巻号一覧
130 巻, 3 号
選択された号の論文の11件中1～11を表示しています
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論文
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Daisuke Yamazaki, Toshitsugu Ueda2010 年 130 巻 3 号 p. 65-68
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーIn this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.抄録全体を表示PDF形式でダウンロード (877K) -
植村 大蔵, 原 和裕2010 年 130 巻 3 号 p. 69-74
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーAlthough Fe2O3-based thin-film gas sensors show considerable sensitivity to pollutant gases such as NOX or inflammable gases such as H2 and i-C4H10, the operation mechanism is not clear. In this study, the Hall effect of the sensing film is measured in an atmosphere containing NOX or an inflammable gas to clarify the sensing mechanism based on the change of the measured carrier density and Hall mobility in the presence of the gas. This study makes clear that the change of carrier concentration mainly determines the sensitivity while the change of Hall mobility does not contribute to the sensitivity. In addition the surface density of chemisorbed species is roughly estimated from the measurements. The Debye length is also estimated and discussed in relation with the sensing mechanism.抄録全体を表示PDF形式でダウンロード (874K) -
横山 達也, 原 和裕2010 年 130 巻 3 号 p. 75-79
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーA micro sensor for polluting gases and organic floating particles has been developed. The sensor is composed of two parts: a sensing element and a micro heater. Both parts are fabricated using thin-film technology, IC fabrication, and a micromachining technique. The sensing film has a double-layered structure; the first layer is a Fe2O3-based thin-film and the second layer is a SnO2-based thin-film. They are deposited by r.f. sputtering on a SiO2/Al2O3/SiO2 diaphragm formed on a Si substrate. A thin-film heater is also fabricated on a similar diaphragm on another Si substrate. The sensing element and the micro heater are placed in parallel at a distance of about 50μm. The sensor is sensitive to polluting gases such as NOX, exhaust gases, cigarette smoke, and organic floating particles such as pollen.抄録全体を表示PDF形式でダウンロード (656K) -
松本 昌大, 山田 雅通, 中野 洋, 南谷 林太郎, 渡辺 泉, 半沢 恵二, 嶋田 智2010 年 130 巻 3 号 p. 80-85
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーA new cyclone bypass is adopted to prevent collision of dusts and water splash to the sensing element. Poly silicon heater and temperature sensor are used to obtain corrosion resistance and acidity-proof of the sensing element. The signal conditioning LSI compensates sensor characteristic by calculate 3rd order polynomial expression. Micro airflow sensor for automobile with high accuracy of 2% and high reliability of 2% was achieved.抄録全体を表示PDF形式でダウンロード (843K) -
柴田 幹, 丹保 豊和2010 年 130 巻 3 号 p. 86-91
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーWe have developed convenient light sensors to control a platform of solar cell panel. Dual axis light sensor in the present paper has structure of 5 PD (photodiode) light sensor which is composed of 5 photodiodes attached on a frustum of pyramid(1). Light source can be captured in front of the sensor by rotating the X and Y axis as decreasing the output deviation between two pairs of outside photodiodes. We here report the mechanism of sun tacking using the dual axis 5 PD light sensor and the fundamental results performed in the dark room.抄録全体を表示PDF形式でダウンロード (680K) -
金森 義明, 灰田 周平, 羽根 一博2010 年 130 巻 3 号 p. 92-96
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーWe design subwavelength gratings (SWGs) in 1.55 μm wavelength range used for optical communication devices or solar cells. Also, we propose a novel fabrication technique of SWGs using self-organized nanoparticles, for the large-area and low-cost fabrication. In the fabrication, SiO2 particles with the diameters of 170 nm are spin-coated on a silicon substrate. Then, a 170-nm-period SiO2 particle pattern is formed on the substrate. Using the SiO2 particles as a mask, the silicon substrate is etched by a dry etching machine. A 170-nm-period SWG with tapered profile is fabricated. The SWG height is approximately 820 nm. Reflectivity of the SWG is decreased to be -18.7 dB (1.3%) from -3.39 dB (45.8%) of a Si mirror surface at a wavelength of 1550 nm. Calculated reflectivity of the SWG at a wavelength of 1550 nm is -18.3 dB (1.5%), which almost agrees with the measured value.抄録全体を表示PDF形式でダウンロード (1302K)
部門記事
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土屋 智由, 小野 崇人, 村上 裕二2010 年 130 巻 3 号 p. 97-102
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーPDF形式でダウンロード (604K) -
中本 高道2010 年 130 巻 3 号 p. 103
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーPDF形式でダウンロード (463K) -
2010 年 130 巻 3 号 p. 104
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーPDF形式でダウンロード (381K) -
2010 年 130 巻 3 号 p. 105
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーPDF形式でダウンロード (195K) -
2010 年 130 巻 3 号 p. 106
発行日: 2010/03/01
公開日: 2010/03/01
ジャーナル フリーPDF形式でダウンロード (121K)
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