-
Yoshiaki Inaki, Eiko Mochizuki, Nobuyoshi Yasui, Mikiji Miyata, Yasush ...
2000 Volume 13 Issue 2 Pages
177-182
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Crystal structure and photodimerization of 1-alkylthymine were studied in single crystals. Length of alkyl chains in 1-alkylthymine affected on crystal structure and photodimerization in single crystal. 1-Alkylthymine gave two types of crystals,
Type 1 and
Type 2 depending on length of alkyl chains and solvent used. This paper deals with
Type 1 crystal, where thymine bases form plates by hydrogen bonding. UV irradiation at 280nm on
Type 1 crystals of 1-alkylthymine gave cyclobutane type photodimers. Crystals of 1-pentylthymine (
C5), 1-nonylthymine (
C9), and 1-decylthymine (
C10) gave
a trans-syn photodimer, but 1-octylthymine (
C8) crystal gave a
trans-anti photodimer. Alkyl chains played an important role in forming different isomers of photodimers.
View full abstract
-
Tatsuya TACHIKAWA, Kimihiro HIRUTA, Sumio TOKITA, Kichisuke NISHIMOTO
2000 Volume 13 Issue 2 Pages
183-186
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Sumio Tokita, Kenji Nagahama, Fumihiro Watanabe
2000 Volume 13 Issue 2 Pages
187-190
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Reaction of fluoran dyes
1a-1f with hydrochloric acid was investigated. Hydrochloric acid was added to the fluoran solution ([
1a-1f]=1.0x10
-4mol dm
-3) in organic solvents, and absorbance of formed colored species
2a-2f was measured by UV-Vis Spectrometer. The increment of the electron donation ability of substituent X at 3-position of
1 resulted in the increase of the formation of
2. When the chloroform solution of the most sensitive compound
1a was irradiated with γ rays, the solution turned red even at dose of 1 Gy. In order to investigate the effect of acid generators,
1b was irradiated with γ rays. Tosyl chloride
4 showed the possibility as an applicant for dosimetry in place of diphenyliodonium chloride
5.
View full abstract
-
Yoshimasa Sakai, Takashi Fukuda, Mitsuru Ueda, Hiro Matsuda
2000 Volume 13 Issue 2 Pages
191-196
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Abstract: Calix[4]resorcinnearene bearing azobenzene moieties (CAAB) was prepared by the etherification of calix[4]resorcinearene (C4RA) with 4-[4-(6-bromohexyloxy)phenylazo]nitrobenzene. The photofunctional properties were evaluated by measuring second harmonic generation (SHG) and electro-optic (E-O). The second harmonic coefficient (d
33) of CAAB and the electro-optic coefficient (r
33) at the wavelength of 1064nm were 33.58×10
-9 [esu] and 4.3pm/V, respectively.
View full abstract
-
Sanghyun Park, Hideki Kawai, Toshihiko Nagamura
2000 Volume 13 Issue 2 Pages
197-201
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
The charge resonance (CR) interactions of a series of bis(4-(4-nitrostyryl)pyridinium)alkane derivatives upon steady photoexcitation through a band pass filter (405nm) were studied by absorption spectroscopy at room temperature. The CR bands due to the intermolecular or intramolecular dimer radical cations were observed with peaks extending from 950nm to 1740nm. The CR band of intermolecular dimer radical caton was common to all these compounds. The relative constant of dimer radical cations depended on the alkyl chain length and the irradiation time. The CR band of intramolecular dimer radical cation was sensitive to their geometrical structure and showed the formation of different dimer radical cations.
View full abstract
-
Toshiaki Kadota, Hiroshi Kageyama, Fujio Wakaya, Kenji Gamo, Yasuhiko ...
2000 Volume 13 Issue 2 Pages
203-204
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Mitsuhiro Okada, Hiroshi Tsushima, Masami Kawabata, Iwao Sumiyoshi, No ...
