電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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133 巻, 4 号
選択された号の論文の10件中1～10を表示しています
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論文
  • Auメッキ層及び台形型ビームを用いたMEMS熱式マイクロ・アクチュエータの検討
    落合 邦行, 長田 貴裕, 室 英夫
    2013 年 133 巻 4 号 p. 100-104
    発行日: 2013/04/01
    公開日: 2013/04/01
    DOIhttps://doi.org/10.1541/ieejsmas.133.100
    ジャーナル フリー
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    Recently, the micro fluid systems have been extensively studied, where microactuators such as micro valves fabricated by MEMS technology are essential for realizing these systems. In this paper thermal microactuators of trapezoidal shape fabricated by SOI-MUMPs technology with and without Au electroplating layers have been studied for obtaining larger displacement.
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  • 射出成形における樹脂材料のサブミクロン構造への充填挙動
    吉村 千里, 細川 裕之, 下島 康嗣, 糸魚川 文広
    2013 年 133 巻 4 号 p. 105-111
    発行日: 2013/04/01
    公開日: 2013/04/01
    DOIhttps://doi.org/10.1541/ieejsmas.133.105
    ジャーナル フリー
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    The moldability of sub-μm pillar injection molding was investigated by using polycarbonate with four kinds of die material; SKD11, WC/Co, Ni and DLC coated on SKD11. It was also investigated by using Cyclic olefin polymer (COP) with SKD11 and DLC coated on SKD11. The cross-sectional profiles of molded object were precisely measured by a critical dimension FE-SEM. In the case of injecting polycarbonate with a SKD11 or Ni die, a tip of molded object had a paraboloid shape which may be caused by extrusion with large friction between the die materials and polycarbonate. In the case of injecting polycarbonate with a WC/Co or DLC die, a frustum shape with plateau due to low friction was exhibited in spite of large wettability between WC/Co and the melted polycarbonate. It may be considered that a multitude of small void on the WC/Co surface caused the moldability with low friction. On the other hand, The moldability was insensitive with molding conditions in COP with SKD11 or DLC coated on SKD11 die.
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  • 大面積デバイスのための繊維状基材への連続微細パターン高速成形
    高木 秀樹, 大友 明宏, 銘苅 春隆, 小久保 光典, 後藤 博史
    2013 年 133 巻 4 号 p. 112-117
    発行日: 2013/04/01
    公開日: 2013/04/01
    DOIhttps://doi.org/10.1541/ieejsmas.133.112
    ジャーナル フリー
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    Weaving e-textile with fibrous devices is one of the methods to realize large-area devices which can detect distribution of various physical quantities. In the process, highly efficient micro fabrication method on the fiber substrate is necessary. We have developed a reel-to-reel roller imprint system. To keep up a constant press force onto the fiber substrate during roller imprint, and to preserve the stability of deformation, we adopted press force control systems. By using a press force control method based on the rotational angle of the cylindrical molds, high speed imprint at the substrate feeding of 20m/min was realized. Micro-pattern replication down to 10μm feature size is also realized at the substrate feeding of 20m/min. These results demonstrate the feasibility of the developed system.
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  • ツリガネムシの繊毛を用いた能動型マイクロミキサ
    永井 萌土, 早坂 陽, 川島 貴弘, 柴田 隆行
    2013 年 133 巻 4 号 p. 118-123
    発行日: 2013/04/01
    公開日: 2013/04/01
    DOIhttps://doi.org/10.1541/ieejsmas.133.118
    ジャーナル フリー
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    Bioactuator from a microorganism is a promising alternative actuator, since bioactuator works in chemical energy and does not require an external driving circuit. We demonstrate mixing of two continuous solutions by ciliary motion of Vorticella canvallaria. We fabricated a Y-shape microchannel and located Vorticella in it. After spontaneous cell adhesion, two solutions were introduced by hydrostatic pressure. One of the solutions contains fluorescent particles with a diameter of 0.5µm to visualize mixing. Vorticella mixed the low diffusion coefficient of particles in the channel. Mixing of the particles progressed as a flow moved downstream. The mixing performance is quantified by characterizing intensity profiles across the flow channel. Cells of Vorticella ranging from 9 to 15 cells provide significant mixing of the solutions in 8,000µm at a flow speed of 40µm/s.
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