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1998 Volume 25 Issue 5 Pages
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1998 Volume 25 Issue 5 Pages
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
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Article type: Index
1998 Volume 25 Issue 5 Pages
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Article type: Index
1998 Volume 25 Issue 5 Pages
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Takatomo Sasaki
Article type: Article
1998 Volume 25 Issue 5 Pages
191-192
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Hiroyuki Furuya, Masashi Yoshimura, Itsunari Yamada, Hiroshi Nakao, Yu ...
Article type: Article
1998 Volume 25 Issue 5 Pages
193-199
Published: December 15, 1998
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We have developed a new rare-earth calcium oxyborate crystal Gd_xY_<1-x>Ca_4O(BO_3)_3 (Gd_xY_<1-x>COB) in order to control the birefringence in nonlinear optical crystals. Gd_xY_<1-x>COB (0<x<1) crystals with uniform composition have been grown by the Czochralski method. The non-critical phase matching (NCPM) wavelength for second harmonic generation (SHG) has successfully been tuned in the range from 830 to 970 nm by changing the compositional parameter x. Furthermore, we have succeeded to generate NCPM third harmonic of Nd: YAG laser radiation (1064 nm)
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
200-
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Ryuichiro Oshima, Fuminobu Hori, Takeo Kamino, Toshie Yaguchi
Article type: Article
1998 Volume 25 Issue 5 Pages
201-206
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The melting and freezing processes of silicon were investigated by in-situ high resolution transmission electron microscopy (HRTEM) and image processing. Atomic structures of (111) interface planes of the solid and liquid phases have been examined. It is revealed that the interface goes back and forth by the lateral motion of atomic steps on (111) planes as the temperature is changed. A transition region of about 1nm thickness is found to exist between the solid and liquid phases.
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Masataka Hourai, Hideshi Nishikawa, Tadayoshi Tanaka, Takeshi Nomachi, ...
Article type: Article
1998 Volume 25 Issue 5 Pages
207-213
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Due to the size reduction of advanced ULSIs to subquarter micron level, the influence of grown-in defects appearing in Czochralski-grown silicon (CZ-Si) crystals on the device performance and yield has been widely recognized. Therefore, grown-in defect free crystals are strongly required. In this paper, we will discuss the generation behavior of grown-in defects, based on results obtained up to the present. In addition, we will argue the possibility of grown-in defect free crystals and show that V/G, i.e., the ratio of a growth rate (V) to an axial temperature gradient (G) in the crystals at high temperatures near the melting point, is a key parameter to realize grown-in defect free crystals in the near future which are equivalent to epitaxial wafers in crystal quality.
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Yoshiyasu Arima, Toshiharu Irisawa
Article type: Article
1998 Volume 25 Issue 5 Pages
214-219
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Monte Carlo simulation of the unidirectional melt growth is performed to study the solidification process and the taking-in process of impurities at the solid-melt interface. It simulates the Czochralski Silicon growth by using the diamond lattice. The equilibrium and effective distribution coefficients can be evaluated by the simulation. The nucleation of impurity occurs in the melt and the growth is not steady when the interaction of impurity is strong. The structure of growing solid-melt interface is also investigated. The interface of [111] growth is flat in the atomic scale. On the other hand, that of [100] growth is very rough. Then, the growth modes are different by the different crystal orientation of interface. The larger concentration of impurity causes the diffuser interface. The interaction between solid atom and impurity flattens such interface because of more impurities incorporated by the solid.
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Toshiaki Asahi, Ryuichi Hirano, Kenji Kohiro, Keiji Kainosho, Masayuki ...
Article type: Article
1998 Volume 25 Issue 5 Pages
220-228
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The recent development of InP crystal growth technologies is reviewed. The improved liquid encapsulated Czochralski (LEC) methods based on thermal baffles are successfully applied to grow 50 mm diameter LEC InP with low dislocation densities. For growing InP crystals with the diameter larger than 75 mm for applications to electronic devices, the pressure controlled LEC methods were firstly developed and are now applied in production scale. The vertical gradient freezing (VGF) method which has the potentiality in growing lower dislocation density crystals had a difficulty in growing <100> single crystals because of twinning occurrence. This difficulty was however solved by the recent development in the VGF method. 100 mm diameter VGF <100> single crystals with the dislocation density level of 2000 cm^<-2> can be successfully grown.
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Isamu Akasaki
Article type: Article
1998 Volume 25 Issue 5 Pages
229-
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Isamu Akasaki
Article type: Article
1998 Volume 25 Issue 5 Pages
230-
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Isamu Akasaki
Article type: Article
1998 Volume 25 Issue 5 Pages
231-
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Tatau Nishinaga
Article type: Article
1998 Volume 25 Issue 5 Pages
232-234
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Tadashi Ohachi
Article type: Article
1998 Volume 25 Issue 5 Pages
235-237
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Makio Uwaha
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1998 Volume 25 Issue 5 Pages
238-239
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Matahito Watanabe
Article type: Article
1998 Volume 25 Issue 5 Pages
239-240
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Yusuke Mori
Article type: Article
1998 Volume 25 Issue 5 Pages
240-
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Kohichi Kakimoto
Article type: Article
1998 Volume 25 Issue 5 Pages
241-
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Mitsuyoshi Miyata
Article type: Article
1998 Volume 25 Issue 5 Pages
242-243
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Tokuzo Sukegawa, Yasuhiro Hayakawa
Article type: Article
1998 Volume 25 Issue 5 Pages
244-
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Hiroshi Nakayama
Article type: Article
1998 Volume 25 Issue 5 Pages
245-246
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Fumiko Iwasaki, Hideo Iwasaki
Article type: Article
1998 Volume 25 Issue 5 Pages
247-250
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[in Japanese]
Article type: Article
1998 Volume 25 Issue 5 Pages
251-
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
252-257
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Article type: Index
1998 Volume 25 Issue 5 Pages
258-260
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Article type: Index
1998 Volume 25 Issue 5 Pages
260-262
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
263-
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
264-
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Article type: Appendix
1998 Volume 25 Issue 5 Pages
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Article type: Cover
1998 Volume 25 Issue 5 Pages
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1998 Volume 25 Issue 5 Pages
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