2000 Volume 13 Issue 2 Pages
205-206
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Yasuyuki Takao, Nobukazu Miyagawa, Shigeru Takahara, Tsuguo Yamaoka
2000 Volume 13 Issue 2 Pages
207-210
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Synthesis and Resist Characteristic Evaluation of Amino-ended Poly(α-Methylstyrene)
Naoki Hirakawa, Takashi Tokuda, Hidetoshi Aoki, Yukio Nagasaki, Masao ...
2000 Volume 13 Issue 2 Pages
211-212
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Yukio Nagasaki, Hideo Satokawa, Masao Kato, Naoki Hirakawa, Hidetoshi ...
2000 Volume 13 Issue 2 Pages
213-214
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Sungeun Lee, Koji Arimitsu, Sang-Wook Park, Kunihiro Ichimura
2000 Volume 13 Issue 2 Pages
215-216
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Sang-Wook Park, Koji Arimitsu, Sungeun Lee, Kunihiro Ichimura
2000 Volume 13 Issue 2 Pages
217-220
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Masaru Tahara, Koji Arimitsu, Sang-Wook Park, Sungeun Lee, Kunihiro Ic ...
2000 Volume 13 Issue 2 Pages
221-222
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Toshikage Asakura, Hitoshi Yamato, Masaki Ohwa
2000 Volume 13 Issue 2 Pages
223-230
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
A new class of compounds which are non-ionic and halogen-free photo acid generators applicable for g-line, i-line and DUV photoresists is reported. The compounds exhibit high solubility in PGMEA, thermal stability in a phenolic polymer matrix up to 140°C, storage stability below 40°C more than 1 year, red-shifted absorption profile reaching to 490nm, effective acid generation in terms of quantum yield and high sensitivity in resist formulations with various exposure wavelength. An application example of the new photoacid generator for chemically amplified negative resist is presented.
View full abstract
-
Satoshi Takahashi, Shinjiro Machida, Kazuyuki Horie
2000 Volume 13 Issue 2 Pages
231-234
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Near-field scanning optical microscopy (NSOM) has been used both to induce and to observe acid generation from a photoacid generator (PAG) doped in poly(methylmethacrylate) (PMMA) films. As a PAG, p-nitrobenzyl 9, 10-dimethoxyanthracene-2-sulfonate (NAS) is used. Acid from PAG is monitored by fluorescence from a pH sensitive dye, Nile blue A (NBA). Our NSOM has a spatial resolution of 100nm which is evaluated from the measurements of a chromium test pattern. A 442 nm radiation from an NSOM probe is used for inducing photoacid generation, and a 660nm fluorescence from NBA cations which is excited with a 620nm light passing through the NSOM probe is used for imaging the spatial distribution of the photoacid. The photoacid-generated area is successfully observed using fluorescence from NBA cations. Comparison between the topographic and NSOM image reveals that NSOM fluorescence image is not affected by the topographic features which are not formed by photochemical reactions.
View full abstract
-
Shigeyuki Iwasa, Kaichiro Nakano, Katsumi Maeda, Etsuo Hasegawa
2000 Volume 13 Issue 2 Pages
235-236
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
X. Allonas, J. P. Fouassier, M. Kaji, M. Miyasaka
2000 Volume 13 Issue 2 Pages
237-241
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
The interactions, in the excited states, between a coumarin and a ketocoumarin together with bisimidazole derivative, mercaptobenzoxazole, titanocene have been studied by laser absorption spectroscopy and by photoconductivity. The redox potentials of these different compounds have been measured and led to the calculation of free enthalpy change for a possible electron transfer reaction. The whole results show that the coumarin is able to demonstrate the formation of radicals through an electron transfer reaction with the additives. On the other hand, the ketocoumarin rather leads to an energy transfer reaction with bisimidazole and to a hydrogen abstraction reaction with the benzoxazole derivative. This study presumes that several coumarin or ketocoumarin/additives combinations should be able to initiate a radical polymerization reaction.
