Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
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Volume 21, Issue 2
Displaying 1-31 of 31 articles from this issue
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  • Development of Novel Rare-Earth Complexes and Their Application to Emission Devices
    Hiroki Iwanaga
    2008 Volume 21 Issue 2 Pages 165-172
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.165
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    Colorless and transparent emission materials are being rapidly developed in view of their potential for use in emission devices, ornaments, and other applications. We focused on rare-earth complexes because of their transparency when dissolved in polymer and pure color emission. The first concept of novel molecular design of rare-earth complexes, namely, introduction of two different phosphine oxides into one rare-earth ion as ligands, was established, and their solubility and emission intensity were drastically enhanced. The second concept is that two different phosphine oxides are tied together and asymmetric bis-phosphine oxide structure is introduced to one rare-earth ion. The emission intensity of an Eu(III) complex was further enhanced. Colorless and transparent emission materials using novel rare-earth complexes have excellent transparency and strong pure color emission, and are promising candidates for a variety of application fields, including emission devices, where the see-through feature will be essential.
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  • Control of Electroluminescence Spectra Using Hole-Blocking Layer for White Organic Light-Emitting Diodes
    Tatsuo Mori, Yusuke Masumoto, Takaaki Itoh
    2008 Volume 21 Issue 2 Pages 173-180
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.173
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    We reviewed white organic light-emitting diodes (WOLEDs) briefly in this paper and suggested the significance of a hole-blocking material for the fabrication of WOLEDs. And we studied the electroluminescence (EL) spectra of two kinds of WOLEDs using each different hole-blocking material. The WOLED with blue-emitting aluminum quinoline (BAlq) had a broad EL spectrum. The broad spectra were caused by overlapping three emissions of 3 kinds of emission materials due to wide recombination zone. The WOLED with bathocuproine (BCP) showed two separated emissions. The difference between two specimens was concluded by strong hole-blocking property of BCP. The introduction of BCP produced a recombination zone due to hole accumulation at the BCP interface.
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  • Organic Light-Emitting Diodes with Hole-Transporting Material Having Metal Collecting Sites
    Ken Albrecht, Atsushi Kimoto, Ju-Sang Cho, Yugo Matsuura, Kimihisa Yam ...
    2008 Volume 21 Issue 2 Pages 181-182
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.181
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  • Preparation of PEG and Protein Co-immobilized Upconversion Nanophosphors as Near-infrared Biolabeling Materials
    Masao Kamimura, Daisuke Miyamoto, Yu Saito, Kohei Soga, Yukio Nagasaki
    2008 Volume 21 Issue 2 Pages 183-187
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.183
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    Upconversion phosphors are expected to be used as fluorescence biolabeling materials. One of upconversion phosphors, erbium ion-doped-Y2O3 (Y2O3:Er) nanoparticles (YNPs) was synthesized by homogeneous precipitation method. Poly(ethylene glycol)-b-Poly(acrylic acid) (PEG-b-PAAc) was immobilized on the surface of YNP to improve dispersing stability and prevention of nonspecific adsorption. In order to install protein on the YNP surface, co-immobilization of PEG-b-PAAc and bovine serum albumin (BSA) as a model protein was carried out. The specific molecular recognition of PEG/BSA co-immobilized YNPs (PEG/BSA-YNPs) was confirmed by anti-BSA antibody plate assay. The obtained complex is a promising near-infrared biolabeling materials with high performances.
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  • Organic Field-Effect Transistors with High-κ HfO2/ Resin Double Gate Insulator
    Gou Masaki, Shigeki Naka, Hiroyuki Okada
    2008 Volume 21 Issue 2 Pages 189-192
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.189
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    High-κ insulator with a higher driving capability is promising for an organic field-effect transistor (OFET). First, insulating material of solution-processed TiO2 was tested for pentacene-based organic transistor. Second, HfO2, which is commonly used for Si FET, was also selected and the organic transistor with stacked Hf2/ organic resin was fabricated. Field-effect mobility of 0.32 cm2/Vs was obtained for the top-contact type OFET with stacked HfO2-based insulator.
