The observation of the tunnel formed on D. C. etched {100} highly ordered aluminum and analysis of the tunnel shape have been performed by using the oxide replica method. The tunnel widths (W
i) were measured as a function of the tunnel depth (
li) for the tunnels obtained by D. C. etching in AlCl
3, HCl+AlCl
3, NaCl+AlCl
3, H
2SO
4+AlCl
3, LiCl, NaCl and KCl aqueous solutions. As has already been reported regarding HCl solution, Wi tapered exponentially with
li, i. e., log (W
i/W
10)=a·
li, where W
10 is the tunnel width at the depth of 10μm from the tunnel entrance, in all solutions examined in this study. In HCl+AlCl
3 solution, W
i tapered rapidly with
li compared to the case of HCl or AlCl
3 solutions. The rapid decrease in W
i with
li, in HCl+AlCl
3 solution was considered to be caused by the increase in the concentration of Al
3+and Cl
- ions in the tunnel, followed by the hindrance of electrochemical dissolution of Al. On the other hand, for the tunnel obtained in LiCl, NaCl, or KCl solutions, W
i tapered with
li, at the same rate. It was considered that Li
+, Na
+, and K
+ ions play the same role in the formation of the tunnel.
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