View full abstract
-
Yuichi Araki, Nobukazu Miyagawa, Shigeru Takahara, Tsuguo Yamaoka
2000 Volume 13 Issue 2 Pages
243-246
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Liyuan Wang, Shangxian Yu
2000 Volume 13 Issue 2 Pages
247-251
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
The charge distributions on the rings of phenol, methyl phenols and hydroxymethyl phenols under acidic or alkaline reaction condition are calculated by using ab initio method at HF/6-31G* level. The effects of the introduced methyl and hydroxymethyl on the net charge of ortho-and para- positions of the phenol rings are studied and the relationship of these effects with the reactivity of the compounds in the synthesis of phenolic resins is discussed.
View full abstract
-
Yong He, Wenhui Zhou, Gang Liu, Miao Zhen Li, Erjian Wang
2000 Volume 13 Issue 2 Pages
253-257
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Photoinitiation system composed of squarylium dye and iodonium salt were studied in this work. Such system possesses good thermostability and high photochemical driving force. Upon irradiation, an electron transfer reaction between excited dye and iodonium leads to photobleaching of squarylium dye and generation of active radical. The results obtained indicated that squarylium dye and iodonium salt systems were suitable to initiate visible photpolymerization and photocrosslinking of acrylates effectively.
View full abstract
-
Hong-Ru Li, Jiang-Nan Gu, Shang-Xian Yu
2000 Volume 13 Issue 2 Pages
259-263
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Benzil derivatives and aliphatic tertiary amine were synthesized through new route. The photo-sensitivities of binary photoinitiating systems composed of the benzil derivatives and tertiary amine were measured and compared with commerciallized photoinitiators in the resist screenings. Sulfo-benzil derivatives were more reactive than the other compounds. The new aliphatic tertiary amine synthesized was more reactive than NMDEA (N-methyl diethanol amine).
View full abstract
-
Fang Gao, Yong-yuan Yang
2000 Volume 13 Issue 2 Pages
265-268
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
The visible light dyes were employed to sensitized
o-Cl-Hexaarylbiimidazole (
o-Cl-HABI). The obtained results suggested that
o-Cl-HABI displayed a efficient sensitized photocleavage when exposed to Xenon lamp (use filter cut λ≤400nm). The visible light photosensitive systems can be used in lithographic printing plate and very clear image was obtained. The resolution of image reached 7μm at most. The influence of heating after irradiation and the content of dyes on the resolution of image were carried out.
View full abstract
-
Fang Gao, Yongyuan Yang
2000 Volume 13 Issue 2 Pages
269-272
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Diphenyliodonium hexafluorophosphate can be sensitized efficiently by the dyes Michael Ketone and NK-2204 and produced H
+ which can catalyzed the crossing reaction of the HMMA resin and the m-cresol resin. Therefore, the system composed of Diphenyl iodonium, sensitizer, Michael Ketone or NK-2204, and the HMMA resin and the m-cresol resin can be used in the photoimaging study. The effects of the molar ration of the HMMA resin and the m-cresol resin, the heated temperature and times on the resolution and the halftone dot repetition of the printing plate were carried out.
View full abstract
-
Jong-Man Kim, Tae-Eun Chang, Dong Keun Han, Kwang-Duk Ahn
2000 Volume 13 Issue 2 Pages
273-276
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Hideyuki Endo, Yukihiro Miyama, Takayasu Nihira, Hiroyoshi Fukuro, Eii ...
2000 Volume 13 Issue 2 Pages
277-282
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Alignment properties of nematic liquid crystals (LC) on photo-exposed polymer films have been investigated. Polyimide films prepared from cyclobutane tetracarboxylic dianhydride (CBDA) induced an excellent uniform LC alignment by exposure of linearly polarized UV light. The sensitivity of the photo-alignment of CBDA polyimide films was higher than that of aromatic polyimide films. On the other hand, the LC alignment on fully aromatic polyamide films exhibited the excellent uniformity, although these polyamides contained no photo-reactive groups such as cinnamoyl group. The obtained LC alignment was thermally and optically stable.