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  • Polymer Field Effect Transistors of F8T2 Prepared by Evaporative Spray Deposition using Ultradilute Solution Technique
    Koji Sagane, Masato Shakutsui, Tetsuo Tsutsui, Takahiko Fujita
    2008 Volume 21 Issue 2 Pages 193-196
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.193
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    The evaporative spray deposition using ultradilute solution (ESDUS) technique enables layer-by-layer and pixel-by-pixel deposition of polymer semiconductors. In this study we prepared thin films of dioctylfluorene-co-bithiophene) alternating copolymer, F8T2, by ESDUS and by a conventional spin-coat. These films were made into fabricated field effect transistors to investigate carrier transportation properties. Since the organic films were formed by deposition of aerosol particles in ESDUS, the carrier transportation properties in ESDUS films had been expected lower than those in spin-coat films, which are formed through spread polymer solution. However, the device performance was almost identical, indicating that the polymer deposited as particles undergoes rearrangement process on the substrate.
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  • Organic Field-effect Transistors Based on Vapor Deposited 2,9-Dialkylpentacene Films
    Yoshihito Kunugi, Mitsuaki Ikari, Kazuo Okamoto, Kenji Ogino
    2008 Volume 21 Issue 2 Pages 197-201
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.197
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    Organic fleld-effect transistors based on vapor deposited films of 2,9-diethylpentacene (C2-PEN), 2,9-dibutylpentacene (C4-PEN) and 2,9-dioctyIpentacene (C88-PEN) were successfully fabricated. All the alkylpentacene based OFETs showed typical p-channel PET characteristics, and the best field-effect mobility of 4.8x10-2 cm2V-1s-1 with on/off current ratio of ∼104 was obtained for the C2-PEN based OFET. Interestingly, the flled-effect mobility decreased as alkyl-chain length becomes longer. According to the molecular orbital calculations, the 2,9-dialkylpentacenes form doubly bent molecular structures in which the al1-anti alkyl groups are not lie on the same plane as that of the pentacene core. The alkyl-chains may hinder the intermolecular interactions and overlap, meaning the poor intermo]ecular charge transfer.
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  • Double-Faced Optical Writing in Guest-Host Mode Liquid Crystal Cell Using Crosslinkable Polymer Alignment Film
    Rumiko Yamaguchi, Susumu Sato
    2008 Volume 21 Issue 2 Pages 203-206
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.203
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    We report the optical writing in the liquid crystal (LC) cell with a photo-crosslinkable polymer alignment surfaces. Double-faced writing is successfully demonstrated in a guest-host mode LC cell by exposing the cell from both sides with an unpolarized UV light. Different LC alignment patterns are performed on both alignment substrates. Written images can individually be visualized when a polarizer is replaced in front of and behind the cell. Logical operations for two written images are also obtained when the LC cell is set between the polarizer and anarizer.
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  • Molecular Alignment in Ferroelectric Liquid Crystal Display Having Microscopically Patterned Electrodes
    Hirokazu Furue, Tadashi Ikawa, Hirokuni Sakai, Yukio Koizumi, Masatosh ...
    2008 Volume 21 Issue 2 Pages 207-211
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.207
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    Ferroelectric liquid crystals (FLCs) are one of the promising materials for next-generation liquid crystal displays (LCDs) because of fast response, microsizing of pixel and so on. Since the molecular alignment structure of FLC is strongly affected by the surface roughness of substrate, it is important to investigate the influence of the microscopically patterned electrodes on the alignment of FLC molecules. In this study, we have researched the influence of the unevenness of the electrodes on the surface of the polyimide alignment film and the alignment structure of FLC, and then tried to obtain a defect-free uniform alignment even in FLCD having microscopically patterned electrodes. As a result, it was obvious that the way of wetting of the polyimide solution is largely different even in the small difference of the surface unevenness in the patterned electrodes. A uniform alignment of FLC molecules was obtained by using the combination of a flat surface of polyimide film and a relatively even surface of the glass substrate with microscopically patterned electrodes.
