Relationship between CCD Pixel Size and Resolving Power
Shin Usuki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
Session ID: G09
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Non-interacting vibration scanning micro-ball stylus
Yoshikazu Arai, Atsushi Shibuya, Takuro Endo, Wei Gao, Yasunari Nagaik ...
Session ID: G13
Published: 2009
Released on J-STAGE: August 25, 2009
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Shimpei Tanaka, Yasuhiro Takaya, Terutake Hayashi
Session ID: G14
Published: 2009
Released on J-STAGE: August 25, 2009
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Calibration method for laser trapping probe
Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi
Session ID: G15
Published: 2009
Released on J-STAGE: August 25, 2009
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Yuichiro Tokuda, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu
Session ID: G16
Published: 2009
Released on J-STAGE: August 25, 2009
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Frequency component of spindle radial error motion and rotational speed
Patamaporn Chaikool, Masato Aketagawa, Jaratsri Soeatuptim, Eiki Okuya ...
Session ID: G18
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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We have proposed the two-dimensional (2-D) atomic encoder method in which the scanning tunneling microscope (STM) and the regular crystalline lattice were used. This method has been expected to be applicable to the spindle radial motion error measurement. However, the method has the limitation of the measurement speed (100nm/s), therefore, the spindle and its rotational speed must be designed appropriately according to the speed of the atomic encoder. In this paper, the radial error motions of 2 types of spindles are examined using the Donaldson reversal method to investigate they are suitable for the 2-D atomic encoder or not.
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(1st report: Measurement principle and error analysis)
Masato Aketagawa, Madden Muhummad, Yuria Ohkubo, Shouhei Kimura, Eiki ...
Session ID: G19
Published: 2009
Released on J-STAGE: August 25, 2009
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We propose the grating interferometer which can determine lateral and vertical displacement of the grating using grating 0th and +-1st order diffraction lights. And we propose the concentric measurement method of spindle radial, axial and angular motions using the grating interferometers. Measurement principle and error analysis are discussed.
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Case study of the reference mirror which consist of many small mirrors
Masakazu Watanabe, Sornkaew Adisorn, Ryoshu Furutani
Session ID: G20
Published: 2009
Released on J-STAGE: August 25, 2009
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The position of 2-D stage which has two straight edges in X and Y-direction is measured by laser interferometer. This measuring result includes two kinds of errors which are motion errors of the stage and profile errors of the reference mirrors. Multi-point method is generally used in measuring straightness. However, multi-point method includes zero-adjustment errors. So we proposed the new method that a single probe was used for each axis measurement. It isn′t necessary to consider zero-adjustment errors in the proposed method.The reference mirror was assumed to have profile error.Them the profile error is distinguished from the axis profile.In this paper, The reference mirror is assumed to consist of many small mirrors.Then the location and tilt angle of each mirror distinguished from two axis profile.
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Yusuke Saito, Yoshikazu Arai, Wei Gao
Session ID: G21
Published: 2009
Released on J-STAGE: August 25, 2009
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Tomohiro Ueno, Shigeki Tachibanada, Yasuo Higashi, Jyunichi Uchikoshi, ...
Session ID: G23
Published: 2009
Released on J-STAGE: August 25, 2009
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A new ultra-precision profiler has been developed in order to measure such as asymmetric and aspheric profiles. In the present study, the normal vectors at each points on the surface are determined by the reflected light beam goes back exactly on the same path as the incident beam. The surface gradients at each point are calculated from the normal vector and the surface profile is obtained by integrating the gradient. The measuring instrument was designed according to the above principle of the measuring method. In the design, four ultra-precision goniometers were applied to the adjustment of the light axis for the normal vector measurement. In the measuring instrument, the angle-positioning resolution and accuracy of each goniometer are respectively 1.8x10-8rad and 2x10-7rad. The present measuring method is necessary to have the coordinate accuracy of sub-micron for the normal vector measurement points. In the previous meeting, we have presented that normal vector measured points with sub-micron accuracy can be determined by the self-calibration method. In this paper, the self calibration method has been evaluating to have capability to the surface profile measuring accuracy with nanometer order using a concave mirror is discussed.
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Two point method considering cross-axis translational motion, pitch motion and sensor's random error
Eiki Okuyama
Session ID: G24
Published: 2009
Released on J-STAGE: August 25, 2009
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Tatsuya Kume, Kazuhiro Enami, Yasuo Higashi, Kenji Ueno
Session ID: G25
Published: 2009
Released on J-STAGE: August 25, 2009
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Straightness measurement using 3-point method is considered advantageous for long length measurement, being not affected by scanning error in principle. However, error propagation toward profiles is concerned for long lengths measurement as it uses integration in process for obtaining profiles. Here, error propagation toward profiles obtained using 3-point method is estimated based on error propagation law and effects of measurement parameters are evaluated comparing to measurement values.
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Basic theory
Tou Ou, Satoru Takahashi, Kiyoshi Takamasu
Session ID: G26
Published: 2009
Released on J-STAGE: August 25, 2009
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Masataka Tanase, Jiang Zhu, Tomohisa Tanaka, Yoshio Saito
Session ID: G31
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Along with diversification of customer′s preference, product designs become more and more complex. Multi axis machine tools are expected to meet their exceptions, and similarly measurement and evaluation technology for complex products are needed. The optical measurement technology is widely used because of their high speed and accuracy. However, their sensitiveness of target surface such as incline or optical absorbance makes measurement difficult. Therefore, to keep sensor position correctly is important conditions for measuring process. In this paper, non-contact coordinate measuring machine which combined multi-axis robot and laser probe was developed and the measurement path generation method to automatically measure the complex 3-D surface is proposed.
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Hiroki Hanaoka, Hiroshi Yamazaki, Manabu Kino, Jun Handa, Naoki Kaneko
Session ID: G32
Published: 2009
Released on J-STAGE: August 25, 2009
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Akihiro Fujii, Kazuhisa Yanagi
Session ID: G33
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Takeshi Hagino, Makoto Abe
Session ID: G34
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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Fundamental Principle of Reversed-Phase Pulses Interferometer
Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
Session ID: G36
Published: 2009
Released on J-STAGE: August 25, 2009
CONFERENCE PROCEEDINGS
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