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Volume 39, Issue 11
Displaying 1-6 of 6 articles from this issue
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Comparison between Experimental and EstimationJunIchiro Tsubaki, Takamasa Mori, Hiroo Yamakawa, Hidetoshi Mori, Hito ...2002 Volume 39 Issue 11 Pages 800-805
Published: November 10, 2002
Released on J-STAGE: April 30, 2010
JOURNAL FREE ACCESSA new evaluation technique has been developed to measure the hardness of particulate matter by using a compression and stress relaxation test. In this paper we determined the constant k' in Hertz equation from the analysis of the proportional region and compared it with k' calculated from Young's modulus and Poisson's ratio for the verification of this method. Furthermore the effect of particle size distribution on the experimental results was discussed. It was shown that the constant k' obtained from the analysis of the proportional region was well correlated with the calculated k'. It was also found that the value of k' was almost independent of the particle size distribution. These results indicate that the constant k' determined by this method can be a new hardness index of particulate matter.View full abstractDownload PDF (628K) -
Kaoru Kondo, Yuji Imajo, Manabu Shimada, Kikuo Okuyama2002 Volume 39 Issue 11 Pages 806-812
Published: November 10, 2002
Released on J-STAGE: April 30, 2010
JOURNAL FREE ACCESSImprovement of semiconductor integration requires the contamination control of finer particle in semiconductor manufacturing processes. In particular, the control of particle contamination in semiconductor material gases is important for enhancing the production yield. A flow-cell type optical particle counter based on light scattering method was developed for real-time measurement of particles in semiconductor material gases. In this paper, the flow-cell type particle counter was inserted in gas supply lines of semiconductor manufacturing processes. This enabled direct and in-line measurement of particles in the semiconductor material gases for the first time. The measurements showed that the concentration of particles in semiconductor material gases depended on the material and condition of gas cylinders and gas filters. The particle concentration was also affected by the operation of gas supply systems. It was suggested that there was a considerable amount of particulate contaminant generation in the semiconductor gases. The measured results for inert gases were significantly different from those of the semiconductor gases. Consequently, the importance of the direct and in-line measurement was confirmed.View full abstractDownload PDF (961K) -
Yasushi Ohyama, Hiromi Takeuchi, A. T. Pyatenko, Shigeo Chiba, Kunio S ...2002 Volume 39 Issue 11 Pages 813-815
Published: November 10, 2002
Released on J-STAGE: April 30, 2010
JOURNAL FREE ACCESSThis paper presents experimental results on particle behavior in dense phase inside a vertically vibrated container under microgravity. Glass particles of 56μm in average diameter were vibrated in a rectangular container with frequencies between 50 and 250Hz. Parabolic flights of aircraft were performed to achieve 20 seconds of microgravity. Particles formed a laminated structure under microgravity: thin particle layers overlapped and thin air layer was interposed between them. With the increase in frequency, the number of layers increased and the distance between them decreased. However, the structure of layers was not affected by loading masses and acceleration amplitude.View full abstractDownload PDF (3318K) -
Kohji Yoshinaga2002 Volume 39 Issue 11 Pages 816-825
Published: November 10, 2002
Released on J-STAGE: July 01, 2010
JOURNAL FREE ACCESSDownload PDF (5325K) -
Theerachaisupakij Woraporn2002 Volume 39 Issue 11 Pages 834-835
Published: November 10, 2002
Released on J-STAGE: April 30, 2010
JOURNAL FREE ACCESSDownload PDF (4233K) -
Fumio Saito2002 Volume 39 Issue 11 Pages 836-838
Published: November 10, 2002
Released on J-STAGE: April 30, 2010
JOURNAL FREE ACCESSDownload PDF (3969K)
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