電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
122 巻, 4 号
選択された号の論文の7件中1~7を表示しています
特集解説
  • 中村 健太郎
    原稿種別: その他
    専門分野: その他
    2002 年 122 巻 4 号 p. 187-192
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    Basic concepts of transducers for sound and vibration are reviewed in this article. Discussions on the frequency and magnitude range of applications of the transducers are presented, followed by introductions of commonly used acoustic sensors and measurement methods such as microphones, ultrasonic transducers and laser Doppler velocimetry. The frequency range spreads from 10 Hz to 10 GHz, while the sound pressure from 10 μPa to 1 MPa. This article presents well-established conventional technologies as well as novel methods for measuring sound/vibration and new applications of the acoustic sensor devices. Various kinds of signal processing technique developed for detection and localization of sound/vibration source, and noise suppression are out of the scope of this review paper. Sensor devices utilizing sound and vibration are not included in this review.
論文
  • 和田 利彦
    原稿種別: その他
    専門分野: その他
    2002 年 122 巻 4 号 p. 193-199
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    This paper proposes an electric resonance model of non-linear phenomena of the piezo-electric vibrator and determines all the loci which reach to the resonance point of the non-linear region. The mechanism of the phenomena is described by using the proposed model which assumes two types of resonance curves in the linear and the non-linear regions. The generation of the jumping phenomena clarified the dependence on three kinds of excitation methods used in the experiment. And all loci which reach the resonance point in a non-linear region are determined by the analysis of mechanical non-linear vibration and the experiment verification.
  • Akira Kimachi, Toshihide Imaizumi, Ai Kato, Shigeru Ando
    原稿種別: Others
    専門分野: Others
    2002 年 122 巻 4 号 p. 200-206
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    This paper proposes a spectrally selective imaging system called “spectral matching imager, ” which consists of the variable wavelength monochrome light source and the correlation image sensor. The variable wavelength monochrome light source illuminates the scene while sweeping its wavelength with time to expand the spectral reflectance/transmittance function of objects along the time axis. At each pixel, the correlation image sensor produces the correlation in the time domain between the expanded spectral function and a reference spectral function. Consequently, pixels that establish a good spectral match have large values in the output image. The spectral matching imager satisfies 1) high spectral resolution, 2) efficient data compression, and 3) tunability to arbitrary optical filter characteristics. Experimental results demonstrate successful detection of objects having detailed narrowband structures, such as glass pieces doped with rare-earth elements.
  • 古谷 充宏, 藤原 茂美, 木村 光照
    原稿種別: その他
    専門分野: その他
    2002 年 122 巻 4 号 p. 207-211
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    Miniaturized thermal analysis sensors integrated together with a micro-heater, a sample-holder and a thermocouple on a Si chip have been fabricated using the micro-machining technique. In this paper this thermal analysis sensor is formed on the SOI substrate to set the liquid sample easily on the sample holder. The micro-heater is made of an n type diffusion layer on the diaphragm. New micro-heater characteristic of ΔT-t curve and thermal time constant are measured. Liquid samples of water and methanol are analyzed, and their clear boiling points and evaporation heats are observed.
  • 渡部 善幸, 峯田 貴, 小林 誠也, 三井 俊明
    原稿種別: その他
    専門分野: その他
    2002 年 122 巻 4 号 p. 212-216
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    We have developed a three-axis p-Si Hall sensor fabricated by microassembly technique of single crystalline silicon structure using a polyimide/metal bimorph cantilever. The 3-axis magnetic flux density can be detected with independent three devices which are X, Y and Z device. These three devices are designed to set into 800μm area and 300μm height cube after microassembly. The microassembly technique consists of the bending of polyimide/metal bimorph cantilever, the planarization of diced silicon sidewalls, and the bonding each axis device to the planarized silicon sidewalls with polyimide interlayer. The measured characteristics of the sensor were as follows, the magnetic sensitivities of each axis device were from 11.18 to 14.91mV/T, the product sensitivities were from 223.6 to 298.2V/AT. Though the cross axis sensitivity of X vs. Z, Y vs. Z and X vs. Y were 3.1%f.s., 3.8%f.s. and −1.1%f.s., respectively, it could be corrected to less than 0.5%f.s..
  • 鈴木 学, 江刺 正喜
    原稿種別: その他
    専門分野: その他
    2002 年 122 巻 4 号 p. 217-222
    発行日: 2002年
    公開日: 2003/03/28
    ジャーナル フリー
    This paper reports a new planer fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), are used for constructing the multilayer structure. Prototype actuators that have 23-120 active layers were fabricated in this method. The measured displacement was 2.5μm (23 layers) and 7.3μm (120 layers) at 100V, respectively. These values agree with the calculated values from the piezoelectric properties of the material.
特集研究開発レター
feedback
Top