In this study, diamond-like carbon(DLC)films are modified using O
2 and CF
4 plasma generates by radio frequency(RF), taking into account surface wetting and tribological properties. Surface properties of O
2 and CF
4 plasma-treated DLC are characterized using atomic force microscopy(AFM), Attenuated total reflectance-Fourier transform infrared(ATR-FTIR)spectroscopy, ball-on-disk friction testing, and contact angle measurements. The results indicate that hydroxyl group generates on the surface of the O
2 plasma-treated DLC with surface roughness of approximately 0.20-0.25 nm, while fluorinated group also generates on the surface of the CF
4 plasma-treated DLC with surface roughness of approximately 0.16-0.21 nm. The O
2 plasma-treated DLC films present hydrophilic surfaces due to their low contact angles and high surface energies. In contrast, CF
4 plasma-treated DLC show hydrophobic surfaces, as evidence by their high contact angles and low surface energies. Further, CF
4 plasma-treated DLC film surfaces exhibit friction coefficients as low as untreated DLC, but O
2 plasma-treated DLC exhibit higher friction coefficients than that of the untreated DLC. It is concluded that CF
4 plasma treatment can be used to produce hydrophobic DLC, making DLC a favorable non-wetting surface and improving its friction coefficient.
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