Self-organized two-dimensional polystyrene spheres (PSL) were fabricated on a glass substrate by using a capillary coater. The coating speed was 100cm/min and the coating area was over 5×5cm
2. The Voronoi polygon analysis was carried out for evaluating quantitatively the regularity of spheres or pores. The ratio of hexagons in all polygons, that is ordering factor; VP
6, is defined as the quantitative measure of hexagonal closed-packed structures. The maximum VP
6 of PSL spheres by Voronoi polygon analysis was 0.99. After the PSL spheres were completely decomposed at 400°C, the VP
6 of the silica thin film with the pores was 0.98.
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