Formation of yttrium oxide by electrodeposition was studied in DMF containing YCl
3 and a small amount of water, and rectangular pulse electrodeposition technique was applied. Y
2O
3 was formed during the electrodeposition, and Y
2O
3:Eu (
III) film was formed also in DMF containing YCl
3, EuCl
3 and a small amount of water. The deposited film was analyzed by atomic absorption spectroscopy, X-ray diffraction, EPMA, XPS and SEM. The deposited Y
2O
3:Eu (
III) film showed photoluminescence and cathode luminescence (red-orange color).
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