表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
69 巻 , 12 号
選択された号の論文の24件中1~24を表示しています
特集/金属・半導体のアノード酸化研究の最前線
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研究論文
  • Tomoko URATA, Kazuhiro FUKAMI, Mitsuhiro YAMAMOTO, Tetsuo SAKKA
    2018 年 69 巻 12 号 p. 637-640
    発行日: 2018/12/01
    公開日: 2019/06/01
    ジャーナル フリー

    Formation mechanisms of macropore-like structure filled with micropores (skeleton structure)and conventional macroporous structure (macropores being not filled with micropores)are studied. By controlling the current density and HF concentration in the electrolyte solu tion, it has been clarified that the skeleton structure is formed under conditions where the bulk HF concentration is higher and the current density is lower. Porous silicon prepared under such conditions does not have oxidized silicon at the bottom of pores. This suggests that the mechanism of the skeleton structure formation is totally different from that reported for the explanation of conventional macropore formation. In this study we propose a model for skeleton formation based on hole-supply in a silicon electrode.

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