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  • Silica Nano Powder Formation using ICP Plasma and Evaluation of its Adsorption Ability for Biotic Substances
    Aya Satomi, Mitsuyoshi Mio, Kunihito Tanaka, Masuhiro Kogoma
    2008 Volume 21 Issue 2 Pages 213-217
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.213
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    We synthesized silica nano powder using ICP plasma and evaluated its adsorption ability for biotic substances such as proteins and molecular histamine. The silica particles with negative electric charge adsorbed cytochrome C and histamine which have a positive electric charge. On the other hand, OVA which has a negative electric charge was not adsorbed. We considered that electrostatic interactions dominate the adsorption process between silica particles and biotic substances.
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  • Plating Technology for Fluorocarbon Polymer Films Using Atmospheric-pressure Nonthermal Plasma Graft Polymerization
    Masaaki Okubo, Mitsuru Tahara, Tomoyuki Kuroki, Toshitomo Hibino, Nobo ...
    2008 Volume 21 Issue 2 Pages 219-224
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.219
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    A low-environmental load surface modification technique for plating the fluorocarbon polymers films is developed using an atmospheric-pressure argon and acrylic acid vapor nonthermal plasma graft polymerization. The results of the T-type peeling test show that the peeling strength of copper plating on the treated PTFE (polytetrafluoroethylene) film is approximately 46 times greater than that on the untreated film. With scanning electron microscope analysis of the surface of the copper plating on the treated PTFE, it is confirmed that the hydrophilic surface of the treated film contributes to uniform copper plating.
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  • Surface Engineering by Plasma Techniques of DLC for Medical Materials and Blood-compatibility Evaluation
    Tatsuyuki Nakatani, Keishi Okamoto, Yuki Nitta, Akira Mochizuki, Hideo ...
    2008 Volume 21 Issue 2 Pages 225-230
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.225
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    The metallic medical devices has high shape stability and durability, but the effects of chemical changes in surface by ingredients inside the body are not negligible. Therefore, metallic medical devices are given surface treatment with carbonaceous thin films or the like. Accordingly, with the purpose of improving the biocompatibility of Diamond-like carbon (DLC) films, we experimented with fabricating biomimetic multifunctional DLC films whose zeta potential is controlled. As a result, we discovered that reducing the Si content is effective for introduction of functional groups onto DLC films. We also succeeded in controlling the zeta potential on DLC surface, by controlling the amounts of anionic and cationic groups introduced. In addition, in assessing the blood compatibility, we found that the DLC surface's zeta potential correlates with the platelet adhesion characteristic and the blood coagulation characteristic; we thus discovered a possibility for optimizing DLC surface engineering. This indicated the possibility that biomimetic materials, multifunctional DLC films using plasma surface treatment techniques could be applied to develop stents and artificial organs with higher biocompatibility.
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  • Functionalization of Polymer Surface for Nerve Repair
    Fu-Zhai Cui, Yan-Peng Jiao, In-Seop Lee
    2008 Volume 21 Issue 2 Pages 231-244
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.231
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    Surfaces play an important role in biological system for most biological reactions occurring at surfaces and interfaces. One of the emphasis of developing biomaterials for nerve repair is to create perfect surfaces which can provoke specific cellular responses and direct new nerve tissue regeneration. The improvement in biocompatibility of biomaterials for nerve repair by directed surface functionalization is an important contribution to biomaterial development. In this paper, recent advance in polymer surface functionalization for nerve repair is reviewed. Various methods for polymer surface functionalization are introduced for developing nerve repair biomaterials, such as plasma treatment, ion implantation, hydroxyapatite coating, incorporation of bioactive molecules, micropatterning of surface, and their combinations.
