電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
134 巻, 1 号
選択された号の論文の15件中1~15を表示しています
論文
研究開発レター
  • Kensuke Kanda, Shogo Kajimura, Junichi Inoue, Takayuki Fujita, Kazusuk ...
    2014 年 134 巻 1 号 p. 18-19
    発行日: 2014/01/01
    公開日: 2014/01/01
    ジャーナル 認証あり
    This paper demonstrates successful deposition and etching of Pb[Zr,Ti]O3 (PZT) thin films on pre-etched Si substrate with pits having depths of several hundred micrometers. Conventionally, for fabrication of microelectromechanical systems, PZT films are deposited onto a flat substrate because of inherent difficulties associated with stable deposition and processing. We successfully established the fabrication of PZT thin films and electrodes on non-flat and pre-etched substrate by using sputtering deposition and projection exposure techniques. The evaluation results reveal that the PZT thin film deposited onto the pre-etched substrate has good ferroelectric characteristics, including piezoelectric d33 constant of 80 pm/V.
 
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