View full abstract
-
Tomohisa Gotoh, Taisaku Nakata, Hideya Murai
2000 Volume 13 Issue 2 Pages
283-288
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
We have investigated prepolymers and their photo-polymerization conditions to design a holographic polymer-dispersed liquid crystal (HPDLC) device with high reflectivity. Results show that the reflectivity of an HPDLC device increases as the concentration of urethane acrylate oligomer in the prepolymers increases, and it also increases with laser intensity. These results indicate that accelerating the phase separation during photo-polymerization can improve reflectivity in HPDLCs.
We have also found that a prepolymer containing an oligomer fixes liquid crystal alignment during photo-polymerization. A reverse mode HPDLC device was demonstrated that uses this prepolymer and a dual frequency addressable liquid crystal. The device is transparent in the absence of an electric field and reflective in the presence of an electric field at a frequency higher than the cross over frequency of the liquid crystal.
View full abstract
-
Munekazu Date
2000 Volume 13 Issue 2 Pages
289-294
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Alignment control is promising approach for improving the characteristics of holographic polymer dispersed liquid crystal (HPDLC). This paper describes the methods of controlling the alignment of LC molecules in HPDLC (by using an electric field, shear force, and LC monomer) and the resulting characteristics of the devices. When the alignment is controlled, the diffraction characteristics can have polarization selectivity. The diffraction efficiency is also improved, because the optical anisotropy of LC molecules can be fully used.
View full abstract
-
Hideo Fujikake, Takeshi Murashige, Jun Yonai, Hiroto Sato, Hiroshi Kik ...
2000 Volume 13 Issue 2 Pages
295-300
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
The morphology of polymer fiber network formed in ferroelectric liquid crystal devices was closely observed by optical and scanning electron microscopes, and the formation mechanism of the polymer was investigated for obtaining a rigid polymer structure supporting substrates. It was found that aligned polymer fibers are formed with fibril aggregation, which is induced by photopolymerization of monofunctional acrylate monomer aligned in parallel with the liquid crystal molecular alignment. As the monomer concentration increases, the polymer fibers are transformed into thicker and harder structures. This self-assembling phenomenon is thought to be induced by the interfacial tension of the liquid-state polymer with comparatively low molecular weight during the polymerization, and the transient unstable polymer morphology that appears in the phase separation process can be fixed by rapid curing of the polymer material.
View full abstract
-
Takehiro Toyooka, Yoshihiro Kobori
2000 Volume 13 Issue 2 Pages
301-306
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
"NISSEKI LC Film" is a liquid crystalline polymer film, which has unique optical properties as well as excellent reliability and thermal stability. There are two types of film, one has a twisted nematic structure and another has a hybrid nematic structure. They are suitably used as color compensator of STN-LCD and viewing angle compensator of TFT-LCD, respectively.
View full abstract
-
Norihiro Mizoshita, Takaaki Kutsuna, Kenji Hanabusa, Takashi Kato
2000 Volume 13 Issue 2 Pages
307-312
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
4′-heptyloxybiphenyl (7OCB), have been physically gelled due to the formation of hydrogen-bonded networks comprised of amino acid derivatives. The mixtures of nematic liquid crystals and amino acid derivatives exhibit thermoreversible three states, isotropic, isotropic gel, and nematic liquid-crystalline gel, through the phase change of each of components. The gel states are induced by the formation of microphase-separated structures and transition properties of liquid-crystalline solvents in the network structures are maintained. The anisotropic gels of 5CHB can respond to electric fields in polyimide-coated liquid crystal cells. The existence of a small amount of gelling agents has great effects on the electro-optic properties. Acceleration of response behavior of the nematic liquid crystal has been achieved by such physical gelation.