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  • Reduction of Friction Coefficient of Magnesium Alloy Sheet by DLC Coating with Low-Temperature Plasma
    Yu Iriyama, Shota Sakurai, Shoichiro Yoshihara, Shunsuke Tsuda
    2008 Volume 21 Issue 2 Pages 245-250
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.245
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    Magnesium alloys have become of interest as promising light metals for various applications. Regardless of their good properties, however, Mg alloys cannot be processed through press-forming because of seizing on the surface of the material. In order to prevent the seizing, we coated diamondlike carbon (DLC) on Mg alloy sheets to reduce the surface friction using low-temperature plasma. We analyzed the surface properties with cross-cut test, friction test, deep drawing along with X-ray photoelectron spectroscopy and scanning electron microscopic observation. DLC has the nature of low friction, which could reduce the friction coefficient of the surface, but it was found that the adhesivity between DLC and Mg alloy sheet was not strong enough. Therefore, silicon interlayer was formed with tetraethoxysilane (TEOS) by plasma between Mg alloy sheet and DLC. The coated DLC on the silicon interlayer in some conditions exhibited very tight and patterned shape, which fairly improved the adhesivity and sustained lower friction. The formability of Mg alloy sheet by deep drawing was also improved.
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  • Preparation of PAAc Grafted ePTFE Films Immobilized with Enzymes Using for DDS
    Kiyomi Matsuda, Yasuhiro Takahashi, Ayumi Kashiwada, Kazunori Yamada, ...
    2008 Volume 21 Issue 2 Pages 251-256
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.251
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    The ePTFE-g-PAAc films that were able to supply the insulin of the diabetic medicine near the human blood pH value were prepared by the combined use of oxygen plasma treatment and AAc photografting at lowered photo-polymerization temperatures compared with the previous report [1-3].
    Two enzymes, GOD and Catalase, were immobilized in the ePTFE-g-PAAc films with the same condensation method as before [1-3]. Although the ePTFE-g-PAAc-i-GOD&Catalase films prepared from AAc-grafting at 60°C were permeable to insulin molecules in a buffer solution of pH 7.40, the ePTFE-g- PAAc-i-GOD&Catalase films prepared at 40 °C considerably obstructed the passage of the insulin molecules. Addition of glucose to the solution leading to the lowering pH level facilitated the permeation of the insulin molecules through the ePTFE-g-PAAc-i- GOD&Catalase films. The immobilization of the enzymes was also confirmed by IR-ATR and SEM.
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  • Functionalization of Polymers Surfaces Using Microwave Plasma Chemical Modification
    Masaki Nagatsu, Martin Kral, Eiki Anzawa, Suguru Noguchi, Akihisa Ogin ...
    2008 Volume 21 Issue 2 Pages 257-261
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.257
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    This paper reports the two topics of the low temperature chemical modification of polymer surfaces using microwave excited surface-wave plasma(SWP). First, for the improvement of hydrophilicity of polymer surfaces, we examined the surface treatment of polymethyl methacrylate(PMMA), polycarbonate(PC), and acrylonitrile-butadiene-styrene(ABS) resin surface using ion-assisted Ar plasma pretreatment followed by the SWP in Ar/CH3COOH gas mixture. Contact angle measurement and X-ray electron spectroscopy have been carried out to investigate the effect of the plasma treatment on the surface properties. Second, we have also studied the surface amination of polymers for medical use using SWP treatment with N,sub>2/H,sub>2 mixture gas or NH3 gas. We obtained about 100 % amino-group selectivity, denoted as NH2/N ratio, by using ammonia SWP.
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  • Deposition of SiO2 Thin Films by Atmospheric Pressure Glow Plasma on Polycarbonate
    Shohei Masuda, Kunihito Tanaka, Masuhiro Kogoma
    2008 Volume 21 Issue 2 Pages 263-266
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.263
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    SiO2 films were deposited using both atmospheric glow plasma chemical deposition (APG-CVD) and spin coating as hard coating agents for their abrasion resistance. Tetraethoxysilane (TEOS) was used as the precursor. We formed films by spin coating on surfaces over APG-CVD as adhesive interlayer, and were able to achieve a hard deposited film without any cracks.
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  • Design of Biointerface by Nonequilibrium Atmospheric Plasma Jets-Approach from Plasma Susceptible Polymers-
    Yukio Nagasaki, Masaya Umeyama, Michiro Iijima, Katsuhisa Kitano, Sato ...
