MEMS (Micro Electro Mechanical Systems) play important roles as key components in systems. However it is not easy to be applied in market because these require heterogeneous knowledge and expensive facilities. Training of MEMS engineers who have practical experiences, accumulation and its exploitation of experiences and sharing of facilities are required for MEMS to be used in a market. Technical approaches for the practically applicable MEMS as hetero integration with circuit and packaging are described.
This paper presents a new 1/f fluctuation model in which a 1/f power spectrum with a wide frequency range is obtained, without artificial assumptions such as a uniform distribution of traps in oxide layers. Second-order reactions produce transient waves inversely proportional to the elapsed time soon after they begin. The transient waves can be broken into square pulses, which are superposed at random. A 1/f power spectrum is then obtained regardless of the initial value and the rate constant of the reaction. The validity of the model is confirmed by numerical simulations, in which 1/f power spectra are observed over a wide frequency range compared with the sampling range.
The combination of high robustness, lightness and thinness is important for mobile notebook. The design and configuration of hinge bracket is one of the most important parameters that determine the robustness of mobile notebook. At present, the optimization of that part's design parameter has not been approached theoretically. Some types of hinge brackets for some notebooks were compared with numerical analysis, and then it was confirmed with actual hardware testing. We show the root cause of current problem, and the effectiveness of hinge bracket design parameters optimization is reported.
This paper demonstrates successful deposition and etching of Pb[Zr,Ti]O3 (PZT) thin films on pre-etched Si substrate with pits having depths of several hundred micrometers. Conventionally, for fabrication of microelectromechanical systems, PZT films are deposited onto a flat substrate because of inherent difficulties associated with stable deposition and processing. We successfully established the fabrication of PZT thin films and electrodes on non-flat and pre-etched substrate by using sputtering deposition and projection exposure techniques. The evaluation results reveal that the PZT thin film deposited onto the pre-etched substrate has good ferroelectric characteristics, including piezoelectric d33 constant of 80 pm/V.