View full abstract
-
Kohei Goto, Mayumi Kakuta, Yasutake Inoue, Minoru Matsubara
2000 Volume 13 Issue 2 Pages
313-315
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Xiang-Qian Liu, Mitsutoshi Jikei, Masa-aki Kakimoto
2000 Volume 13 Issue 2 Pages
317-319
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Kazuhiro Yamanaka, Mitsutoshi Jikei, Masa-aki Kakimoto, Takayasu Nihir ...
2000 Volume 13 Issue 2 Pages
321-322
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Yoshiyuki Oishi, Kotarou Ogasawara, Hidetoshi Hirahara, Kunio Mori
2000 Volume 13 Issue 2 Pages
323-326
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
-
Toshihiko Matsumoto, Yasumasa Maeda, Naoyuki Takeshima
2000 Volume 13 Issue 2 Pages
327-332
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
A novel polyalicyclic tetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2-
exo, 3-
exo, 5-
exo-tricarboxyl-5-
endo-acetic 2, 3:5, 5-dianhydride was synthesized and the polycondensation of the dianhydride with 1, 3-bis(4-aminophenoxy)benzene was carried out in well-purified
N, N-dimethylacetamide (DMAc) at 140°C under N
2. An inherent viscosity (η
inh) measured using a 0.5g/dL DMAc solution of the polyimide at 30°C was 0.33dL/g. The polymerization solution gave a flexible and tough film after being cast on a glass plate and then cured. The polyimide film was soluble in aprotic polar solvents such as DMAc and
N-methyl-2-pyrrolidone at room temperature. The polyimide showed good thermal stability and the 5% weight loss temperature in N
2 was 490°C. The polyimide film exhibited a
Tg at 227°C. The cutoff at wavelengths was around 290nm and the film was colorless. The transparency in the visible region (400-780nm) was over 85%. The flexible polyimide possessed an average refractive index of 1.611, and the optical anisotropy, the difference between in-plane and out-of-plane refractive indices, was 0.015. The dielectric constant that was estimated from the refractive index according to the modified Maxwell's equation was 2.85.
View full abstract
-
Tsutomu Takeichi, Yutaka Yamazaki
2000 Volume 13 Issue 2 Pages
333-338
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Porous polyimide films were prepared by thermally treating a polymer blend film of polyol and poly(amide acid) obtained from pyromellitic dianhydride (PMDA) and oxydianiline (ODA). Upon thermal treatment of the films at 300 to 400°C, the thermally less stable polyol domains decomposed, leaving porous polyimide films. The presence of pores was confirmed from the scanning electron microscope (SEM) of the surface and the cross-section of the films. The size distribution of the pore was narrow. With the increase of polyol content, the average pore size increased from 2-3 μm to 6-7μm. The porous polyimide films had excellent physical properties in spite of the porous structure. Viscoelastic analyses showed that all the porous polyimide films had high glass transition temperature at above 400°C, and storage moduli were maintained up to 400°C. Carbonization of the porous polyimide films at 900°C for 1h gave porous carbon films maintaining the pore structure.
View full abstract
-
Tsuyohiko Fujigaya, Mitsuru Ueda
2000 Volume 13 Issue 2 Pages
339-344
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Poly(propyleneimine)-based alkaline soluble dendrimer
2 was prepared by the Michael addition reaction of poly(propyleneimine) dendrmer
(PPID) with
N-(2-hydroxy-5-methylphenyl)-2-propenamide. The obtained
2 was well-dissolved in common organic solvents and its film was transparent above 300nm. The dissolution behavior of the
2 film containing 30wt% of 1-{1, 1-bis[4-(2-diazo-1(2H)naphthalenone-5-sulfonyloxy)-phenyl]ethyl}-4-{1-[4-(2-diazo-1(2H)naphthalenone-5-sulfonyloxy)phenyl]-methylethyl}-benzene
(DNQ) after exposure was studied and it was found that the conventional base developer, a 2.38wt% aqueous tetramethylammonium hydroxide
TMAH solution was too alkaline to obtain sufficient dissolution contrast. Therefore, a diluted
TMAH developer [0.7wt%] was used for the positive-type system. Then an unexposed area was completely insoluble, on the other hand an exposed area showed an adequate dissolution rate. The photoresist system containing 30wt% of
DNQ showed a sensitivity of 80 mJ/cm
2 and a contrast of 5.3 with 365nm light. A series of process, that is, imagewise exposure, heat treatment, flood exposure, and development for the resist system resulted in negative-type image.