    2008 Volume 21 Issue 2 Pages 267-270
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.267
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  • Synthesis and Characterization of Microplasma-Polymerized Styrene Films
    Hidenobu Aizawa, Atsushi Hori, Akihiko Kojima, Tatsuhiko Yajima
    2008 Volume 21 Issue 2 Pages 271-276
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.271
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    We developed a novel fabrication method of on-demand polymer film synthesis on a substrate under atmospheric pressure using microplasma polymerization with a laboratory-made torch-type microplasma polymerization apparatus. We used styrene as a model monomer for evaluation of MPP-styrene films. These MPP-styrene films were characterized using data FT-IR, XPS, contact angle analysis, solubility, and gas sorption property using QCM technique. Characterization results of FT-IR, contact angle analysis, and XPS suggest that MPP-styrene films were oxidized at the surface and including embryo parts of polymer. The annealing treatment of MPP-styrene film is perfectly effective in decreasing the extractable moieties of MPP-styrene film. Gas sorption properties of MPP-styrene films with annealing were controllable by polymerization parameters namely the carrier gas flow rate of the monomer.
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  • Surface Engineering of Polystyrene Dish for Improvement of Cell Adhesion Using Plasma Techniques
    Yasushi Sasai, Natsuko Matsuzaki, Shin-ichi Kondo, Yukinori Yamanashi, ...
    2008 Volume 21 Issue 2 Pages 277-280
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.277
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  • Enhanced Photochemical Generation of Amines from Trifunctional O-acyloxime
    Kanji Suyama, Tomohiro Inoue, Masamitsu Shirai
    2008 Volume 21 Issue 2 Pages 281-284
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.281
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  • I-Line Sensitive Non-ionic Photoacid Generators Having Thianthrene Skeleton
    Haruyuki Okuyama, Hideaki Naito, Masamitsu Shirai
    2008 Volume 21 Issue 2 Pages 285-288
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.285
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  • Syntheses and Photoreaction Properties of Novel Photopolymer having Styryl Cross Linker
    Shin Utsunomiya
    2008 Volume 21 Issue 2 Pages 289-292
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.289
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    Novel photopolymer having styryl cross linker was synthesized by simple method addition of Vinyl Benzyl Glycidyl Ether (VBGE). Properties of this novel photopolymers were evaluated. As a result, same or higher sensitivity was obtained in comparison with conventional acrylic system by using Oxime compound as photo-initiator. When Acrylic multi-functional monomer was added, styryl cross linker polymers showed high sensitivity without selectivity of initiators. Styryl cross linker polymer is expected as a new excellent material in electrical properties and chemical resistance.
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  • Resist Removal by using Atomic Hydrogen
    Hideo Horibe, Masashi Yamamoto, Eiji Kusano, Tomokazu Ichikawa, Seiich ...
    2008 Volume 21 Issue 2 Pages 293-298
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.293
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    Resist removal technology by using atomic hydrogen generated by tungsten (W) catalyzer was evaluated. This removal method is the dry process which does not use chemicals, so it was expected that the environmental burden and the cost can decrease. The resist removal rate has increased by raising W current and the substrate temperature. The removal rate of the positive type of novolak resist was over 1 μm/min at the current of 30A (W catalyzer was 2000°C) and at the substrate temperature of 230°:C. Polyvinyl phenol (PVP) and poly methylmethacrylate (PMMA) which were used as the shorter wavelength resist were able to be removed as well as the positive type of novolak resist. In these three polymers, PMMA removal rate was about three times as fast as those of others. It is thought that polymer with high removal rate has no benzene ring and is main chain scission type polymer.
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  • Standing-wave Effect in Photoresist with and without HMDS
    Masashi Yamamoto, Hideo Horibe, Atsushi Sekiguchi, Eiji Kusano, Seiich ...
