電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
134 巻, 3 号
選択された号の論文の13件中1~13を表示しています
特集:センサ・マイクロマシン英文特集号
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特集論文
  • Hironori Kumazaki, Munehiro Hiramatsu, Hisakazu Oguri, Seiki Inaba, Ka ...
    2014 年 134 巻 3 号 p. 41-46
    発行日: 2014/03/01
    公開日: 2014/03/01
    ジャーナル フリー
    We report the design and fabrication of a novel fiber optic bend sensor capable of measuring the bend direction and degree of curvature simultaneously. The sensor has a serial arrangement of two fiber Bragg gratings (FBGs) with two different reflection center wavelengths and similar asymmetrical cross sections with different etching faces on an independent single-mode fiber. These cross sections were fabricated by anisotropic reactive ion etching (RIE) using CF4 plasma. The reflection center wavelengths of the two FBGs shifted sinusoidally with a phase difference of π/2 as a function of the bend direction under constant bend feeder displacement. Because it was shown that the reflection center wavelength shifted linearly as a function of the degree of curvature of an FBG with an asymmetrical cross section in our previous experiment, this sensor could be used to detect both the bend direction and the curvature from a pair of central reflection wavelength shifts for two FBGs. These experimental results were compared with theoretical values calculated from a strain of the core in an etched optical fiber.
  • Hiroshi Oigawa, Keisuke Hayama, Jing Ji, Satoshi Ikezawa, Toshitsugu U ...
    2014 年 134 巻 3 号 p. 47-51
    発行日: 2014/03/01
    公開日: 2014/03/01
    ジャーナル フリー
    Recently, AT-cut quartz resonators have found widespread use as RF and high-sensitivity devices. In these applications, further miniaturization and high-frequency stability are required. To achieve a high quality (Q)-factor and high productivity, the authors have proposed a novel resonator shape in which the surface is machined as a three-dimensional stripe-like structure. This shape is called quasi-convex. In this paper, we discuss the design and fabrication of quasi-convex resonators to verify their effectiveness. First, with regard to the height of the convex part and the pitch of the quasi-convex pattern, the optimal resonator design is discussed on the basis of the results of a finite-element method simulation. Then, prototypes of the quasi-convex resonators fabricated by deep reactive-ion etching and micro electro-mechanical systems fabrication technology are presented. In our experiments, the highest Q-factor is obtained when the height ratio of the convex part was 5% and the pitch is 100 µm. In addition, the Q-factor of the quasi-convex resonators is seven times greater than that of ordinary plane-shaped resonators, as confirmed using vacuum equipment.
  • Ami Tanaka, Fumiyasu Utsunomiya, Takakuni Douseki
    2014 年 134 巻 3 号 p. 52-57
    発行日: 2014/03/01
    公開日: 2014/03/01
    ジャーナル フリー
    A self-powered plant-health-monitoring sensor powered by a sap-activated battery that consists of two different types of metal electrodes and is activated by the sap of a vascular plant has been developed as an application for wireless biosensor networks. The battery consists of a galvanized iron nail inserted into a tree trunk and a stainless steel electrode planted in the soil nearby. Its output power is on the order of 1 µW. An intermittent-power-supply circuit with a divided-power-line structure, which separates the power line of a storage capacitor while it is discharging, makes it possible to charge the capacitor with an input power of around 1 µW and to supply power to a wireless transmitter with a power dissipation of a few milliwatts. To verify the effectiveness of the circuit scheme, a prototype sensor was fabricated and tested on a potted pachira tree. The sensor was able to transmit a signal about every 40 min over a distance of 5 m. We verified that the variation in the interval between transmitted signals depended on the water content of the soil around the tree.
  • Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Har ...
    2014 年 134 巻 3 号 p. 58-63
    発行日: 2014/03/01
    公開日: 2014/03/01
    ジャーナル フリー
    A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width.
  • Tasuku Nakahara, Naoto Isozaki, Suguru Ando, Nagendra Kumar Kamisetty, ...
    2014 年 134 巻 3 号 p. 64-69
    発行日: 2014/03/01
    公開日: 2014/03/01
    ジャーナル フリー
    In this report, we propose a microfluidic device made of fused silica substrates and an optimized assay procedure for the device to reconstruct a motor protein system. The fabricated device is created using photolithography methods and bonding techniques to realize a minimum channel size of 4 µm in width and 2 µm in depth. The glass bonding process achieves good reproducibility by optimizing substrate cleaning processes, coating conditions, and the concentration of the sodium silicate solution. The assay sequence required to realize microtubule gliding in the channel without losing protein functionality is optimized to allow manipulation of the microtubule by applying an electric field. The average curvature of the microtubule trajectory is measured at 5.7±2.8 µm (N=3) at an electric field of 5 kV/m. The proposed device might have applications in micro total analysis systems.
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