View full abstract
-
Kazumasa Takeshi, Ken-ichi Okuyama, Yoshihiro Ohba, Mitsuru Ueda
2000 Volume 13 Issue 2 Pages
345-349
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
A negative working thermally stable and photosensitive polymer
3 based on poly(2-hydroxy-6-methylphenol-
co-2, 6-dimethylphenol), 2, 6-bis(hydroxymethyl)-4-methylphenol (
BHMP) as a cross-linker, and a photoacid generator diphenyliodonium 9, 10-dimethoxyanthracene-2-sulfonate (
DIAS) has been developed. Polymer
3 was prepared by oxidative coupling polymerization of 2-(tetrahydropyran-2-yl)oxy-6-methylphenol
1 with 2, 6-dimethylphenol
2 in the molar ratio of 0.85 : 0.15, followed by acid-hydrolysis. Polymer
3 showed excellent transparency above 300nm in the UV-visible spectrum. The photosensitive polymer containing polymer
3 (72wt%),
MBHP (18wt%), and
DIAS (10wt%) showed a sensitivity (D
0.5) of 7.9M/cm
2 and a contrast (r
0.5) of 9.3 when it was exposed 365nm light and postbaked at 125°C for 3min, followed by developing a 2.38wt% aqueous tetramethylammonium hydroxide
TMAH solution at 25°C.
View full abstract
-
Etsu Takeuchi, Yusuke Tajima, Yasuo Shigemitsu, Kazuo Takeuchi, Takesh ...
2000 Volume 13 Issue 2 Pages
351-356
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Highly thermo-stable photosensitive polyimides were prepared from the new diamine monomer containing a furan moiety. UV irradiation and development of the photosensitive polyimide in the presence of a fullerene as a sensitizer afforded good quality patterns. Post-exposure baking was found to improve its photosensitivity. A thick polyimide film (10μm) pattern could also be obtained. The thermal stability of these polyimides, characterized by TGA, was excellent even without any high temperature annealing.
View full abstract
-
MASAO TOMIKAWA, MITSUHITO SUWA, SATOSHI YOSHIDA, YOJI FUJITA, RYOJI OK ...
2000 Volume 13 Issue 2 Pages
357-360
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
We developed the novel positive photosensitive polyimide coatings "PW-1000". The coatings have alkaline developablity as well as fine resolution. The coatings have wide focus margin also. In addition to these photolithographic performances, the "PW-1000" has good heat stability, solution stability, and plasma etching resistance. These features promise that "PW-1000" is suitable for the LSI application.
View full abstract
-
Kaoru Okaniwa
2000 Volume 13 Issue 2 Pages
361-368
Published: 2000
Released on J-STAGE: August 04, 2006
JOURNAL
FREE ACCESS
Process simulators for predicting pattern configuration for photo-resist have been studied vigorously and been commercialized. In such a simulation for photo-definable polyimides (PDPI), however, prediction by using the commercial simulators is quite difficult because patterns of PDPI are influenced by many factors. A process simulator designed exclusively for PDPI was developed in consideration of these factors. According to the PDPI simulator developed here, although quantitative analyses are not enough, visualizing phenomena occurred in PDPI process might be helpful for the new PDPI development, process development and analysis of failure in patterning processes. In this paper, as an example, a suggestion for improving contrast of aqueous alkali developable positive tone PDPI was demonstrated.
View full abstract