    2008 Volume 21 Issue 2 Pages 299-304
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.299
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    We evaluated standing-wave effects in photoresists with and without hexamethyldisilazane (HMDS), which improves adhesion of a photoresist to a Si-wafer substrate, using a resist development analyzer (RDA). The amplitude of a swing curve with HMDS was reduced around 9% compared to that without HMDS. Perhaps, this is considered a reduction of standing-wave effect in the photoresist attributable to an antireflection effect of an HMDS-photoresist mixed layer. The antireflection effect of the layer was evaluated by calculation using PROLITH. We demonstrated that the thickness, a refractive index and an extinction coefficient of the layer were, respectively, 10 nm, 1.60 and 0.5. Using HMDS can expect to improve dimensional stability by 1.17 times on the calculations.
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  • Fluorescent Spherical Particle Formation from Poly(dimethylsilane) by the Aid of Laser Ablation and Photochemical Reaction
    Hiroshi Morita, Toru Tanabe
    2008 Volume 21 Issue 2 Pages 305-310
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.305
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    With the aid of laser ablation using the third harmonic of Nd:YAG laser light, poly(dimethylsilane) (PDMS) powder produced crystalline deposits as the major product together with a small amount of spherical particles with a diameter of 1 μm. In order to produce the spherical fine particles predominantly, photochemical reactivity of carbon disulfide (CS2) and trimethylsilyl azide (TMSAz) was used during the laser ablation process. In the presence of CS2 vapor, laser-ablated PDMS produced spherical particles with a diameter of∼1 μm and aggregated small particles originating from CS2. To escape from producing aerosol particles from the gaseous molecules, TMSAz vapor which itself did not produce any solid product was introduced onto PDMS powder. Laser-ablated PDMS produced only morphologically identical particles on the whole glass plate with a mean diameter of 1.3 μm. The PDMS/TMSAz particles thus obtained showed a fluorescence peak at 344 nm, being shifted to shorter wavelength by 18 nm than that of PDMS powder.
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  • Photo-resist Removal using Highly Concentrated Ozone Gas-Removal Characteristics of Various Resists-
    Toshinori Miura, Mitsuru Kekura, Hideo Horibe, Masashi Yamamoto
    2008 Volume 21 Issue 2 Pages 311-316
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.311
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    New processing technologies are demanded which produce hyperfine structures for electronic devices and which do not exacerbate environmental problems. We specifically examined photoresist removal technology for this study. Ozone gas of nearly 100% concentration was applied to various photoresists and ion-implanted-photoresists. Results showed that reactivity with ozone gas differs between a novolac resist, which has a benzene ring structure on a main chain, a KrF resist with this structure on a side chain, and an ArF resist which has no such structure. The activation energy of the KrF resist indicates a value close to that of the novolac resist; the value for the ArF resist was larger than these. Irrespective of the ionic species, the ion-implanted-photoresist of amount 1e16 cm-2 of the dose can be removed with 0.7 μm/min or less in the ashing of 400°C in processing temperature. Additionally, results showed that the removal speed slows in order of B, As, and P.
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  • Control of Refractive Index of Double-Decker-Shaped Polysilsesquioxane Film
    Akira Watanabe, Shohei Tadenuma, Tokuji Miyashita
    2008 Volume 21 Issue 2 Pages 317-318
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.317
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  • Preparation and Dielectric Property of Photo-Curable Polysilsesquioxane Hybrids
    Takashi Hamada, Takashi Nagase, Mitsuru Watanabe, Seiji Watase, Hiroyo ...
    2008 Volume 21 Issue 2 Pages 319-320
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.319
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  • Facile Preparation of Hybrid Thin Films with Pd Catalysis for Electroless Plating
    Kimihiko Matsukawa, Takashi Hamada, Seiji Watase, Toshiyuki Tamai, Yum ...
    2008 Volume 21 Issue 2 Pages 321-322
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.321
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  • Red Phosphorescent Iridium Complexes having a Bulky Ancillary Ligand for Solution-processed Organic Light Emitting Diodes
    Keiji Noine, Shohei Kimura, Yong-Jin Pu, Ken-ichi Nakayama, Masaki Yok ...
    2008 Volume 21 Issue 2 Pages 323-325
    Published: June 24, 2008
    Released on J-STAGE: August 13, 2008
    DOIhttps://doi.org/10.2494/photopolymer.21.323
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